Patent | Date |
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Expandable Barrier Actuated Valve App 20220057017 - Poon; Alex Ka Tim ;   et al. | 2022-02-24 |
Dual valve fluid actuator assembly Grant 11,092,170 - Poon , et al. August 17, 2 | 2021-08-17 |
Dual Valve Fluid Actuator Assembly App 20190376531 - Poon; Alex Ka Tim ;   et al. | 2019-12-12 |
Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machine Grant 9,217,933 - Poon , et al. December 22, 2 | 2015-12-22 |
Immersion lithography apparatus and method having movable liquid diverter between immersion liquid confinement member and substrate Grant 9,176,394 - Poon , et al. November 3, 2 | 2015-11-03 |
Apparatus and methods for recovering fluid in immersion lithography Grant 8,934,080 - Poon , et al. January 13, 2 | 2015-01-13 |
Apparatus And Methods For Keeping Immersion Fluid Adjacent To An Optical Assembly During Wafer Exchange In An Immersion Lithography Machine App 20140232999 - POON; Alex Ka Tim ;   et al. | 2014-08-21 |
Apparatus and method for recovering liquid droplets in immersion lithography Grant 8,780,323 - Poon , et al. July 15, 2 | 2014-07-15 |
Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machine Grant 8,743,343 - Poon , et al. June 3, 2 | 2014-06-03 |
Immersion Lithography Apparatus And Method Having Movable Liquid Diverter Between Immersion Liquid Confinement Member And Substrate App 20140071412 - POON; Alex Ka Tim ;   et al. | 2014-03-13 |
Apparatus and method to control vacuum at porous material using multiple porous materials Grant 8,634,055 - Poon , et al. January 21, 2 | 2014-01-21 |
Immersion lithography apparatus and method having movable liquid diverter between immersion liquid confinement member and substrate Grant 8,610,873 - Poon , et al. December 17, 2 | 2013-12-17 |
Apparatus And Methods For Keeping Immersion Fluid Adjacent To An Optical Assembly During Wafer Exchange In An Immersion Lithography Machine App 20130141702 - POON; Alex Ka Tim ;   et al. | 2013-06-06 |
Modular Coil Arrays For Planar And Linear Motors App 20130069449 - Pharand; Michel ;   et al. | 2013-03-21 |
Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machine Grant 8,400,610 - Poon , et al. March 19, 2 | 2013-03-19 |
Apparatus And Methods For Recovering Fluid In Immersion Lithography App 20130010271 - POON; Alex Ka Tim ;   et al. | 2013-01-10 |
Apparatus And Methods For Keeping Immersion Fluid Adjacent To An Optical Assembly During Wafer Exchange In An Immersion Lithography Machine App 20120262687 - Poon; Alex Ka Tim ;   et al. | 2012-10-18 |
Apparatus and methods for recovering fluid in immersion lithography Grant 8,289,497 - Poon , et al. October 16, 2 | 2012-10-16 |
Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machine Grant 8,237,911 - Poon , et al. August 7, 2 | 2012-08-07 |
Microchannel-cooled Coils Of Electromagnetic Actuators Exhibiting Reduced Eddy-current Drag App 20120062866 - Binnard; Michael B. ;   et al. | 2012-03-15 |
Apparatus and method for recovering liquid droplets in immersion lithography App 20110164239 - Poon; Alex Ka Tim ;   et al. | 2011-07-07 |
Apparatus and method for recovering liquid droplets in immersion lithography Grant 7,929,109 - Poon , et al. April 19, 2 | 2011-04-19 |
Electromagnetic Coil Design for Improved Thermal Performance App 20100271159 - Poon; Alex Ka Tim ;   et al. | 2010-10-28 |
Apparatus and method for recovering fluid for immersion lithography App 20100231876 - Poon; Alex Ka Tim ;   et al. | 2010-09-16 |
Apparatus And Method To Control Liquid Stagnation In Immersion Liquid Recovery App 20100220301 - POON; Alex Ka Tim ;   et al. | 2010-09-02 |
Apparatus and method for recovering fluid for immersion lithography Grant 7,751,026 - Poon , et al. July 6, 2 | 2010-07-06 |
Shield Layer Plus Refrigerated Backside Cooling For Planar Motors App 20100156198 - Cooper; Alexander ;   et al. | 2010-06-24 |
Apparatus And Method To Control Vacuum At Porous Material Using Multiple Porous Materials App 20100134773 - POON; Alex Ka Tim ;   et al. | 2010-06-03 |
Apparatus and methods for recovering fluid in immersion lithography App 20090237631 - Poon; Alex Ka Tim ;   et al. | 2009-09-24 |
Immersion lithography apparatus and method having movable liquid diverter between immersion liquid confinement member and substrate App 20090231560 - Poon; Alex Ka Tim ;   et al. | 2009-09-17 |
Gas curtain type immersion lithography tool using porous material for fluid removal Grant 7,576,833 - Poon , et al. August 18, 2 | 2009-08-18 |
Immersion lithography system and method having an immersion fluid containment plate for submerging the substrate to be imaged in immersion fluid Grant 7,532,309 - Poon , et al. May 12, 2 | 2009-05-12 |
Gas curtain type immersion lithography tool using porous material for fluid removal App 20090002648 - Poon; Alex Ka Tim ;   et al. | 2009-01-01 |
Nozzle to help reduce the escape of immersion liquid from an immersion lithography tool App 20080231822 - Poon; Alex Ka Tim ;   et al. | 2008-09-25 |
Apparatus and methods for reducing the escape of immersion liquid from immersion lithography apparatus App 20080231823 - Poon; Alex Ka Tim ;   et al. | 2008-09-25 |
Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machine App 20080225246 - Poon; Alex Ka Tim ;   et al. | 2008-09-18 |
Apparatus, systems and methods for removing liquid from workpiece during workpiece processing App 20080225248 - Poon; Alex Ka Tim ;   et al. | 2008-09-18 |
Apparatus and methods for removing immersion liquid from substrates using temperature gradient App 20080212050 - Poon; Alex Ka Tim ;   et al. | 2008-09-04 |
Apparatus and methods for minimizing force variation from immersion liquid in lithography systems App 20080198348 - Poon; Alex Ka Tim ;   et al. | 2008-08-21 |
Immersion lithography system and method having a wafer chuck made of a porous material App 20080100812 - Poon; Alex Ka Tim ;   et al. | 2008-05-01 |
Exposure apparatus that includes a phase change circulation system for movers App 20080073563 - Novak; W. Thomas ;   et al. | 2008-03-27 |
Apparatus and methods for recovering fluid in immersion lithography App 20080043211 - Poon; Alex Ka Tim ;   et al. | 2008-02-21 |
Immersion lithography system and method having an immersion fluid containment plate for submerging the substrate to be imaged in immersion fluid App 20070279608 - Poon; Alex Ka Tim ;   et al. | 2007-12-06 |
Apparatus and method for containing immersion liquid in immersion lithography App 20070126999 - Poon; Alex Ka Tim ;   et al. | 2007-06-07 |
Apparatus and method for recovering liquid droplets in immersion lithography App 20070091289 - Poon; Alex Ka Tim ;   et al. | 2007-04-26 |
Apparatus and method for recovering fluid for immersion lithography App 20070046910 - Poon; Alex Ka Tim ;   et al. | 2007-03-01 |