Kenworthy; Ian J.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Kenworthy; Ian J..The latest application filed is for "gas distribution showerhead for inductively coupled plasma etch reactor".

Company Profile

0.9.9

Kenworthy; Ian J. - Mountain View CA
Kenworthy; Ian J. - Campbell CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Replaceable upper chamber parts of plasma processing apparatus Grant 10,074,521 - Brown , et al. September 11, 2	2018-09-11
Gas distribution showerhead for inductively coupled plasma etch reactor Grant 9,934,979 - Kang , et al. April 3, 2	2018-04-03
Gas Distribution Showerhead For Inductively Coupled Plasma Etch Reactor App 20150318147 - KANG; Michael ; et al.	2015-11-05
Replaceable Upper Chamber Parts Of Plasma Processing Apparatus App 20150279621 - Brown; Daniel Arthur ; et al.	2015-10-01
Gas distribution showerhead for inductively coupled plasma etch reactor Grant 9,099,398 - Kang , et al. August 4, 2	2015-08-04
Replaceable upper chamber parts of plasma processing apparatus Grant 9,076,634 - Brown , et al. July 7, 2	2015-07-07
Gas Distribution Showerhead For Inductively Coupled Plasma Etch Reactor App 20140065827 - Kang; Michael ; et al.	2014-03-06
Gas distribution showerhead for inductively coupled plasma etch reactor Grant 8,562,785 - Kang , et al. October 22, 2	2013-10-22
Acoustic Energy Utilization In Plasma Processing App 20130264309 - Kenworthy; Ian J. ; et al.	2013-10-10
Gas Distribution Showerhead For Inductively Coupled Plasma Etch Reactor App 20120309204 - Kang; Michael ; et al.	2012-12-06
Aluminum-plated components of semiconductor material and methods of manufacturing the components Grant 8,282,987 - Kenworthy , et al. October 9, 2	2012-10-09
Aluminum-plated Components Of Semiconductor Material Processing Apparatuses And Methods Of Manufacturing The Components App 20120132532 - Kenworthy; Ian J. ; et al.	2012-05-31
Aluminum-plated components of semiconductor material processing apparatuses and methods of manufacturing the components Grant 8,128,750 - Kenworthy , et al. March 6, 2	2012-03-06
Replaceable Upper Chamber Parts Of Plasma Processing Apparatus App 20110056626 - Brown; Daniel Arthur ; et al.	2011-03-10
Aluminum-plated components of semiconductor material processing apparatuses and methods of manufacturing the components App 20080241517 - Kenworthy; Ian J. ; et al.	2008-10-02

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