Kenney; Jason A.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Kenney; Jason A..The latest application filed is for "apparatus to reduce polymers deposition".

Company Profile

5.14.20

Kenney; Jason A. - Sunnyvale CA
KENNEY; Jason A. - Campbell CA
Kenney; Jason A. - San Jose CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Universal process kit Grant 11,049,760 - Joubert , et al. June 29, 2	2021-06-29
Symmetrical plural-coil plasma source with side RF feeds and RF distribution plates Grant 10,811,226 - Carducci , et al. October 20, 2	2020-10-20
Apparatus To Reduce Polymers Deposition App 20200185256 - NGUYEN; Andrew ; et al.	2020-06-11
Symmetrical inductively coupled plasma source with coaxial RF feed and coaxial shielding Grant 10,249,470 - Kenney , et al.	2019-04-02
Plasma Reactor Having Radial Struts for Substrate Support App 20190085467 - Nguyen; Andrew ; et al.	2019-03-21
Multiple coil inductively coupled plasma source with offset frequencies and double-walled shielding Grant 10,170,279 - Kenney , et al. J	2019-01-01
Inductively coupled plasma source with top coil over a ceiling and an independent side coil and independent air flow Grant 10,131,994 - Nguyen , et al. November 20, 2	2018-11-20
Method To Modulate The Wafer Edge Sheath In A Plasma Processing Chamber App 20180323042 - WANG; Haitao ; et al.	2018-11-08
Inductively Coupled Plasma Source With Symmetrical Rf Feed And Reactance Elements App 20180218873 - Kenney; Jason A. ; et al.	2018-08-02
Plasma Source With Symmetrical Rf Feed App 20180211811 - Kenney; Jason A. ; et al.	2018-07-26
Symmetrical Plural-Coil Plasma Source with Side Rf Feeds and Rf Distribution Plates App 20180138014 - Carducci; James D. ; et al.	2018-05-17
Inductively coupled plasma source with symmetrical RF feed Grant 9,928,987 - Kenney , et al. March 27, 2	2018-03-27
Inductively coupled plasma source with multiple dielectric windows and window-supporting structure Grant 9,896,769 - Nguyen , et al. February 20, 2	2018-02-20
Symmetrical plural-coil plasma source with side RF feeds and RF distribution plates Grant 9,870,897 - Carducci , et al. January 16, 2	2018-01-16
Inductively Coupled Plasma Source with Multiple Dielectric Windows and Window Supporting Structure App 20170350018 - Nguyen; Andrew ; et al.	2017-12-07
Symmetrical Inductively Coupled Plasma Source with Symmetrical Flow Chamber App 20170350017 - Nguyen; Andrew ; et al.	2017-12-07
Composite edge ring Grant D797,691 - Joubert , et al. September 19, 2	2017-09-19
Universal Process Kit App 20170256435 - JOUBERT; Olivier ; et al.	2017-09-07
Symmetrical inductively coupled plasma source with symmetrical flow chamber Grant 9,745,663 - Nguyen , et al. August 29, 2	2017-08-29
Symmetrical inductively coupled plasma source with side RF feeds and spiral coil antenna Grant 9,449,794 - Nguyen , et al. September 20, 2	2016-09-20
Three-coil inductively coupled plasma source with individually controlled coil currents from a single RF power generator Grant 9,111,722 - Dorf , et al. August 18, 2	2015-08-18
Three-coil inductively coupled plasma source with individually controlled coil currents from a single RF power generator Grant 9,082,591 - Dorf , et al. July 14, 2	2015-07-14
Symmetrical inductively coupled plasma source with side RF feeds and RF distribution plates Grant 9,082,590 - Carducci , et al. July 14, 2	2015-07-14
Symmetrical Plural-coil Plasma Source With Side Rf Feeds And Rf Distribution Plates App 20140312766 - Carducci; James D. ; et al.	2014-10-23
Multiple Coil Inductively Coupled Plasma Source With Offset Frequencies And Double-walled Shielding App 20140265832 - Kenney; Jason A. ; et al.	2014-09-18
Symmetrical Inductively Coupled Plasma Source With Side Rf Feeds And Spiral Coil Antenna App 20140232263 - Nguyen; Andrew ; et al.	2014-08-21
Inductively Coupled Plasma Source With Plural Top Coils Over A Ceiling And An Independent Side Coil App 20140020836 - NGUYEN; ANDREW ; et al.	2014-01-23
Symmetrical Inductively Coupled Plasma Source With Coaxial Rf Feed And Coaxial Shielding App 20140020838 - Kenney; Jason A. ; et al.	2014-01-23
Inductively Coupled Plasma Source With Symmetrical Rf Feed App 20140020839 - Kenney; Jason A. ; et al.	2014-01-23
Inductively Coupled Plasma Source With Multiple Dielectric Windows And Window-supporting Structure App 20140020837 - NGUYEN; ANDREW ; et al.	2014-01-23
Symmetrical Inductively Coupled Plasma Source With Side Rf Feeds And Rf Distribution Plates App 20140021861 - Carducci; James D. ; et al.	2014-01-23
Symmetrical Inductively Coupled Plasma Source With Symmetrical Flow Chamber App 20140020835 - Nguyen; Andrew ; et al.	2014-01-23
Three-coil Inductively Coupled Plasma Source With Individually Controlled Coil Currents From A Single Rf Power Generator App 20130278141 - Dorf; Leonid ; et al.	2013-10-24
Three-coil Inductively Coupled Plasma Source With Individually Controlled Coil Currents From A Single Rf Power Generator App 20130278142 - Dorf; Leonid ; et al.	2013-10-24

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