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Patent applications and USPTO patent grants for Kennard; Mark Allen.The latest application filed is for "high temperature electrostatic chuck".
Patent | Date |
---|---|
High temperature electrostatic chuck Grant 6,669,783 - Sexton , et al. December 30, 2 | 2003-12-30 |
High temperature electrostatic chuck Grant 6,567,258 - Sexton , et al. May 20, 2 | 2003-05-20 |
High temperature electrostatic chuck App 20030003749 - Sexton, Greg ;   et al. | 2003-01-02 |
High temperature electrostatic chuck App 20020075625 - Sexton, Greg ;   et al. | 2002-06-20 |
High temperature electrostatic chuck Grant 6,377,437 - Sexton , et al. April 23, 2 | 2002-04-23 |
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