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Patent applications and USPTO patent grants for Kendall; Rodney A..The latest application filed is for "remote clamping mechanism via vacuum feedthrough".
Patent | Date |
---|---|
Remote clamping mechanism via vacuum feedthrough Grant 6,908,255 - Kendall , et al. June 21, 2 | 2005-06-21 |
Remote Clamping Mechanism Via Vacuum Feedthrough App 20040265052 - Kendall, Rodney A. ;   et al. | 2004-12-30 |
Electron beam position reference system Grant 6,818,906 - Hartley , et al. November 16, 2 | 2004-11-16 |
Electron beam lithography apparatus with self actuated vacuum bypass valve Grant 6,724,001 - Pinckney , et al. April 20, 2 | 2004-04-20 |
Electron scatter in a thin membrane to eliminate detector saturation Grant 6,639,219 - Kendall , et al. October 28, 2 | 2003-10-28 |
High performance source for electron beam projection lithography Grant 6,596,999 - Golladay , et al. July 22, 2 | 2003-07-22 |
Electron scatter in a thin membrane to eliminate detector saturation App 20030089853 - Kendall, Rodney A. ;   et al. | 2003-05-15 |
High performance source for electron beam projection lithography App 20030085364 - Golladay, Steven D. ;   et al. | 2003-05-08 |
Multiple Numerical Aperture Electron Beam Projection Lithography System App 20020074506 - GORDON, MICHAEL S. ;   et al. | 2002-06-20 |
Target Locking System For Electron Beam Lithography App 20020056813 - HARTLEY, JOHN GEORGE ;   et al. | 2002-05-16 |
Method for writing a pattern using multiple variable shaped electron beams Grant 6,175,122 - Groves , et al. January 16, 2 | 2001-01-16 |
Adjustment of particle beam landing angle Grant 6,028,662 - Sturans , et al. February 22, 2 | 2000-02-22 |
Distributed direct write lithography system using multiple variable shaped electron beams Grant 5,981,962 - Groves , et al. November 9, 1 | 1999-11-09 |
Spinning reticle scanning projection lithography exposure system and method Grant 5,434,424 - Stickel , et al. July 18, 1 | 1995-07-18 |
Servo guided stage system Grant 5,140,242 - Doran , et al. August 18, 1 | 1992-08-18 |
Two-dimensional positioning apparatus Grant 5,059,090 - Bobroff , et al. October 22, 1 | 1991-10-22 |
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