Kenbo; Yukio
Patent Applications and Registrations
Patent applications and USPTO patent grants for Kenbo; Yukio.The latest application filed is for "exposure apparatus and method".
- Kenbo; Yukio - Yokohama JP
- Kenbo, Yukio - Yokohama-shi JP
- Kenbo, Yukio - Tokyo JP
| Patent | Date |
|---|---|
| Exposure apparatus and method Grant 7,604,925 - Noguchi , et al. October 20, 2 | 2009-10-20 |
| Exposure apparatus and method Grant 7,598,020 - Noguchi , et al. October 6, 2 | 2009-10-06 |
| Exposure apparatus and method Grant 7,277,155 - Noguchi , et al. October 2, 2 | 2007-10-02 |
| Exposure apparatus and method Grant 7,012,671 - Noguchi , et al. March 14, 2 | 2006-03-14 |
| Exposure apparatus and method App 20050196713 - Noguchi, Minori ; et al. | 2005-09-08 |
| Exposure apparatus and method App 20050196705 - Noguchi, Minori ; et al. | 2005-09-08 |
| Exposure apparatus and method App 20050191583 - Noguchi, Minori ; et al. | 2005-09-01 |
| Thin film thickness measuring method and apparatus, and method and apparatus for manufacturing a thin film device using the same Grant 6,806,970 - Hirose , et al. October 19, 2 | 2004-10-19 |
| Thin film thickness measuring method and apparatus, and method and apparatus for manufacturing a thin film device using the same Grant 6,753,972 - Hirose , et al. June 22, 2 | 2004-06-22 |
| Thin film thickness measuring method and apparatus, and mehtod and apparatus for manufacturing a thin film device using the same App 20040070773 - Hirose, Takenori ; et al. | 2004-04-15 |
| Exposure apparatus and method App 20030073045 - Noguchi, Minori ; et al. | 2003-04-17 |
| Exposure apparatus and method Grant 6,485,891 - Noguchi , et al. November 26, 2 | 2002-11-26 |
| Method of manufacturing semiconductor integrated circuit device App 20020042154 - Nakabayashi, Shinichi ; et al. | 2002-04-11 |
| Exposure apparatus and method Grant 6,016,187 - Noguchi , et al. January 18, 2 | 2000-01-18 |
| Exposure apparatus and method Grant 5,767,949 - Noguchi , et al. June 16, 1 | 1998-06-16 |
| Exposure apparatus and method Grant 5,329,333 - Noguchi , et al. July 12, 1 | 1994-07-12 |
| Wafer transforming device Grant 4,504,045 - Kenbo , et al. March 12, 1 | 1985-03-12 |
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