Kempen; Antonius Theodorus Wilhelmus
Patent Applications and Registrations
Patent applications and USPTO patent grants for Kempen; Antonius Theodorus Wilhelmus.The latest application filed is for "prolonging optical element lifetime in an euv lithography system".
- Kempen; Antonius Theodorus Wilhelmus - Rosmalen NL
- Kempen; Antonius Theodorus Wilhelmus - Den Bosch NL
- Kempen; Antonius Theodorus Wilhelmus - 's-Hertogenbosch N/A NL
- Kempen; Antonius Theodorus Wilhelmus - s-Hertogenbosch NL
| Patent | Date |
|---|---|
| Prolonging Optical Element Lifetime In An Euv Lithography System App 20220291591 - Ma; Yue ; et al. | 2022-09-15 |
| Prolonging optical element lifetime in an EUV lithography system Grant 11,340,532 - Ma , et al. May 24, 2 | 2022-05-24 |
| Prolonging Optical Element Lifetime In An Euv Lithography System App 20210109452 - Ma; Yue ; et al. | 2021-04-15 |
| Radiation collector, radiation source and lithographic apparatus Grant 9,983,482 - Loopstra , et al. May 29, 2 | 2018-05-29 |
| Radiation source Grant 9,860,966 - Van Schoot , et al. January 2, 2 | 2018-01-02 |
| Radiation source Grant 9,655,222 - Van Den Akker , et al. May 16, 2 | 2017-05-16 |
| Radiation source and lithographic apparatus Grant 9,510,432 - Kempen , et al. November 29, 2 | 2016-11-29 |
| Radiation source and lithographic apparatus Grant 9,462,667 - Dijksman , et al. October 4, 2 | 2016-10-04 |
| Method and apparatus for generating radiation Grant 9,442,380 - Badie , et al. September 13, 2 | 2016-09-13 |
| Multilayer mirror Grant 9,329,503 - Timoshkov , et al. May 3, 2 | 2016-05-03 |
| Radiation Collector, Radiation Source and Lithographic Apparatus App 20160026091 - LOOPSTRA; Erik Roelof ; et al. | 2016-01-28 |
| Radiation source Grant 9,192,039 - Kempen , et al. November 17, 2 | 2015-11-17 |
| Radiation source, lithographic apparatus and device manufacturing method Grant 9,164,403 - Kempen , et al. October 20, 2 | 2015-10-20 |
| Method and Apparatus for Generating Radiation App 20150268559 - Badie; Ramin ; et al. | 2015-09-24 |
| Radiation source Grant 9,119,280 - Kempen , et al. August 25, 2 | 2015-08-25 |
| Radiation Source App 20150146182 - Van Schoot; Jan Bernard Plechelmus ; et al. | 2015-05-28 |
| Collector mirror assembly and method for producing extreme ultraviolet radiation Grant 9,013,679 - Labetski , et al. April 21, 2 | 2015-04-21 |
| Radiation Source and Lithographic Apparatus App 20150055106 - Dijksman; Johan Frederik ; et al. | 2015-02-26 |
| Radiation Source and Lithographic Apparatus App 20150015863 - Kempen; Antonius Theodorus Wilhelmus ; et al. | 2015-01-15 |
| Radiation source and method for lithographic apparatus for device manufacture Grant 8,890,099 - Hultermans , et al. November 18, 2 | 2014-11-18 |
| Radiation Source and Method for Lithographic Apparatus for Device Manufacture App 20140209817 - Hultermans; Ronald Johannes ; et al. | 2014-07-31 |
| Radiation Source App 20140203193 - Kempen; Antonius Theodorus Wilhelmus ; et al. | 2014-07-24 |
| Radiation Source App 20140160453 - Kempen; Antonius Theodorus Wilhelmus ; et al. | 2014-06-12 |
| Radiation source, lithographic apparatus and device manufacturing method Grant 8,685,632 - Kempen , et al. April 1, 2 | 2014-04-01 |
| Lithographic apparatus comprising a magnet, method for the protection of a magnet in a lithographic apparatus and device manufacturing method Grant 8,446,560 - Moors , et al. May 21, 2 | 2013-05-21 |
| Collector Mirror Assembly And Method For Producing Extreme Ultraviolet Radiation App 20130088697 - Labetski; Dzmitry ; et al. | 2013-04-11 |
| Radiation Source App 20130077071 - VAN DEN AKKER; Jeroen ; et al. | 2013-03-28 |
| Radiation Source, Lithographic Apparatus and Device Manufacturing Method App 20120295205 - Kempen; Antonius Theodorus Wilhelmus ; et al. | 2012-11-22 |
| Hydrogen Radical Generator App 20120006258 - Schasfoort; Gerard Frans Jozef ; et al. | 2012-01-12 |
| Radiation Source, Lithographic Apparatus And Device Manufacturing Method App 20110143288 - Kempen; Antonius Theodorus Wilhelmus ; et al. | 2011-06-16 |
| Lithographic Apparatus Comprising A Magnet, Method For The Protection Of A Magnet In A Lithographic Apparatus And Device Manufacturing Method App 20110013157 - Moors; Johannes Hubertus Josephina ; et al. | 2011-01-20 |
| Method for chemical reduction of an oxidized contamination material, or reducing oxidation of a contamination material and a conditioning system for doing the same Grant 7,667,820 - Kempen February 23, 2 | 2010-02-23 |
| Removal of deposition on an element of a lithographic apparatus App 20080218709 - Van Vliet; Roland Edward ; et al. | 2008-09-11 |
| Method for chemical reduction of an oxidized contamination material, or reducing oxidation of a contamination material and a conditioning system for doing the same App 20070166215 - Kempen; Antonius Theodorus Wilhelmus | 2007-07-19 |
uspto.report is an independent third-party trademark research tool that is not affiliated, endorsed, or sponsored by the United States Patent and Trademark Office (USPTO) or any other governmental organization. The information provided by uspto.report is based on publicly available data at the time of writing and is intended for informational purposes only.
While we strive to provide accurate and up-to-date information, we do not guarantee the accuracy, completeness, reliability, or suitability of the information displayed on this site. The use of this site is at your own risk. Any reliance you place on such information is therefore strictly at your own risk.
All official trademark data, including owner information, should be verified by visiting the official USPTO website at www.uspto.gov. This site is not intended to replace professional legal advice and should not be used as a substitute for consulting with a legal professional who is knowledgeable about trademark law.
| 