Patent | Date |
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Multi-beam charged particle system Grant 11,087,948 - Zeidler , et al. August 10, 2 | 2021-08-10 |
Multi-beam Charged Particle System App 20200357600 - Zeidler; Dirk ;   et al. | 2020-11-12 |
Charged particle beam device, field curvature corrector, and methods of operating a charged particle beam device Grant 10,784,070 - Kemen , et al. Sept | 2020-09-22 |
Multi-beam charged particle system Grant 10,741,355 - Zeidler , et al. A | 2020-08-11 |
Multi-beam Charged Particle System App 20200251301 - Kind Code | 2020-08-06 |
Charged Particle Beam Device, Field Curvature Corrector, And Methods Of Operating A Charged Particle Beam Device App 20200126751 - Kemen; Thomas ;   et al. | 2020-04-23 |
Particle beam system Grant 10,600,613 - Zeidler , et al. | 2020-03-24 |
Charged particle beam system and method of operating the same Grant 10,541,112 - Schubert , et al. Ja | 2020-01-21 |
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements Grant 10,504,681 - Knippelmeyer , et al. Dec | 2019-12-10 |
Charged particle inspection method and charged particle system Grant 10,354,831 - Kemen , et al. July 16, 2 | 2019-07-16 |
Particle Beam System App 20190088440 - Zeidler; Dirk ;   et al. | 2019-03-21 |
Charged Particle Beam System And Method Of Operating The Same App 20190066974 - SCHUBERT; Stefan ;   et al. | 2019-02-28 |
Particle beam system Grant 10,147,582 - Zeidler , et al. De | 2018-12-04 |
Charged particle beam system and method of operating the same Grant 10,121,635 - Schubert , et al. November 6, 2 | 2018-11-06 |
Particle beam system and method for operating a particle optical unit Grant 9,991,089 - Mueller , et al. June 5, 2 | 2018-06-05 |
Particle Beam System And Method For Operating A Particle Optical Unit App 20180040454 - Mueller; Ingo ;   et al. | 2018-02-08 |
Particle beam system and method for operating a particle optical unit Grant 9,799,485 - Mueller , et al. October 24, 2 | 2017-10-24 |
Particle-optical Systems And Arrangements And Particle-optical Components For Such Systems And Arrangements App 20170287674 - KNIPPELMEYER; Rainer ;   et al. | 2017-10-05 |
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements Grant 9,673,024 - Knippelmeyer , et al. June 6, 2 | 2017-06-06 |
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements Grant 9,653,254 - Zeidler , et al. May 16, 2 | 2017-05-16 |
Particle Beam System App 20170133194 - Zeidler; Dirk ;   et al. | 2017-05-11 |
Particle beam system Grant 9,552,957 - Zeidler , et al. January 24, 2 | 2017-01-24 |
Focusing a charged particle system Grant 9,530,613 - Rogers , et al. December 27, 2 | 2016-12-27 |
Charged Particle Beam System And Method Of Operating The Same App 20160247663 - SCHUBERT; Stefan ;   et al. | 2016-08-25 |
Charged Particle Inspection Method And Charged Particle System App 20160240344 - KEMEN; Thomas ;   et al. | 2016-08-18 |
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements Grant 9,384,938 - Zeidler , et al. July 5, 2 | 2016-07-05 |
Particle-Optical Systems and Arrangements and Particle-Optical Components for such Systems and Arrangements App 20160155603 - Zeidler; Dirk ;   et al. | 2016-06-02 |
Particle optical system Grant 9,349,571 - Kemen , et al. May 24, 2 | 2016-05-24 |
Charged particle inspection method and charged particle system Grant 9,324,537 - Kemen , et al. April 26, 2 | 2016-04-26 |
Particle-optical Systems And Arrangements And Particle-optical Components For Such Systems And Arrangements App 20160111251 - KNIPPELMEYER; Rainer ;   et al. | 2016-04-21 |
Charged particle multi-beam inspection system and method of operating the same Grant 9,263,233 - Zeidler , et al. February 16, 2 | 2016-02-16 |
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements Grant 9,224,576 - Knippelmeyer , et al. December 29, 2 | 2015-12-29 |
Particle Beam System And Method For Operating A Particle Optical Unit App 20150357157 - Mueller; Ingo ;   et al. | 2015-12-10 |
Particle Beam System App 20150348738 - Zeidler; Dirk ;   et al. | 2015-12-03 |
Focusing A Charged Particle System App 20150287568 - Rodgers; Steven R. ;   et al. | 2015-10-08 |
Focusing a charged particle imaging system Grant 9,099,282 - Rogers , et al. August 4, 2 | 2015-08-04 |
Charged Particle Multi-beam Inspection System And Method Of Operating The Same App 20150090879 - Zeidler; Dirk ;   et al. | 2015-04-02 |
Particle Optical System App 20150069235 - Kemen; Thomas ;   et al. | 2015-03-12 |
Charged Particle Inspection Method And Charged Particle System App 20150008331 - KEMEN; Thomas ;   et al. | 2015-01-08 |
Focusing A Charged Particle Imaging System App 20140224985 - Rodgers; Steven R. ;   et al. | 2014-08-14 |
Particle-Optical Systems and Arrangements and Particle-Optical Components for such Systems and Arrangements App 20140158902 - Knippelmeyer; Rainer ;   et al. | 2014-06-12 |
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements Grant 8,637,834 - Knippelmeyer , et al. January 28, 2 | 2014-01-28 |
Particle beam system Grant 8,598,525 - Zeidler , et al. December 3, 2 | 2013-12-03 |
Particle-Optical Systems and Arrangements and Particle-Optical Components for such Systems and Arrangements App 20130187046 - Zeidler; Dirk ;   et al. | 2013-07-25 |
Particle Beam System App 20120199740 - Zeidler; Dirk ;   et al. | 2012-08-09 |
Particle-Optical Systems and Arrangements and Particle-Optical Components for such Systems and Arrangements App 20120104252 - KNIPPELMEYER; Rainer ;   et al. | 2012-05-03 |
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements Grant 8,097,847 - Knippelmeyer , et al. January 17, 2 | 2012-01-17 |
Charged particle-optical systems, methods and components Grant 8,039,813 - Casares , et al. October 18, 2 | 2011-10-18 |
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements App 20100181479 - Knippelmeyer; Rainer ;   et al. | 2010-07-22 |
Charged Particle Inspection Method and Charged Particle System App 20090256075 - Kemen; Thomas ;   et al. | 2009-10-15 |
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements Grant 7,554,094 - Knippelmeyer , et al. June 30, 2 | 2009-06-30 |
Particle-Optical Component App 20090114818 - Casares; Antonio ;   et al. | 2009-05-07 |
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements App 20080054184 - Knippelmeyer; Rainer ;   et al. | 2008-03-06 |