loadpatents
Patent applications and USPTO patent grants for KEMBO; Yukio.The latest application filed is for "scanning probe microscope".
Patent | Date |
---|---|
Scanning Probe Microscope App 20140298548 - BABA; Shuichi ;   et al. | 2014-10-02 |
Scanning probe microscope Grant 8,844,061 - Baba , et al. September 23, 2 | 2014-09-23 |
Scanning Probe Microscope App 20130205454 - BABA; Shuichi ;   et al. | 2013-08-08 |
Scanning probe microscope Grant 8,342,008 - Baba , et al. January 1, 2 | 2013-01-01 |
Scanning probe microscope Grant 8,011,230 - Watanabe , et al. September 6, 2 | 2011-09-06 |
Method of detecting defects on an object Grant 7,940,383 - Noguchi , et al. May 10, 2 | 2011-05-10 |
Apparatus And Method For Testing Defects App 20100088042 - NOGUCHI; Minori ;   et al. | 2010-04-08 |
Apparatus and method for testing defects Grant 7,692,779 - Noguchi , et al. April 6, 2 | 2010-04-06 |
Apparatus and method for testing defects Grant 7,639,350 - Noguchi , et al. December 29, 2 | 2009-12-29 |
Scanning probe microscope Grant 7,631,548 - Baba , et al. December 15, 2 | 2009-12-15 |
Scanning Probe Microscope App 20090158828 - BABA; Shuichi ;   et al. | 2009-06-25 |
Scanning probe microscope Grant 7,498,589 - Maruyama , et al. March 3, 2 | 2009-03-03 |
Apparatus and method for testing defects Grant 7,443,496 - Noguchi , et al. October 28, 2 | 2008-10-28 |
Scanning Probe Microscope And Measurement Method Of Same App 20080245139 - Morimoto; Takafumi ;   et al. | 2008-10-09 |
Scanning Probe Microscope App 20080223122 - Watanabe; Masahiro ;   et al. | 2008-09-18 |
Probe Control Method For Scanning Probe Microscope App 20080087820 - KURENUMA; Toru ;   et al. | 2008-04-17 |
Scanning Probe Microscope App 20070266780 - BABA; SHUICHI ;   et al. | 2007-11-22 |
Method and apparatus for measuring depth of holes formed on a specimen Grant 7,243,441 - Watanabe , et al. July 17, 2 | 2007-07-17 |
Apparatus And Method For Testing Defects App 20070146696 - Noguchi; Minori ;   et al. | 2007-06-28 |
Apparatus And Method For Testing Defects App 20070146697 - Noguchi; Minori ;   et al. | 2007-06-28 |
Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication process Grant 7,177,020 - Morioka , et al. February 13, 2 | 2007-02-13 |
Method for inspecting defects and an apparatus of the same Grant 7,173,693 - Shibata , et al. February 6, 2 | 2007-02-06 |
Apparatus and method for testing defects Grant 7,098,055 - Noguchi , et al. August 29, 2 | 2006-08-29 |
Apparatus and method for determining surface profiles using a scanning probe microscope App 20060097162 - Maruyama; Shigenobu ;   et al. | 2006-05-11 |
Apparatus and method for testing defects Grant 7,037,735 - Noguchi , et al. May 2, 2 | 2006-05-02 |
Apparatus and method for testing defects App 20060030060 - Noguchi; Minori ;   et al. | 2006-02-09 |
Apparatus and method for testing defects App 20060030059 - Noguchi; Minori ;   et al. | 2006-02-09 |
Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication process App 20050206887 - Morioka, Hiroshi ;   et al. | 2005-09-22 |
Method and apparatus for measuring depth of holes formed on a specimen App 20050183282 - Watanabe, Masahiro ;   et al. | 2005-08-25 |
Method for inspecting defects and an apparatus of the same App 20050128472 - Shibata, Yukihiro ;   et al. | 2005-06-16 |
Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication process Grant 6,894,773 - Morioka , et al. May 17, 2 | 2005-05-17 |
Method for inspecting defects and an apparatus for the same Grant 6,850,320 - Shibata , et al. February 1, 2 | 2005-02-01 |
Semiconductor device producing method, system for carrying out the same and semiconductor work processing apparatus included in the same system Grant 6,650,409 - Noguchi , et al. November 18, 2 | 2003-11-18 |
Optical apparatus for defect and particle size inspection Grant 6,411,377 - Noguchi , et al. June 25, 2 | 2002-06-25 |
Method for inspecting defects and an apparatus of the same App 20020027653 - Shibata, Yukihiro ;   et al. | 2002-03-07 |
Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication process App 20010021015 - Morioka, Hiroshi ;   et al. | 2001-09-13 |
Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication process Grant 5,463,459 - Morioka , et al. October 31, 1 | 1995-10-31 |
Method and apparatus for inspecting foreign particles on real time basis in semiconductor mass production line Grant 5,274,434 - Morioka , et al. December 28, 1 | 1993-12-28 |
Method and apparatus of inspecting foreign matters during mass production start-up and mass production line in semiconductor production process Grant 5,233,191 - Noguchi , et al. August 3, 1 | 1993-08-03 |
Method and apparatus for detecting photoacoustic signal Grant 5,136,172 - Nakata , et al. August 4, 1 | 1992-08-04 |
Photocoustic signal detecting device Grant 5,083,869 - Nakata , et al. January 28, 1 | 1992-01-28 |
Method and apparatus for detecting photoacoustic signal and method for detecting internal defect of semiconductor device Grant 5,062,715 - Nakata , et al. November 5, 1 | 1991-11-05 |
X-ray lithography apparatus Grant 4,852,133 - Ikeda , et al. July 25, 1 | 1989-07-25 |
X-ray exposure apparatus Grant 4,825,453 - Kembo , et al. April 25, 1 | 1989-04-25 |
X-ray exposure system Grant 4,803,712 - Kembo , et al. February 7, 1 | 1989-02-07 |
Substrate surface deflecting device Grant 4,788,577 - Akiyama , et al. November 29, 1 | 1988-11-29 |
Method and apparatus for alignment Grant 4,777,641 - Inagaki , et al. October 11, 1 | 1988-10-11 |
Light-exposure apparatus Grant 4,666,291 - Taniguchi , et al. May 19, 1 | 1987-05-19 |
Flatness measuring device Grant 4,491,787 - Akiyama , et al. January 1, 1 | 1985-01-01 |
Exposure process and system Grant 4,475,223 - Taniguchi , et al. October 2, 1 | 1984-10-02 |
Light exposure device and method Grant 4,391,511 - Akiyama , et al. July 5, 1 | 1983-07-05 |
Method and apparatus for detecting positions of chips on a semiconductor wafer Grant 4,213,117 - Kembo , et al. July 15, 1 | 1980-07-15 |
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