Patent | Date |
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Photon-induced Ion Source App 20210183608 - LIU; Kun ;   et al. | 2021-06-17 |
Collision ionization source Grant 10,325,750 - Schwind , et al. | 2019-06-18 |
Collision Ionization Source App 20180211807 - Schwind; Gregory A. ;   et al. | 2018-07-26 |
Collision ionization ion source Grant 9,899,181 - Schwind , et al. February 20, 2 | 2018-02-20 |
Imaging and processing for plasma ion source Grant 9,691,583 - Miller , et al. June 27, 2 | 2017-06-27 |
High voltage isolation of an inductively coupled plasma ion source with a liquid that is not actively pumped Grant 9,591,735 - Kellogg , et al. March 7, 2 | 2017-03-07 |
Method for attachment of an electrode into an inductively-coupled plasma Grant 9,530,625 - Kellogg , et al. December 27, 2 | 2016-12-27 |
Imaging And Processing For Plasma Ion Source App 20150380204 - Miller; Thomas G. ;   et al. | 2015-12-31 |
Method For Attachment Of An Electrode Into An Inductively-coupled Plasma App 20150357166 - Kellogg; Sean ;   et al. | 2015-12-10 |
Methods and structures for rapid switching between different process gases in an inductively-coupled plasma (ICP) ion source Grant 9,159,534 - Graupera , et al. October 13, 2 | 2015-10-13 |
Automated ion beam idle Grant 9,123,500 - Miller , et al. September 1, 2 | 2015-09-01 |
Imaging and processing for plasma ion source Grant 9,105,438 - Miller , et al. August 11, 2 | 2015-08-11 |
System for attachment of an electrode into a plasma source Grant 9,053,895 - Kellogg , et al. June 9, 2 | 2015-06-09 |
High Voltage Isolation of an Inductively Coupled Plasma Ion Source with a Liquid that is not Actively Pumped App 20150102230 - Kellogg; Sean ;   et al. | 2015-04-16 |
Encapsulation of electrodes in solid media Grant 8,987,678 - Kellogg , et al. March 24, 2 | 2015-03-24 |
Methods and Structures for Rapid Switching Between Different Process Gases in an Inductively-Coupled Plasma (ICP) Ion Source App 20140306607 - Graupera; Anthony ;   et al. | 2014-10-16 |
Determination of emission parameters from field emission sources Grant 8,779,376 - Swanson , et al. July 15, 2 | 2014-07-15 |
Plasma igniter for an inductively coupled plasma ion source Grant 8,723,143 - Graupera , et al. May 13, 2 | 2014-05-13 |
Encapsulation of electrodes in solid media for use in conjunction with fluid high voltage isolation Grant 8,642,974 - Kellogg , et al. February 4, 2 | 2014-02-04 |
Methods and structures for rapid switching between different process gases in an inductively-coupled plasma (ICP) ion source Grant 8,633,452 - Graupera , et al. January 21, 2 | 2014-01-21 |
Imaging And Processing For Plasma Ion Source App 20130320229 - Miller; Tom ;   et al. | 2013-12-05 |
Automated Ion Beam Idle App 20130256553 - Miller; Tom ;   et al. | 2013-10-03 |
Method and Apparatus for Actively Monitoring an Inductively-Coupled Plasma Ion Source using an Optical Spectrometer App 20130250293 - Utlaut; Mark W. ;   et al. | 2013-09-26 |
Determination of Emission Parameters from Field Emission Sources App 20130187058 - Swanson; Lynwood W. ;   et al. | 2013-07-25 |
System for Attachment of an Electrode into an Inductively Coupled Plasma Source App 20130134855 - Kellogg; Sean ;   et al. | 2013-05-30 |
Methods and Structures for Rapid Switching Between Different Process Gases in an Inductively-Coupled Plasma (ICP) Ion Source App 20130015765 - Graupera; Anthony ;   et al. | 2013-01-17 |
Encapsulation of Electrodes in Solid Media for use in conjunction with Fluid High Voltage Isolation App 20120261587 - Kellogg; Sean ;   et al. | 2012-10-18 |
Charged particle beam system having multiple user-selectable operating modes Grant 8,253,118 - Zhang , et al. August 28, 2 | 2012-08-28 |
Charged Particle Beam System Having Multiple User-selectable Operating Modes App 20120091360 - Zhang; Shouyin ;   et al. | 2012-04-19 |
Plasma igniter for an inductively coupled plasma ion source Grant 8,124,942 - Graupera , et al. February 28, 2 | 2012-02-28 |
Plasma Igniter for an Inductively Coupled Plasma Ion Source App 20120032092 - Graupera; Anthony ;   et al. | 2012-02-09 |
Encapsulation of Electrodes in Solid Media for use in conjunction with Fluid High Voltage Isolation App 20110272592 - Kellogg; Sean ;   et al. | 2011-11-10 |
Plasma Igniter for an Inductively Coupled Plasma Ion Source App 20110198511 - GRAUPERA; ANTHONY ;   et al. | 2011-08-18 |
Charged Particle Beam System Having Multiple User-Selectable Operating Modes App 20110084207 - Zhang; Shouyin ;   et al. | 2011-04-14 |