Kedlaya; Diwakar
Patent Applications and Registrations
Patent applications and USPTO patent grants for Kedlaya; Diwakar.The latest application filed is for "controlling concentration profiles for deposited films using machine learning".
- Kedlaya; Diwakar - San Jose CA
- Kedlaya; Diwakar - Santa Clara CA
- Kedlaya; Diwakar - Yonkers NY
| Patent | Date |
|---|---|
| Controlling Concentration Profiles For Deposited Films Using Machine Learning App 20220285232 - Baryshnikov; Anton V. ; et al. | 2022-09-08 |
| Processing systems and methods to control process drift Grant 11,430,641 - Chua , et al. August 30, 2 | 2022-08-30 |
| Methods To Eliminate Of Deposition On Wafer Bevel And Backside App 20220199373 - Parimi; Venkata Sharat Chandra ; et al. | 2022-06-23 |
| Multiple spacer patterning schemes Grant 11,315,787 - Yang , et al. April 26, 2 | 2022-04-26 |
| Gas Mixer To Enable Rps Purging App 20220122851 - Ruan; Fang ; et al. | 2022-04-21 |
| Backside Gas Leakby For Bevel Deposition Reduction App 20220122870 - Parimi; Venkata Sharat Chandra ; et al. | 2022-04-21 |
| Cover Wafer For Semiconductor Processing Chamber App 20220122822 - Parimi; Venkata Sharat Chandra ; et al. | 2022-04-21 |
| Modular Zone Control For A Processing Chamber App 20220108891 - Huang; Zubin ; et al. | 2022-04-07 |
| Bevel Backside Deposition Elimination App 20220108872 - Huang; Zubin ; et al. | 2022-04-07 |
| Boron Concentration Tunability In Boron-silicon Films App 20220108892 - Yang; Yi ; et al. | 2022-04-07 |
| Radiation Shield For Removing Backside Deposition At Lift Pin Locations App 20220093371 - Huang; Zubin ; et al. | 2022-03-24 |
| Hydrogen Management In Plasma Deposited Films App 20220020583 - Cheng; Rui ; et al. | 2022-01-20 |
| Faceplate With Edge Flow Control App 20210335574 - Ruan; Fang ; et al. | 2021-10-28 |
| Systems And Methods For Substrate Support Temperature Control App 20210320027 - Huang; Zubin ; et al. | 2021-10-14 |
| Surface Profiling And Texturing Of Chamber Components App 20210183657 - GROECHEL; DAVID W. ; et al. | 2021-06-17 |
| Faceplate Having Blocked Center Hole App 20210156028 - Ruan; Fang ; et al. | 2021-05-27 |
| Chamber Components For Gas Delivery Modulation App 20210142984 - Ruan; Fang ; et al. | 2021-05-13 |
| Methods To Reduce Material Surface Roughness App 20210140045 - Yang; Yi ; et al. | 2021-05-13 |
| Gas Delivery Systems And Methods App 20210143029 - Kedlaya; Diwakar ; et al. | 2021-05-13 |
| Optical Absorption Sensor For Semiconductor Processing App 20210134568 - Ruan; Fang ; et al. | 2021-05-06 |
| Multiple Spacer Patterning Schemes App 20200335339 - YANG; Tzu-shun ; et al. | 2020-10-22 |
| System Architecture For Plasma Processing Solar Wafers App 20130109189 - Cho; Young Kyu ; et al. | 2013-05-02 |
| Solar Wafer Electrostatic Chuck App 20130105087 - Cho; Young Kyu ; et al. | 2013-05-02 |
| Vacuum debris removal system Grant 7,795,559 - Wojcik , et al. September 14, 2 | 2010-09-14 |
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