Ke; Chang

Patent Applications and Registrations

Patent applications and USPTO patent grants for Ke; Chang.The latest application filed is for "methods and apparatus for cryogenic gas stream assisted sam-based selective deposition".

Company Profile

14.7.13

Ke; Chang - Sunnyvale CA
KE; Chang - Singapore SG

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Trademarks

Patent Activity

Patent	Date
Detection of surface particles on chamber components with carbon dioxide Grant 11,441,974 - Wang , et al. September 13, 2	2022-09-13
Extreme ultraviolet mask absorber and processes for manufacture Grant 11,194,244 - Liu , et al. December 7, 2	2021-12-07
Methods and Apparatus for Cryogenic Gas Stream Assisted SAM-based Selective Deposition App 20210283650 - Ke; Chang ; et al.	2021-09-16
Methods For Enhancing Selectivity In Sam-Based Selective Deposition App 20210217615 - Ke; Chang ; et al.	2021-07-15
Methods and apparatus for cryogenic gas stream assisted SAM-based selective deposition Grant 11,033,930 - Ke , et al. June 15, 2	2021-06-15
Methods for enhancing selectivity in SAM-based selective deposition Grant 10,950,433 - Ke , et al. March 16, 2	2021-03-16
Detection Of Surface Particles On Chamber Components With Carbon Dioxide App 20210033499 - Wang; ChangGong ; et al.	2021-02-04
Enhanced selective deposition process Grant 10,892,161 - Liu , et al. January 12, 2	2021-01-12
Wafer Treatment For Achieving Defect-free Self-assembled Monolayers App 20200402792 - Ke; Chang ; et al.	2020-12-24
Wafer treatment for achieving defect-free self-assembled monolayers Grant 10,770,292 - Ke , et al. Sep	2020-09-08
Extreme Ultraviolet Mask Absorber And Processes For Manufacture App 20200201167 - Liu; Shuwei ; et al.	2020-06-25
Selective deposition defects removal by chemical etch Grant 10,643,840 - Anthis , et al.	2020-05-05
Methods For Selective Deposition Using Self Assembled Monolayers App 20200048762 - KE; CHANG ; et al.	2020-02-13
Methods Of Treating A Substrate To Form A Layer Thereon For Application In Selective Deposition Processes App 20190326114 - KACHIAN; JESSICA S. ; et al.	2019-10-24
Substrate Support With Edge Seal App 20190326152 - KE; CHANG ; et al.	2019-10-24
Methods And Apparatus For Cryogenic Gas Stream Assisted SAM-Based Selective Deposition App 20190210061 - Ke; Chang ; et al.	2019-07-11
Methods for Enhancing Selectivity in SAM-Based Selective Deposition App 20190157079 - Ke; Chang ; et al.	2019-05-23
Enhanced Selective Deposition Process App 20190148144 - LIU; Biao ; et al.	2019-05-16
Selective Deposition Defects Removal By Chemical Etch App 20190080904 - Anthis; Jeffrey W. ; et al.	2019-03-14
Wafer Treatment For Achieving Defect-Free Self-Assembled Monolayers App 20180366317 - Ke; Chang ; et al.	2018-12-20

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