Kazumi; Hideyuki
Patent Applications and Registrations
Patent applications and USPTO patent grants for Kazumi; Hideyuki.The latest application filed is for "charged particle beam device".
Company Profile
12.70.68
- Kazumi; Hideyuki - Tokyo JP
- Kazumi; Hideyuki - Hitachinaka N/A JP
- Kazumi; Hideyuki - Hitachinaka-shi JP
- Kazumi; Hideyuki - Ibaraki JP
- Kazumi; Hideyuki - Hitachi JP
- Kazumi, Hideyuki - Chiyoda-ku JP
- Kazumi, Hideyuki - Hitachi-shi JP
Patent Activity
| Patent | Date |
|---|---|
| Charged-particle beam device and cross-sectional shape estimation program Grant 11,443,914 - Yokosuka , et al. September 13, 2 | 2022-09-13 |
| Charged Particle Beam Device App 20220122804 - YOKOSUKA; Toshiyuki ; et al. | 2022-04-21 |
| Multistage-Connected Multipole, Multistage Multipole Unit, and Charged Particle Beam Device App 20220037113 - DOHI; Hideto ; et al. | 2022-02-03 |
| Charged particle beam device Grant 11,239,052 - Yokosuka , et al. February 1, 2 | 2022-02-01 |
| Pattern cross-sectional shape estimation system and program Grant 11,211,226 - Yokosuka , et al. December 28, 2 | 2021-12-28 |
| Charged-Particle Beam Device and Cross-Sectional Shape Estimation Program App 20210366685 - YOKOSUKA; Toshiyuki ; et al. | 2021-11-25 |
| Charged particle ray device and cross-sectional shape estimation program Grant 11,133,147 - Yokosuka , et al. September 28, 2 | 2021-09-28 |
| Charged particle ray device and cross-sectional shape estimation program Grant 11,101,100 - Yokosuka , et al. August 24, 2 | 2021-08-24 |
| Scanning electron microscope and sample observation method using scanning electron microscope Grant 11,011,348 - Bizen , et al. May 18, 2 | 2021-05-18 |
| Pattern Cross-sectional Shape Estimation System And Program App 20200321189 - YOKOSUKA; Toshiyuki ; et al. | 2020-10-08 |
| Charged Particle Beam Device App 20200312615 - YOKOSUKA; Toshiyuki ; et al. | 2020-10-01 |
| Charged Particle Ray Device And Cross-sectional Shape Estimation Program App 20200294756 - YOKOSUKA; Toshiyuki ; et al. | 2020-09-17 |
| Charged particle beam device and aberration correction method for charged particle beam device Grant 10,727,024 - Urano , et al. | 2020-07-28 |
| Charged particle beam device Grant 10,720,306 - Yokosuka , et al. | 2020-07-21 |
| Charged particle beam device Grant 10,541,103 - Mizuhara , et al. Ja | 2020-01-21 |
| Scanning Electron Microscope And Sample Observation Method Using Scanning Electron Microscope App 20190348255 - BIZEN; Daisuke ; et al. | 2019-11-14 |
| Aberration correction method, aberration correction system, and charged particle beam apparatus Grant 10,446,361 - Cheng , et al. Oc | 2019-10-15 |
| Charged particle beam device Grant 10,446,359 - Yokosuka , et al. Oc | 2019-10-15 |
| Charged Particle Beam Device And Aberration Correction Method For Charged Particle Beam Device App 20190214222 - URANO; Kotoko ; et al. | 2019-07-11 |
| Charged Particle Beam Device App 20190180979 - YOKOSUKA; Toshiyuki ; et al. | 2019-06-13 |
| Charged particle beam device Grant 10,304,654 - Ikegami , et al. | 2019-05-28 |
| Charged particle beam device and pattern measurement device Grant 10,290,464 - Yokosuka , et al. | 2019-05-14 |
| Charged Particle Beam Device App 20190103250 - YOKOSUKA; Toshiyuki ; et al. | 2019-04-04 |
| Charged particle beam device Grant 10,249,474 - Yokosuka , et al. | 2019-04-02 |
| Charged particle beam inclination correction method and charged particle beam device Grant 10,229,811 - Mizuhara , et al. | 2019-03-12 |
| Charged particle beam device and charged particle beam measurement method Grant 10,121,634 - Tsuno , et al. November 6, 2 | 2018-11-06 |
| Charged Particle Beam Device App 20180233320 - IKEGAMI; Akira ; et al. | 2018-08-16 |
| Charged particle beam apparatus Grant 10,037,866 - Enyama , et al. July 31, 2 | 2018-07-31 |
| Aberration Correction Method, Aberration Correction System, And Charged Particle Beam Apparatus App 20180190469 - CHENG; Zhaohui ; et al. | 2018-07-05 |
| Scanning electron microscope and method for controlling same Grant 10,014,160 - Shirahata , et al. July 3, 2 | 2018-07-03 |
| Charged Particle Beam Device and Pattern Measurement Device App 20180182595 - YOKOSUKA; Toshiyuki ; et al. | 2018-06-28 |
| Charged particle beam device Grant 9,997,326 - Dohi , et al. June 12, 2 | 2018-06-12 |
| Charged Particle Beam Device App 20180012725 - YOKOSUKA; Toshiyuki ; et al. | 2018-01-11 |
| Charged Particle Beam Device App 20170345613 - MIZUHARA; Yuzuru ; et al. | 2017-11-30 |
| Charged particle beam device Grant 9,786,468 - Yokosuka , et al. October 10, 2 | 2017-10-10 |
| Charged Particle Beam Device App 20170278671 - YOKOSUKA; Toshiyuki ; et al. | 2017-09-28 |
| Charged particle beam application device Grant 9,704,687 - Enyama , et al. July 11, 2 | 2017-07-11 |
| Charged particle beam device Grant 9,697,987 - Yokosuka , et al. July 4, 2 | 2017-07-04 |
| Scanning Electron Microscope And Method For Controlling Same App 20170186583 - SHIRAHATA; Kaori ; et al. | 2017-06-29 |
| Charged particle beam apparatus and inspection method using the same Grant 9,659,744 - Tsuno , et al. May 23, 2 | 2017-05-23 |
| Charged particle-beam device Grant 9,653,256 - Ikegami , et al. May 16, 2 | 2017-05-16 |
| Electron beam irradiation method and scanning electron microscope Grant 9,640,366 - Yokosuka , et al. May 2, 2 | 2017-05-02 |
| Charged particle beam device Grant 9,627,171 - Makino , et al. April 18, 2 | 2017-04-18 |
| Charged Particle Beam Apparatus App 20170025251 - ENYAMA; Momoyo ; et al. | 2017-01-26 |
| Pattern measuring apparatus, pattern measuring method, and computer-readable recording medium on which a pattern measuring program is recorded Grant 9,521,372 - Momonoi , et al. December 13, 2 | 2016-12-13 |
| Pattern critical dimension measurement equipment and method for measuring pattern critical dimension Grant 9,520,266 - Shirahata , et al. December 13, 2 | 2016-12-13 |
| Charged particle beam apparatus Grant 9,502,212 - Mizuhara , et al. November 22, 2 | 2016-11-22 |
| Charged particle beam apparatus and trajectory correction method in charged particle beam apparatus Grant 9,484,181 - Dohi , et al. November 1, 2 | 2016-11-01 |
| Scanning electron microscope Grant 9,472,376 - Yokosuka , et al. October 18, 2 | 2016-10-18 |
| Charged-Particle-Beam Device App 20160300690 - IKEGAMI; Akira ; et al. | 2016-10-13 |
| Charged Particle Beam Device App 20160240348 - YOKOSUKA; Toshiyuki ; et al. | 2016-08-18 |
| Charged Particle Beam Device and Charged Particle Beam Measurement Method App 20160225583 - TSUNO; Natsuki ; et al. | 2016-08-04 |
| Charged Particle Beam Device App 20160217967 - DOHI; Hideto ; et al. | 2016-07-28 |
| Charged Particle Beam Inclination Correction Method and Charged Particle Beam Device App 20160217969 - MIZUHARA; Yuzuru ; et al. | 2016-07-28 |
| Charged Particle Beam Apparatus And Inspection Method Using The Same App 20160148781 - TSUNO; Natsuki ; et al. | 2016-05-26 |
| Charged particle beam device and measuring method using the same Grant 9,336,984 - Bizen , et al. May 10, 2 | 2016-05-10 |
| Electronic microscope, setting method of observation condition of electronic microscope, and observation method using electronic microscope Grant 9,236,220 - Tsuno , et al. January 12, 2 | 2016-01-12 |
| Charged Particle Beam Application Device App 20150364290 - ENYAMA; Momoyo ; et al. | 2015-12-17 |
| Charged Particle Beam Device App 20150357154 - YOKOSUKA; Toshiyuki ; et al. | 2015-12-10 |
| Charged Particle Beam Apparatus and Trajectory Correction Method in Charged Particle Beam Apparatus App 20150357155 - DOHI; Hideto ; et al. | 2015-12-10 |
| Charged Particle Beam Device App 20150357153 - MAKINO; Hiroshi ; et al. | 2015-12-10 |
| Charged Particle Beam Apparatus App 20150348748 - MIZUHARA; Yuzuru ; et al. | 2015-12-03 |
| Scanning electron microscope Grant 9,159,529 - Yamazaki , et al. October 13, 2 | 2015-10-13 |
| Charged particle beam device and a method of improving image quality of the same Grant 9,019,362 - Bai , et al. April 28, 2 | 2015-04-28 |
| Pattern Critical Dimension Measurement Equipment And Method For Measuring Pattern Critical Dimension App 20150041648 - Shirahata; Kaori ; et al. | 2015-02-12 |
| Electronic Microscope, Setting Method Of Observation Condition Of Electronic Microscope, And Observation Method Using Electronic Microscope App 20150041644 - Tsuno; Natsuki ; et al. | 2015-02-12 |
| Scanning Electron Microscope App 20150014531 - Yamazaki; Minoru ; et al. | 2015-01-15 |
| Scanning Electron Microscope App 20150008322 - Yokosuka; Toshiyuki ; et al. | 2015-01-08 |
| Electron microscope and image capturing method using electron beam Grant 8,907,279 - Tsuno , et al. December 9, 2 | 2014-12-09 |
| Charged Particle Beam Device And Measuring Method Using The Same App 20140299767 - Bizen; Daisuke ; et al. | 2014-10-09 |
| Method for detecting information of an electric potential on a sample and charged particle beam apparatus Grant 8,766,182 - Yamazaki , et al. July 1, 2 | 2014-07-01 |
| Charged particle beam apparatus Grant 8,729,491 - Dohi , et al. May 20, 2 | 2014-05-20 |
| Electron Microscope And Image Capturing Method Using Electron Beam App 20140097342 - Tsuno; Natsuki ; et al. | 2014-04-10 |
| Charged particle beam apparatus Grant 8,648,300 - Isawa , et al. February 11, 2 | 2014-02-11 |
| Charged Particle Beam Apparatus App 20140021366 - Dohi; Hideto ; et al. | 2014-01-23 |
| Charged Particle Beam Apparatus App 20140014836 - ISAWA; Miki ; et al. | 2014-01-16 |
| Pattern Measuring Apparatus, Pattern Measuring Method, And Computer-readable Recording Medium On Which A Pattern Measuring Program Is Recorded App 20130321610 - Momonoi; Yoshinori ; et al. | 2013-12-05 |
| Method for Detecting Information of an Electric Potential on a Sample and Charged Particle Beam Apparatus App 20130284921 - Yamazaki; Minoru ; et al. | 2013-10-31 |
| Method for detecting information of an electronic potential on a sample and charged particle beam apparatus Grant 8,487,250 - Yamazaki , et al. July 16, 2 | 2013-07-16 |
| Scanning electron microscope Grant 8,487,253 - Yamazaki , et al. July 16, 2 | 2013-07-16 |
| Scanning electron microscope Grant 8,481,935 - Ikegami , et al. July 9, 2 | 2013-07-09 |
| Electron Beam Irradiation Method and Scanning Electron Microscope App 20130009057 - Yokosuka; Toshiyuki ; et al. | 2013-01-10 |
| Method for Detecting Information of an Electronic Potential on a Sample and Charged Particle Beam Apparatus App 20120298863 - Yamazaki; Minoru ; et al. | 2012-11-29 |
| Sample observing method and scanning electron microscope Grant 8,309,923 - Omori , et al. November 13, 2 | 2012-11-13 |
| Charged Particle Beam Device And A Method Of Improving Image Quality Of The Same App 20120274757 - Bai; Jie ; et al. | 2012-11-01 |
| Scanning electron microscope having time constant measurement capability Grant 8,274,048 - Ikegami , et al. September 25, 2 | 2012-09-25 |
| Method for detecting information of an electric potential on a sample and charged particle beam apparatus Grant 8,263,934 - Yamazaki , et al. September 11, 2 | 2012-09-11 |
| Plasma processing apparatus Grant 8,216,420 - Kazumi , et al. July 10, 2 | 2012-07-10 |
| Electrode unit and charged particle beam device Grant 8,153,966 - Arai , et al. April 10, 2 | 2012-04-10 |
| Scanning Electron Microscope App 20120061566 - YAMAZAKI; Minoru ; et al. | 2012-03-15 |
| Scanning electron microscope Grant 8,080,790 - Yamazaki , et al. December 20, 2 | 2011-12-20 |
| Sample Observing Method And Scanning Electron Microscope App 20110303843 - Omori; Seiko ; et al. | 2011-12-15 |
| Scanning Electron Microscope App 20110278454 - IKEGAMI; Akira ; et al. | 2011-11-17 |
| Scanning electron microscope Grant 7,989,768 - Ikegami , et al. August 2, 2 | 2011-08-02 |
| Electrode Unit And Charged Particle Beam Device App 20110068265 - Arai; Noriaki ; et al. | 2011-03-24 |
| Scanning Electron Microscope Having Time Constant Measurement Capability App 20100258723 - IKEGAMI; Akira ; et al. | 2010-10-14 |
| Scanning electron microscope having time constant measurement capability Grant 7,763,852 - Ikegami , et al. July 27, 2 | 2010-07-27 |
| Method for Detecting Information of an Electric Potential on a Sample and Charged Particle Beam Apparatus App 20090272899 - YAMAZAKI; Minoru ; et al. | 2009-11-05 |
| Scanning Electron Microscope App 20090224170 - YAMAZAKI; Minoru ; et al. | 2009-09-10 |
| Electron Microscope App 20090039264 - IKEGAMI; Akira ; et al. | 2009-02-12 |
| Plasma etching method Grant 7,442,651 - Mori , et al. October 28, 2 | 2008-10-28 |
| Scanning Electron Microscope Having Time Constant Measurement Capability App 20080116375 - Ikegami; Akira ; et al. | 2008-05-22 |
| Semiconductor integrated circuit arrangement fabrication method Grant RE39,895 - Tokunaga , et al. October 23, 2 | 2007-10-23 |
| Plasma etching method App 20070134922 - Mori; Masahito ; et al. | 2007-06-14 |
| Plasma processing apparatus App 20060283550 - Kazumi; Hideyuki ; et al. | 2006-12-21 |
| Surface processing method of a specimen and surface processing apparatus of the specimen Grant 7,049,243 - Ono , et al. May 23, 2 | 2006-05-23 |
| LSI device etching method and apparatus thereof Grant 6,919,274 - Kazumi , et al. July 19, 2 | 2005-07-19 |
| Plasma processing apparatus App 20050126711 - Kazumi, Hideyuki ; et al. | 2005-06-16 |
| LSI device etching method and apparatus thereof App 20050026431 - Kazumi, Hideyuki ; et al. | 2005-02-03 |
| Plasma processing apparatus and method Grant 6,846,363 - Kazumi , et al. January 25, 2 | 2005-01-25 |
| Surface processing method of a specimen and surface processing apparatus of the specimen App 20040259361 - Ono, Tetsuo ; et al. | 2004-12-23 |
| Plasma processing apparatus and method Grant 6,833,051 - Kazumi , et al. December 21, 2 | 2004-12-21 |
| Plasma-assisted processing apparatus Grant 6,793,768 - Kazumi , et al. September 21, 2 | 2004-09-21 |
| Plasma processing apparatus Grant 6,755,935 - Kazumi , et al. June 29, 2 | 2004-06-29 |
| Plasma processing apparatus and method Grant 6,756,737 - Doi , et al. June 29, 2 | 2004-06-29 |
| Specimen surface processing method Grant 6,677,244 - Ono , et al. January 13, 2 | 2004-01-13 |
| Plasma processing apparatus and method App 20020134510 - Kazumi, Hideyuki ; et al. | 2002-09-26 |
| Plasma processing apparatus and method App 20020125828 - Doi, Akira ; et al. | 2002-09-12 |
| Plasma processing apparatus and method App 20020124963 - Kazumi, Hideyuki ; et al. | 2002-09-12 |
| Plasma processing method App 20020123229 - Ono, Tetsuo ; et al. | 2002-09-05 |
| Plasma-assisted processing apparatus App 20020104482 - Kazumi, Hideyuki ; et al. | 2002-08-08 |
| Plasma processing apparatus and method App 20020084035 - Kazumi, Hideyuki ; et al. | 2002-07-04 |
| Plasma processing apparatus and method Grant 6,388,382 - Doi , et al. May 14, 2 | 2002-05-14 |
| Plasma processing apparatus and method App 20010042595 - Kazumi, Hideyuki ; et al. | 2001-11-22 |
| Plasma processing apparatus and method App 20010040009 - Kazumi, Hideyuki ; et al. | 2001-11-15 |
| Plasma processing apparatus and method App 20010037861 - Kazumi, Hideyuki ; et al. | 2001-11-08 |
| Plasma processing apparatus App 20010037857 - Kazumi, Hideyuki ; et al. | 2001-11-08 |
| Plasma processing apparatus App 20010023663 - Kazumi, Hideyuki ; et al. | 2001-09-27 |
| Plasma processing apparatus and method Grant 6,180,019 - Kazumi , et al. January 30, 2 | 2001-01-30 |
| Semiconductor integrated circuit arrangement fabrication method Grant 5,962,347 - Tokunaga , et al. October 5, 1 | 1999-10-05 |
| Semiconductor integrated circuit arrangement fabrication method Grant 5,874,013 - Tokunaga , et al. February 23, 1 | 1999-02-23 |
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