Patent | Date |
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Production Method Of Monocrystalline Silicon App 20220162769 - KAWAZOE; Shinichi ;   et al. | 2022-05-26 |
Producing method and apparatus of silicon single crystal, and silicon single crystal ingot Grant 10,294,583 - Narushima , et al. | 2019-05-21 |
Manufacturing method of monocrystalline silicon and monocrystalline silicon Grant 10,233,564 - Narushima , et al. | 2019-03-19 |
Manufacturing Method Of Monocrystalline Silicon And Monocrystalline Silicon App 20180094360 - NARUSHIMA; Yasuhito ;   et al. | 2018-04-05 |
Silicon single crystal pulling device and graphite member used therein Grant 9,212,431 - Kawazoe , et al. December 15, 2 | 2015-12-15 |
Processes for production of silicon ingot, silicon wafer and epitaxial wafer, and silicon ingot Grant 9,074,298 - Kawazoe , et al. July 7, 2 | 2015-07-07 |
Method of manufacturing monocrystal, flow straightening cylinder, and monocrystal pulling-up device Grant 8,961,686 - Kawazoe , et al. February 24, 2 | 2015-02-24 |
Silicon single crystal pull-up apparatus that pulls a doped silicon single crystal from a melt Grant 8,920,561 - Narushima , et al. December 30, 2 | 2014-12-30 |
Silicon single crystal pull-up apparatus that pulls a doped silicon single crystal from a melt Grant 08920561 - | 2014-12-30 |
Method for manufacturing single crystal Grant 8,852,340 - Narushima , et al. October 7, 2 | 2014-10-07 |
Process for production of silicon single crystal, and highly doped N-type semiconductor substrate Grant 8,747,551 - Kawazoe , et al. June 10, 2 | 2014-06-10 |
Doping apparatus for simultaneously injecting two dopants into a semiconductor melt at different positions and method for manufacturing silicon single crystal using the doping apparatus Grant 8,715,416 - Narushima , et al. May 6, 2 | 2014-05-06 |
Method For Manufacturing Single Crystal App 20140033967 - NARUSHIMA; Yasuhito ;   et al. | 2014-02-06 |
Process For Production Of Silicon Single Crystal, And Highly Doped N-type Semiconductor Substrate App 20140020617 - KAWAZOE; Shinichi ;   et al. | 2014-01-23 |
Method for manufacturing single crystal Grant 8,580,032 - Narushima , et al. November 12, 2 | 2013-11-12 |
Process for production of silicon single crystal, and highly doped N-type semiconductor substrate Grant 8,574,363 - Kawazoe , et al. November 5, 2 | 2013-11-05 |
Manufacturing method for silicon single crystal Grant 8,535,439 - Narushima , et al. September 17, 2 | 2013-09-17 |
Silicon single crystal pull-up apparatus having a sliding sample tube Grant 8,518,180 - Narushima , et al. August 27, 2 | 2013-08-27 |
Method of dopant injection, N-type silicon single-crystal, doping apparatus and pull-up device Grant 8,409,347 - Kawazoe , et al. April 2, 2 | 2013-04-02 |
Dopant implanting method and doping apparatus Grant 8,283,241 - Narushima , et al. October 9, 2 | 2012-10-09 |
Semiconductor single crystal manufacturing device and manufacturing method Grant 8,187,383 - Kubota , et al. May 29, 2 | 2012-05-29 |
Method for manufacturing single crystal Grant 8,110,042 - Narushima , et al. February 7, 2 | 2012-02-07 |
Process for production of silicon single crystal Grant 8,043,428 - Kawazoe , et al. October 25, 2 | 2011-10-25 |
Processes For Production Of Silicon Ingot, Silicon Wafer And Epitaxial Wafer , And Silicon Ingot App 20110140241 - Kawazoe; Shinichi ;   et al. | 2011-06-16 |
Silicon Single Crystal Pull-up Apparatus App 20110132257 - Narushima; Yasuhito ;   et al. | 2011-06-09 |
Silicon Single Crystal Pull-up Apparatus App 20110120367 - Narushima; Yasuhito ;   et al. | 2011-05-26 |
Producing Method And Apparatus Of Silicon Single Crystal, And Silicon Single Crystal Ingot App 20100294999 - Narushima; Yasuhito ;   et al. | 2010-11-25 |
Method Of Manufacturing Monocrystal, Flow Straightening Cylinder, And Monocrystal Pulling-up Device App 20100212580 - Kawazoe; Shinichi ;   et al. | 2010-08-26 |
Manufacturing Method For Silicon Single Crystal App 20100175612 - NARUSHIMA; Yasuhito ;   et al. | 2010-07-15 |
Dopant Implanting Method And Doping Apparatus App 20100151667 - Narushima; Yasuhito ;   et al. | 2010-06-17 |
Process For Production Of Silicon Single Crystal, And Silicon Single Crystal Substrate App 20100133485 - Kawazoe; Shinichi ;   et al. | 2010-06-03 |
Method For Manufacturing Single Crystal App 20100071612 - Narushima; Yasuhito ;   et al. | 2010-03-25 |
Method For Manufacturing Single Crystal App 20100050931 - Narushima; Yasuhito ;   et al. | 2010-03-04 |
Doping Apparatus And Method For Manufacturing Silicon Single Crystal App 20100031871 - Narushima; Yasuhito ;   et al. | 2010-02-11 |
Method Of Dopant Injection, N-type Silicon Single-crystal, Doping Apparatus And Pull-up Device App 20090314996 - Kawazoe; Shinichi ;   et al. | 2009-12-24 |
Method Of Injecting Dopant Gas App 20090145350 - Narushima; Yasuhito ;   et al. | 2009-06-11 |
Semiconductor Single Crystal Manufacturing Device and Manufacturing Method App 20090120352 - Kubota; Toshimichi ;   et al. | 2009-05-14 |
Silicon Single Crystal Pulling Device And Graphite Member Used Therein App 20080078322 - Kawazoe; Shinichi ;   et al. | 2008-04-03 |