| Patent | Date |
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Chemically Amplified Positive-type Photosensitive Resin Composition, Photosensitive Dry Film, Production Method For Photosensitive Dry Film, Production Method For Patterned Resist Film, Compound, Photo-acid Generator, And Production Method For N-organosulfonyloxy Compound
App 20220283500 - KAWAUE; Akiya | 2022-09-08 |
Chemically amplified positive-type photosensitive resin composition, photosensitive dry film, method of manufacturing photosensitive dry film, method of manufacturing patterned resist film, method of manufacturing substrate with template and method of manufacturing plated article
Grant 11,131,927 - Kawaue , et al. September 28, 2 | 2021-09-28 |
Chemical amplification type positive photosensitive resin composition, a photosensitive dry film, a method for producing a photosensitive dry film, a method for producing a patterned resist film, a method of manufacturing a template with a substrate, and a method of manufacturing a plated shaped pro
Grant 11,061,326 - Kawaue , et al. July 13, 2 | 2021-07-13 |
Chemically amplified positive-type photosensitive resin composition, photosensitive dry film, method of manufacturing photosensitive dry film, method of manufacturing patterned resist film, method of manufacturing substrate with template, method of manufacturing plated article, and mercapto compound
Grant 11,022,880 - Kawaue , et al. June 1, 2 | 2021-06-01 |
Method of producing structure containing phase-separated structure
Grant 10,995,234 - Dazai , et al. May 4, 2 | 2021-05-04 |
Chemically Amplified Photosensitive Composition, Photosensitive Dry Film, Method Of Manufacturing Patterned Resist Film, Method
App 20200209739 - KAWAUE; Akiya ; et al. | 2020-07-02 |
Brush composition, and method of producing structure containing phase-separated structure
Grant 10,676,636 - Kawaue | 2020-06-09 |
Chemically Amplified Positive-type Photosensitive Resin Composition, Photosensitive Dry Film, Method Of Manufacturing Photosensi
App 20200142307 - MOMOZAWA; Aya ; et al. | 2020-05-07 |
Chemically Amplified Positive-type Photosensitive Resin Composition, Photosensitive Dry Film, Method Of Manufacturing Photosensi
App 20190346765 - KAWAUE; Akiya ; et al. | 2019-11-14 |
Method Of Producing Structure Containing Phase-separated Structure
App 20190276698 - DAZAI; Takahiro ; et al. | 2019-09-12 |
Chemically Amplified Positive-type Photosensitive Resin Composition, Photosensitive Dry Film, Method Of Manufacturing Photosensitive Dry Film, Method Of Manufacturing Patterned Resist Film, Method Of Manufacturing Substrate With Template, Method Of Manufacturing Plated Article, And Mercapto Compound
App 20190121233 - KAWAUE; Akiya ; et al. | 2019-04-25 |
Chemical Amplification Type Positive Photosensitive Resin Composition, A Photosensitive Dry Film, A Method For Producing A Photosensitive Dry Film, A Method For Producing A Patterned Resist Film, A Method Of Manufacturing A Template With A Substrate, And A Method Of Manufacturing A Plated Shaped Pro
App 20190101825 - KAWAUE; Akiya ; et al. | 2019-04-04 |
Resin composition for forming a phase-separated structure, and method of producing structure containing phase-separated structure
Grant 10,179,866 - Kawaue , et al. Ja | 2019-01-15 |
Method for manufacturing polymer compound
Grant 10,100,134 - Arai , et al. October 16, 2 | 2018-10-16 |
Brush Composition, And Method Of Producing Structure Containing Phase-separated Structure
App 20180273794 - KAWAUE; Akiya | 2018-09-27 |
Resin composition for forming a phase-separated structure, and method of producing structure containing phase-separated structure
Grant 9,914,847 - Kawaue , et al. March 13, 2 | 2018-03-13 |
Resin Composition For Forming A Phase-separated Structure, And Method Of Producing Structure Containing Phase-separated Structure
App 20170362460 - KAWAUE; Akiya ; et al. | 2017-12-21 |
Resin composition for forming a phase-separated structure, and method of producing structure containing phase-separated structure
Grant 9,828,519 - Kawaue , et al. November 28, 2 | 2017-11-28 |
Brush composition, and method of producing structure containing phase-separated structure
Grant 9,776,208 - Yahagi , et al. October 3, 2 | 2017-10-03 |
Resin Composition For Forming A Phase-separated Structure, And Method Of Producing Structure Containing Phase-separated Structure
App 20170240767 - KAWAUE; Akiya ; et al. | 2017-08-24 |
Resin Composition For Forming A Phase-separated Structure, And Method Of Producing Structure Containing Phase-separated Structure
App 20170240766 - KAWAUE; Akiya ; et al. | 2017-08-24 |
Method For Manufacturing Polymer Compound
App 20170166664 - ARAI; Masatoshi ; et al. | 2017-06-15 |
Brush Composition, And Method Of Producing Structure Containing Phase-separated Structure
App 20160194751 - YAHAGI; Masahito ; et al. | 2016-07-07 |
Resist composition, compound, polymeric compound and method of forming resist pattern
Grant 9,244,347 - Komuro , et al. January 26, 2 | 2016-01-26 |
Resist composition and method of forming resist pattern
Grant 9,164,380 - Komuro , et al. October 20, 2 | 2015-10-20 |
Resist composition, method of forming resist pattern and compound
Grant 9,063,416 - Komuro , et al. June 23, 2 | 2015-06-23 |
Resist composition and resist pattern forming method
Grant 9,052,592 - Nakamura , et al. June 9, 2 | 2015-06-09 |
Resist composition, method of forming resist pattern and compound
Grant 9,040,224 - Kawaue , et al. May 26, 2 | 2015-05-26 |
Resist composition, method of forming resist pattern, polymeric compound, and compound
Grant 9,023,581 - Kawaue , et al. May 5, 2 | 2015-05-05 |
Resist composition, method of forming resist pattern, novel compound and acid generator
Grant 9,017,919 - Utsumi , et al. April 28, 2 | 2015-04-28 |
Resist Composition, Method Of Forming Resist Pattern, Compound And Polymeric Compound
App 20150111155 - Kawaue; Akiya ; et al. | 2015-04-23 |
Resist composition, method of forming resist pattern, novel compound, and acid generator
Grant 9,012,129 - Hada , et al. April 21, 2 | 2015-04-21 |
Compound, polymeric compound, acid generator, resist composition, and method of forming resist pattern
Grant 9,005,874 - Komuro , et al. April 14, 2 | 2015-04-14 |
Resist Composition, Compound, Polymeric Compound And Method Of Forming Resist Pattern
App 20140356787 - Komuro; Yoshitaka ; et al. | 2014-12-04 |
Resist composition, method of forming resist pattern, and new compound
Grant 8,846,291 - Utsumi , et al. September 30, 2 | 2014-09-30 |
Resist Composition And Resist Pattern Forming Method
App 20140287360 - Nakamura; Tsuyoshi ; et al. | 2014-09-25 |
Resist composition, method of forming resist pattern, novel compound, and acid generator
Grant 8,808,959 - Hada , et al. August 19, 2 | 2014-08-19 |
Resist Composition, Method Of Forming Resist Pattern And Compound
App 20140178821 - Kawaue; Akiya ; et al. | 2014-06-26 |
Resist Composition, Method Of Forming Resist Pattern, Novel Compound, And Acid Generator
App 20140120472 - HADA; Hideo ; et al. | 2014-05-01 |
Resist composition, method of forming resist pattern, novel compound, and acid generator
Grant 8,703,387 - Kawaue , et al. April 22, 2 | 2014-04-22 |
Resist Composition, Method Of Forming Resist Pattern, Compound And Polymeric Compound
App 20130260314 - Kawaue; Akiya ; et al. | 2013-10-03 |
Resist composition, method of forming resist pattern, compound and acid generator including the same
Grant 8,541,157 - Kawaue , et al. September 24, 2 | 2013-09-24 |
Resist Composition And Method Of Forming Resist Pattern
App 20130189619 - Komuro; Yoshitaka ; et al. | 2013-07-25 |
Resist Composition, Method Of Forming Resist Pattern And Compound
App 20130157197 - Komuro; Yoshitaka ; et al. | 2013-06-20 |
Resist Composition, Method Of Forming Resist Pattern, Polymeric Compound, And Compound
App 20130089819 - Kawaue; Akiya ; et al. | 2013-04-11 |
Resist composition, method of forming resist pattern, novel compound, and acid generator
Grant 8,415,085 - Hada , et al. April 9, 2 | 2013-04-09 |
Resist Composition And Method Of Forming Resist Pattern
App 20130065180 - Kurosawa; Tsuyoshi ; et al. | 2013-03-14 |
Resist composition, method of forming resist pattern, compound and acid generator
Grant 8,367,299 - Kawaue , et al. February 5, 2 | 2013-02-05 |
Resist composition, method of forming resist pattern, novel compound and acid generator
Grant 8,367,297 - Kawaue , et al. February 5, 2 | 2013-02-05 |
Resist composition, method of forming resist pattern, novel compound, and acid generator
Grant 8,338,076 - Kawaue , et al. December 25, 2 | 2012-12-25 |
Resist Composition, Method Of Forming Resist Pattern, Novel Compound, And Acid Generator
App 20120301829 - Kawaue; Akiya ; et al. | 2012-11-29 |
Compound, Polymeric Compound, Acid Generator, Resist Composition, And Method Of Forming Resist Pattern
App 20120270155 - Komuro; Yoshitaka ; et al. | 2012-10-25 |
Resist Composition, Method Of Forming Resist Pattern, Novel Compound, And Acid Generator
App 20120264061 - HADA; Hideo ; et al. | 2012-10-18 |
Compound and method of producing same, acid generator, resist composition, and method of forming resist pattern
Grant 8,252,505 - Kawaue , et al. August 28, 2 | 2012-08-28 |
Resist composition, method of forming resist pattern, and novel compound and acid generator
Grant 8,247,160 - Utsumi , et al. August 21, 2 | 2012-08-21 |
Compound, acid generator, resist composition, and method of forming resist pattern
Grant 8,227,169 - Kawaue , et al. July 24, 2 | 2012-07-24 |
Positive resist composition and method of forming resist pattern
Grant 8,211,616 - Shimizu , et al. July 3, 2 | 2012-07-03 |
Positive resist composition and method of forming resist pattern
Grant 8,206,891 - Seshimo , et al. June 26, 2 | 2012-06-26 |
Resist composition, method of forming resist pattern, compound and acid generator
Grant 8,206,890 - Kawaue , et al. June 26, 2 | 2012-06-26 |
Resist Composition, Method Of Forming Resist Pattern, And New Compound
App 20120148955 - Utsumi; Yoshiyuki ; et al. | 2012-06-14 |
Resist Composition, Method Of Forming Resist Pattern, Novel Compound And Acid Generator
App 20120107744 - Utsumi; Yoshiyuki ; et al. | 2012-05-03 |
Resist composition, method of forming resist pattern, novel compound, and acid generator
Grant 8,124,313 - Seshimo , et al. February 28, 2 | 2012-02-28 |
Resist Composition, Method Of Forming Resist Pattern, Compound And Acid Generator
App 20120009521 - Kawaue; Akiya ; et al. | 2012-01-12 |
Compound, acid generator, resist composition and method of forming resist pattern
Grant 7,955,777 - Seshimo , et al. June 7, 2 | 2011-06-07 |
Resist composition, method of forming resist pattern, novel compound and method of producing the same, and acid generator
Grant 7,927,780 - Kawaue , et al. April 19, 2 | 2011-04-19 |
Positive resist composition and method of forming resist pattern
Grant 7,914,968 - Mimura , et al. March 29, 2 | 2011-03-29 |
Positive Resist Composition And Method Of Forming Resist Pattern
App 20100304289 - Mimura; Takeyoshi ; et al. | 2010-12-02 |
Resist composition, method of forming resist pattern, compound and acid generator
Grant 7,776,510 - Iwai , et al. August 17, 2 | 2010-08-17 |
Resist composition, method of forming resist pattern, novel compound and acid generator
App 20100196820 - Kawaue; Akiya ; et al. | 2010-08-05 |
Compound, manufacturing method thereof, acid generator, resist composition and method of forming resist pattern
Grant 7,745,097 - Hada , et al. June 29, 2 | 2010-06-29 |
Resist composition, method of forming resist pattern, novel compound, and acid generator
App 20100136478 - Kawaue; Akiya ; et al. | 2010-06-03 |
Resist Composition, Method Of Forming Resist Pattern, Novel Compound, And Acid Generator
App 20100121077 - Seshimo; Takehiro ; et al. | 2010-05-13 |
Resist composition, method of forming resist pattern, novel compound, and acid generator
App 20100119974 - Hada; Hideo ; et al. | 2010-05-13 |
Resist composition, method of forming resist pattern, novel compound, and acid generator
Grant 7,713,679 - Ishiduka , et al. May 11, 2 | 2010-05-11 |
Compound, Acid Generator, Resist Composition, And Method Of Forming Resist Pattern
App 20100104973 - Kawaue; Akiya ; et al. | 2010-04-29 |
Positive Resist Composition And Method Of Forming Resist Pattern
App 20100086873 - Seshimo; Takehiro ; et al. | 2010-04-08 |
Resist Composition, Method Of Forming Resist Pattern, Compound And Acid Generator Including The Same
App 20100081088 - KAWAUE; Akiya ; et al. | 2010-04-01 |
Resist composition, method of forming resist pattern, novel compound, and acid generator
Grant 7,682,772 - Seshimo , et al. March 23, 2 | 2010-03-23 |
Resist Composition, Method Of Forming Resist Pattern, And Novel Compound And Acid Generator
App 20100015555 - UTSUMI; Yoshiyuki ; et al. | 2010-01-21 |
Resist Composition, Method Of Forming Resist Pattern, Compound And Acid Generator
App 20100015552 - Kawaue; Akiya ; et al. | 2010-01-21 |
Positive Resist Composition And Method Of Forming Resist Pattern
App 20100015553 - Shimizu; Hiroaki ; et al. | 2010-01-21 |
Positive Resist Composition, And Method Of Forming Resist Pattern
App 20090253075 - Mimura; Takeyoshi ; et al. | 2009-10-08 |
Novel Compound And Method Of Producing Same, Acid Generator, Resist Composition, And Method Of Forming Resist Pattern
App 20090208871 - Kawaue; Akiya ; et al. | 2009-08-20 |
Novel Compound, Acid Generator, Resist Composition And Method Of Forming Resist Pattern
App 20090162787 - Seshimo; Takehiro ; et al. | 2009-06-25 |
Resist Composition, Method Of Forming Resist Pattern, Novel Compound, And Acid Generator
App 20090130597 - Seshimo; Takehiro ; et al. | 2009-05-21 |
Resist Composition, Method Of Forming Resist Pattern, Novel Compound, And Acid Generator
App 20090104563 - Ishiduka; Keita ; et al. | 2009-04-23 |
Resist Composition, Method Of Forming Resist Pattern, Novel Compound And Method Of Producing The Same, And Acid Generator
App 20090068591 - Kawaue; Akiya ; et al. | 2009-03-12 |
Resist composition, method of forming resist pattern, compound and acid generator
Grant 7,488,568 - Iwai , et al. February 10, 2 | 2009-02-10 |
Novel Compound, Manufacturing Method Thereof, Acid Generator, Resist Composition And Method Of Forming A Resist Pattern
App 20090023095 - Hada; Hideo ; et al. | 2009-01-22 |
Resist Composition, Method Of Forming Resist Pattern, Compound And Acid Generator
App 20080311522 - Iwai; Takeshi ; et al. | 2008-12-18 |
Resist Composition, Method Of Forming Resist Pattern, Compound And Acid Generator
App 20080248422 - Iwai; Takeshi ; et al. | 2008-10-09 |
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