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Laser apparatus and extreme ultraviolet light generation system Grant 10,868,403 - Kawasuji December 15, 2 | 2020-12-15 |
Laser apparatus and measurement unit Grant 10,483,713 - Nogiwa , et al. Nov | 2019-11-19 |
Laser Apparatus And Extreme Ultraviolet Light Generation System App 20190326722 - KAWASUJI; Yasufumi | 2019-10-24 |
Device for controlling temperature of cooling water Grant 10,371,469 - Kawasuji , et al. | 2019-08-06 |
Laser apparatus and extreme ultraviolet light generating system Grant 10,340,654 - Nogiwa , et al. | 2019-07-02 |
Laser apparatus and method for adding chamber to laser apparatus Grant 10,250,007 - Kawasuji | 2019-04-02 |
Laser apparatus, EUV light generation system, and method of controlling laser apparatus Grant 10,224,686 - Kawasuji , et al. | 2019-03-05 |
Laser Apparatus And Extreme Ultraviolet Light Generating System App 20180342849 - NOGIWA; Seiji ;   et al. | 2018-11-29 |
Device For Controlling Temperature Of Cooling Water App 20180120041 - KAWASUJI; Yasufumi ;   et al. | 2018-05-03 |
Device for controlling temperature of cooling water Grant 9,891,012 - Kawasuji , et al. February 13, 2 | 2018-02-13 |
Laser Apparatus And Measurement Unit App 20170373461 - NOGIWA; Seiji ;   et al. | 2017-12-28 |
Laser apparatus and laser apparatus manufacturing method Grant 9,837,779 - Kawasuji , et al. December 5, 2 | 2017-12-05 |
Laser apparatus and extreme ultraviolet light generation system Grant 9,762,024 - Kurosawa , et al. September 12, 2 | 2017-09-12 |
Slab amplifier, and laser apparatus and extreme ultraviolet light generation apparatus including slab amplifier Grant 9,680,277 - Nowak , et al. June 13, 2 | 2017-06-13 |
Laser Apparatus, Euv Light Generation System, And Method Of Controlling Laser Apparatus App 20170070024 - KAWASUJI; Yasufumi ;   et al. | 2017-03-09 |
Laser Apparatus And Laser Apparatus Manufacturing Method App 20160365694 - KAWASUJI; Yasufumi ;   et al. | 2016-12-15 |
Extreme ultraviolet light generating apparatus, method of generating extreme ultraviolet light, concentrated pulsed laser light beam measuring apparatus, and method of measuring concentrated pulsed laser light beam Grant 9,510,434 - Mizoguchi , et al. November 29, 2 | 2016-11-29 |
Laser Apparatus And Method For Adding Chamber To Laser Apparatus App 20160248213 - KAWASUJI; Yasufumi | 2016-08-25 |
Laser Apparatus And Extreme Ultraviolet Light Generation System App 20160156150 - KUROSAWA; Yoshiaki ;   et al. | 2016-06-02 |
Extreme Ultraviolet Light Generating Apparatus, Method Of Generating Extreme Ultraviolet Light, Concentrated Pulsed Laser Light Beam Measuring Apparatus, And Method Of Measuring Concentrated Pulsed Laser Light Beam App 20150351211 - MIZOGUCHI; Hakaru ;   et al. | 2015-12-03 |
Mirror Unit App 20150346457 - KAWASUJI; Yasufumi ;   et al. | 2015-12-03 |
Slab Amplifier, And Laser Apparatus And Extreme Ultraviolet Light Generation Apparatus Including Slab Amplifier App 20150188277 - NOWAK; Krzysztof ;   et al. | 2015-07-02 |
Laser apparatus Grant 8,855,164 - Kawasuji , et al. October 7, 2 | 2014-10-07 |
Device For Controlling Temperature Of Cooling Water App 20140246187 - KAWASUJI; Yasufumi ;   et al. | 2014-09-04 |
Laser Apparatus App 20130114215 - Kawasuji; Yasufumi ;   et al. | 2013-05-09 |
Discharge electrodes connecting structure for laser apparatus and laser apparatus therewith Grant 6,771,685 - Yabu , et al. August 3, 2 | 2004-08-03 |
Discharge circuit for pulsed laser Grant 6,693,938 - Umeda , et al. February 17, 2 | 2004-02-17 |
Saturable Reactor And Power Source Apparatus For Pulse Laser Utilising Same App 20020176460 - KAWASUJI, YASUFUMI ;   et al. | 2002-11-28 |