Kawashima; Haruna
Patent Applications and Registrations
Patent applications and USPTO patent grants for Kawashima; Haruna.The latest application filed is for "light source apparatus, illumination device, exposure apparatus, and device manufacturing method".
- Kawashima; Haruna - Haga-gun JP
- Kawashima; Haruna - Tochiqiken JP
- Kawashima; Haruna - Tochigiken JP
- Kawashima; Haruna - Tokyo JP
- Kawashima; Haruna - Tochigi JP
- Kawashima, Haruna - Tochigi-ken JP
- Kawashima; Haruna - Utsunomiya JP
- Kawashima; Haruna - Kawasaki JP
| Patent | Date |
|---|---|
| Light source apparatus, illumination device, exposure apparatus, and device manufacturing method Grant 10,216,092 - Kawashima Feb | 2019-02-26 |
| Light source apparatus, illumination device, exposure apparatus, and device manufacturing method Grant 9,772,560 - Kawashima September 26, 2 | 2017-09-26 |
| Light Source Apparatus, Illumination Device, Exposure Apparatus, And Device Manufacturing Method App 20170123321 - Kawashima; Haruna | 2017-05-04 |
| Light Source Apparatus, Illumination Device, Exposure Apparatus, And Device Manufacturing Method App 20160041472 - Kawashima; Haruna | 2016-02-11 |
| Immersion exposure apparatus and device manufacturing method Grant 8,164,754 - Kawashima , et al. April 24, 2 | 2012-04-24 |
| Exposure apparatus Grant 8,077,288 - Kawashima December 13, 2 | 2011-12-13 |
| Exposure apparatus and device fabrication method Grant 7,880,862 - Saito , et al. February 1, 2 | 2011-02-01 |
| Exposure Apparatus And Method Of Manufacturing Device App 20100002209 - Kawashima; Haruna ; et al. | 2010-01-07 |
| Exposure apparatus and device manufacturing method Grant 7,630,058 - Kawashima , et al. December 8, 2 | 2009-12-08 |
| Exposure method Grant 7,619,716 - Kawashima , et al. November 17, 2 | 2009-11-17 |
| Immersion Exposure Apparatus And Device Manufacturing Method App 20090268176 - Kawashima; Haruna ; et al. | 2009-10-29 |
| Exposure apparatus and device fabrication method Grant 7,525,656 - Kadono , et al. April 28, 2 | 2009-04-28 |
| Exposure Apparatus And Device Manufacturing Method App 20090033904 - Kawashima; Haruna ; et al. | 2009-02-05 |
| Exposure Apparatus And Device Fabrication Method App 20080151251 - Saito; Nobuyuki ; et al. | 2008-06-26 |
| Button for a watch Grant D569,293 - Hanagata , et al. May 20, 2 | 2008-05-20 |
| Exposure Method App 20070132981 - KAWASHIMA; Haruna ; et al. | 2007-06-14 |
| Exposure Apparatus App 20070132978 - Kawashima; Haruna | 2007-06-14 |
| Exposure Apparatus And Device Fabrication Method App 20070046922 - KADONO; Ayako ; et al. | 2007-03-01 |
| Exposure method and apparatus Grant 7,145,635 - Kawashima December 5, 2 | 2006-12-05 |
| Wrist watch Grant D526,217 - Kawashima August 8, 2 | 2006-08-08 |
| Projection optical system Grant 7,057,820 - Kawashima June 6, 2 | 2006-06-06 |
| Exposure apparatus App 20050237502 - Kawashima, Haruna | 2005-10-27 |
| Exposure method and apparatus App 20050151942 - Kawashima, Haruna | 2005-07-14 |
| Projection optical system App 20040240071 - Kawashima, Haruna | 2004-12-02 |
| Illumination system with plural light sources, and exposure apparatus having the same Grant 6,727,982 - Kawashima , et al. April 27, 2 | 2004-04-27 |
| Exposure apparatus and method, and device fabricating method App 20030020893 - Kawashima, Haruna | 2003-01-30 |
| Illumination system with plural light sources, and exposure apparatus having the same App 20020036904 - Kawashima, Haruna ; et al. | 2002-03-28 |
| Surface position detection device Grant 5,955,739 - Kawashima September 21, 1 | 1999-09-21 |
| Exposure method and exposure apparatus using the same Grant 5,751,428 - Kataoka , et al. May 12, 1 | 1998-05-12 |
| Surface position detecting method and apparatus including detection and correction of errors, such as surface position errors or tilt, in exposure regions Grant 5,602,400 - Kawashima February 11, 1 | 1997-02-11 |
| Projection exposure apparatus Grant 5,489,966 - Kawashima , et al. February 6, 1 | 1996-02-06 |
| Surface position detecting device Grant 5,414,515 - Kawashima May 9, 1 | 1995-05-09 |
| Focusing method Grant 5,323,016 - Yamada , et al. June 21, 1 | 1994-06-21 |
| Device for detecting the position of a surface Grant 5,162,642 - Akamatsu , et al. November 10, 1 | 1992-11-10 |
| Method and apparatus for precisely detecting surface position of a patterned wafer Grant 5,118,957 - Kawashima , et al. June 2, 1 | 1992-06-02 |
| Projection exposure apparatus Grant 5,117,254 - Kawashima , et al. May 26, 1 | 1992-05-26 |
| Autofocusing system for a projecting exposure apparatus Grant 4,952,970 - Suzuki , et al. August 28, 1 | 1990-08-28 |
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