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Patent applications and USPTO patent grants for Kawase; Yuichi.The latest application filed is for "charged-particle beam lithographic apparatus and lithographic method therefor".
Patent | Date |
---|---|
Piezoelectric device with asymmetrically mounted tuning-fork type piezoelectric vibrating piece Grant 8,803,407 - Kawase , et al. August 12, 2 | 2014-08-12 |
Piezoelectric devices including frequency-adjustment units Grant 8,604,677 - Kawase , et al. December 10, 2 | 2013-12-10 |
Charged-Particle Beam Lithographic Apparatus and Lithographic Method Therefor App 20120061593 - Kawase; Yuichi | 2012-03-15 |
Piezoelectric Devices Including Frequency-adjustment Units App 20110291524 - Kawase; Yuichi ;   et al. | 2011-12-01 |
Piezoelectric Device with Tuning-fork type Piezoelectric Vibrating Piece App 20110260586 - Kawase; Yuichi ;   et al. | 2011-10-27 |
Method of pattern delineation Grant 7,820,362 - Kawase October 26, 2 | 2010-10-26 |
Method and System for Charged-Particle Beam Lithography App 20090032739 - Kawase; Yuichi | 2009-02-05 |
Method of Pattern Delineation App 20080193881 - Kawase; Yuichi | 2008-08-14 |
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