Patent | Date |
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Polishing device, polishing method, and record medium Grant 11,097,397 - Watanabe , et al. August 24, 2 | 2021-08-24 |
Dresser, Polishing Device, And Method Of Dressing Polishing Pad App 20200282513 - KAWASAKI; Tomonori | 2020-09-10 |
Wafer polishing method and apparatus Grant 10,744,616 - Kawasaki , et al. A | 2020-08-18 |
Single-wafer processing method of polishing one side of semiconductor wafer and single-wafer processing apparatus for polishing one side of semiconductor wafer Grant 10,391,607 - Kawasaki A | 2019-08-27 |
Polishing Device, Polishing Method, And Record Medium App 20190039206 - Watanabe; Takashi ;   et al. | 2019-02-07 |
Wafer Polishing Method And Apparatus App 20180369985 - KAWASAKI; Tomonori ;   et al. | 2018-12-27 |
Method of polishing wafer and wafer polishing apparatus Grant 9,919,402 - Kawasaki March 20, 2 | 2018-03-20 |
Single-wafer Processing Method Of Polishing One Side Of Semiconductor Wafer And Single-wafer Processing Apparatus For Polishing One Side Of Semiconductor Wafer App 20180036864 - KAWASAKI; Tomonori | 2018-02-08 |
Single side polishing apparatus for wafer Grant 9,630,292 - Kawasaki April 25, 2 | 2017-04-25 |
Method Of Polishing Wafer And Wafer Polishing Apparatus App 20160207161 - KAWASAKI; Tomonori | 2016-07-21 |
Single Side Polishing Apparatus For Wafer App 20160167191 - Kawasaki; Tomonori | 2016-06-16 |
Etching method and etching apparatus of semiconductor wafer Grant 9,305,850 - Kozasa , et al. April 5, 2 | 2016-04-05 |
Method of polishing one side of wafer and single side polishing apparatus for wafer Grant 9,266,213 - Kawasaki February 23, 2 | 2016-02-23 |
Method of cleaning semiconductor wafer and semiconductor wafer Grant 8,992,791 - Kozasa , et al. March 31, 2 | 2015-03-31 |
Method Of Polishing One Side Of Wafer And Single Side Polishing Apparatus For Wafer App 20140162532 - Kawasaki; Tomonori | 2014-06-12 |
Method for cleaning silicon wafer, and method for producing epitaxial wafer using the cleaning method Grant 8,664,092 - Kawasaki March 4, 2 | 2014-03-04 |
Semiconductor wafer processing method and apparatus Grant 8,334,222 - Gotou , et al. December 18, 2 | 2012-12-18 |
Etching Method And Etching Apparatus Of Semiconductor Wafer App 20120305187 - Kozasa; Kazuaki ;   et al. | 2012-12-06 |
Etching method and etching apparatus of semiconductor wafer Grant 8,273,260 - Kozasa , et al. September 25, 2 | 2012-09-25 |
Method For Cleaning Silicon Wafer, And Method For Producing Epitaxial Wafer Using The Cleaning Method App 20120100701 - Kawasaki; Tomonori | 2012-04-26 |
Method Of Cleaning Semiconductor Wafer And Semiconductor Wafer App 20100093177 - KOZASA; Kazuaki ;   et al. | 2010-04-15 |
Rough polishing method of semiconductor wafer and polishing apparatus of semiconductor wafer Grant 7,666,063 - Kozasa , et al. February 23, 2 | 2010-02-23 |
Etching Method And Etching Apparatus Of Semiconductor Wafer App 20090286333 - Kozasa; Kazuaki ;   et al. | 2009-11-19 |
Semiconductor Wafer Processing Method And Apparatus App 20090275213 - Gotou; Isamu ;   et al. | 2009-11-05 |
Rough polishing method of semiconductor wafer and polishing apparatus of semiconductor wafer Grant 7,540,800 - Kozasa , et al. June 2, 2 | 2009-06-02 |
Rough Polishing Method Of Semiconductor Wafer And Polishing Apparatus Of Semiconductor Wafer App 20090042482 - KOZASA; Kazuaki ;   et al. | 2009-02-12 |
Rough polishing method of semiconductor wafer and polishing apparatus of semiconductor wafer App 20080081541 - Kozasa; Kazuaki ;   et al. | 2008-04-03 |
Power-supply device for working machine such as a spark-erosion machine Grant 4,106,087 - Kawasaki August 8, 1 | 1978-08-08 |