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Semiconductor device provided with semiconductor circuit made of semiconductor element and method of fabricating the same Grant 7,320,905 - Yamazaki , et al. January 22, 2 | 2008-01-22 |
Laser apparatus, laser annealing method, and manufacture method of a semiconductor device App 20070148925 - Yamazaki; Shunpei ;   et al. | 2007-06-28 |
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Laser irradiation apparatus, laser irradiation method, semiconductor device, and method of manufacturing a semiconductor device App 20050247685 - Tanaka, Koichiro ;   et al. | 2005-11-10 |
Laser irradiation apparatus laser irradiation method, semiconductor device and method of manufacturing a semiconductor device Grant 6,927,109 - Tanaka , et al. August 9, 2 | 2005-08-09 |
Semiconductor device provided with semiconductor circuit made of semiconductor element and method of fabricating the same App 20050116225 - Yamazaki, Shunpei ;   et al. | 2005-06-02 |
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Method for manufacturing a semiconductor device using laser light Grant 6,844,249 - Kawasaki , et al. January 18, 2 | 2005-01-18 |
Semiconductor device provided with semiconductor circuit made of semiconductor element and method of fabricating the same Grant 6,838,324 - Yamazaki , et al. January 4, 2 | 2005-01-04 |
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Laser apparatus, laser annealing method, and manufacturing method of a semiconductor device App 20040224449 - Yamazaki, Shunpei ;   et al. | 2004-11-11 |
EL display device having a pixel portion and a driver circuit Grant 6,809,382 - Kawasaki , et al. October 26, 2 | 2004-10-26 |
Laser apparatus and laser annealing method App 20040203219 - Kasahara, Kenji ;   et al. | 2004-10-14 |
Method of manufacturing a semiconductor device having a heat absorbing layer Grant 6,780,687 - Nakajima , et al. August 24, 2 | 2004-08-24 |
Laser irradiation method and method of manufacturing a semiconductor device App 20040161913 - Kawasaki, Ritsuko ;   et al. | 2004-08-19 |
Semiconductor device and manufacturing method thereof App 20040147065 - Kitakado, Hidehito ;   et al. | 2004-07-29 |
Semiconductor device and method of fabricating the same App 20040140470 - Kawasaki, Ritsuko ;   et al. | 2004-07-22 |
Semiconductor device and its manufacturing method App 20040124419 - Nakajima, Setsuo ;   et al. | 2004-07-01 |
Laser apparatus, laser annealing method, and manufacturing method of a semiconductor device Grant 6,753,212 - Yamazaki , et al. June 22, 2 | 2004-06-22 |
Semiconductor device and method of fabricating thereof Grant 6,746,901 - Kasahara , et al. June 8, 2 | 2004-06-08 |
Laser apparatus and laser annealing method Grant 6,744,008 - Kasahara , et al. June 1, 2 | 2004-06-01 |
Method for manufacturing a semiconductor device App 20040092061 - Kawasaki, Ritsuko ;   et al. | 2004-05-13 |
Laser apparatus, laser annealing method, and manufacturing method of a semiconductor device Grant 6,730,550 - Yamazaki , et al. May 4, 2 | 2004-05-04 |
Semiconductor device and method of fabricating the same App 20040079952 - Yamazaki, Shunpei ;   et al. | 2004-04-29 |
Semiconductor device and method of fabricating thereof App 20040063258 - Kasahara, Kenji ;   et al. | 2004-04-01 |
Semiconductor device and manufacturing method thereof Grant 6,709,902 - Kitakado , et al. March 23, 2 | 2004-03-23 |
Semiconductor device and a method of manufacturing the same App 20040026740 - Kawasaki, Ritsuko ;   et al. | 2004-02-12 |
Semiconductor device and the fabricating method therefor Grant 6,677,221 - Kawasaki , et al. January 13, 2 | 2004-01-13 |
Semiconductor device and a method of manufacturing the same Grant 6,653,657 - Kawasaki , et al. November 25, 2 | 2003-11-25 |
Semiconductor device and method of fabricating the same Grant 6,645,826 - Yamazaki , et al. November 11, 2 | 2003-11-11 |
Semiconductor device, manufacturing method thereof, and electronic device App 20030203656 - Kasahara, Kenji ;   et al. | 2003-10-30 |
Method for manufacturing a semiconductor device Grant 6,624,013 - Kawasaki , et al. September 23, 2 | 2003-09-23 |
EL display device having a pixel portion and a driver circuit Grant 6,614,076 - Kawasaki , et al. September 2, 2 | 2003-09-02 |
Semiconductor device and method of fabricating the same Grant 6,599,788 - Kawasaki , et al. July 29, 2 | 2003-07-29 |
EL display device with a TFT Grant 6,555,875 - Kawasaki , et al. April 29, 2 | 2003-04-29 |
Method of crystallizing a semiconductor layer by applying laser irradiation that vary in energy to its top and bottom surfaces Grant 6,548,370 - Kasahara , et al. April 15, 2 | 2003-04-15 |
Semiconductor device and method of fabricating the same App 20020167007 - Yamazaki, Shunpei ;   et al. | 2002-11-14 |
Semiconductor device and the fabricating method therefor App 20020149057 - Kawasaki, Ritsuko ;   et al. | 2002-10-17 |
Method for manufacturing a semiconductor device App 20020146874 - Kawasaki, Ritsuko ;   et al. | 2002-10-10 |
Semiconductor device and method of manufacturing the same App 20020121665 - Kawasaki, Ritsuko ;   et al. | 2002-09-05 |
Method for manufacturing a semiconductor device Grant 6,426,245 - Kawasaki , et al. July 30, 2 | 2002-07-30 |
Semiconductor device having a tantalum oxide blocking film Grant 6,424,012 - Kawasaki , et al. July 23, 2 | 2002-07-23 |
Method of manufacturing a semiconductor device with TFT Grant 6,410,368 - Kawasaki , et al. June 25, 2 | 2002-06-25 |
Semiconductor device and manufacturing method thereof App 20020058364 - Kitakado, Hidehito ;   et al. | 2002-05-16 |
Semiconductor device and method of fabricating the same Grant 6,380,558 - Yamazaki , et al. April 30, 2 | 2002-04-30 |
Semiconductor device and a method of manufacturing the same Grant 6,380,011 - Yamazaki , et al. April 30, 2 | 2002-04-30 |
Laser apparatus, laser annealing method, and manufacturing method of a semiconductor device App 20020048864 - Yamazaki, Shunpei ;   et al. | 2002-04-25 |
Electro-optical devices in which pixel section and the driver circuit are disposed over the same substrate Grant 6,362,507 - Ogawa , et al. March 26, 2 | 2002-03-26 |
Semiconductor device and method of fabricating thereof App 20020017685 - Kasahara, Kenji ;   et al. | 2002-02-14 |
Liquid crystal display device having a pixel TFT formed in a display region and a drive circuit formed in the periphery of the display region on the same substrate Grant 6,346,730 - Kitakado , et al. February 12, 2 | 2002-02-12 |
Laser apparatus, laser annealing method, and manufacturing method of a semiconductor device App 20020004292 - Yamazaki, Shunpei ;   et al. | 2002-01-10 |
Semiconductor device and a method of manufacturing the same App 20010045558 - Kawasaki, Ritsuko ;   et al. | 2001-11-29 |
Semiconductor device provided with semiconductor circuit made of semiconductor element and method of fabricating the same App 20010029069 - Yamazaki, Shunpei ;   et al. | 2001-10-11 |
Thin film transistors having ldd regions Grant 6,281,552 - Kawasaki , et al. August 28, 2 | 2001-08-28 |
Semiconductor device and a method of manufacturing the same App 20010015441 - Kawasaki, Ritsuko ;   et al. | 2001-08-23 |
Semiconductor device and its manufacturing method App 20010010391 - Nakajima, Setsuo ;   et al. | 2001-08-02 |
Semiconductor device provided with semiconductor circuit made of semiconductor element and method of fabricating the same Grant 6,246,070 - Yamazaki , et al. June 12, 2 | 2001-06-12 |