| Patent | Date |
|---|
Methods And Apparatus For Processing A Substrate
App 20220130642 - KAWASAKI; Katsumasa ; et al. | 2022-04-28 |
Methods and apparatus for etching semiconductor structures
Grant 11,164,723 - Shimizu , et al. November 2, 2 | 2021-11-02 |
Methods And Apparatus For Etching Semiconductor Structures
App 20210142987 - SHIMIZU; Daisuke ; et al. | 2021-05-13 |
Methods and apparatus for etching semiconductor structures
Grant 10,930,471 - Shimizu , et al. February 23, 2 | 2021-02-23 |
Radio frequency (RF) pulsing impedance tuning with multiplier mode
Grant 10,854,427 - Kawasaki , et al. December 1, 2 | 2020-12-01 |
Smart RF pulsing tuning using variable frequency generators
Grant 10,790,126 - Kawasaki September 29, 2 | 2020-09-29 |
Methods And Apparatus For Etching Semiconductor Structures
App 20200294771 - SHIMIZU; DAISUKE ; et al. | 2020-09-17 |
Methods and apparatus for etching semiconductor structures
Grant 10,593,518 - Shimizu , et al. | 2020-03-17 |
Radio Frequency (rf) Pulsing Impedance Tuning With Multiplier Mode
App 20200075290 - KAWASAKI; KATSUMASA ; et al. | 2020-03-05 |
Smart Rf Pulsing Tuning Using Variable Frequency Generators
App 20190362941 - KAWASAKI; KATSUMASA | 2019-11-28 |
RF power delivery regulation for processing substrates
Grant 10,468,233 - Kawasaki , et al. No | 2019-11-05 |
Smart RF pulsing tuning using variable frequency generators
Grant 10,424,467 - Kawasaki Sept | 2019-09-24 |
Smart Rf Pulsing Tuning Using Variable Frequency Generators
App 20180261430 - KAWASAKI; KATSUMASA | 2018-09-13 |
Smart multi-level RF pulsing methods
Grant 9,872,373 - Shimizu , et al. January 16, 2 | 2018-01-16 |
Rf Power Delivery Regulation For Processing Substrates
App 20170358428 - KAWASAKI; Katsumasa ; et al. | 2017-12-14 |
RF power delivery with approximated saw tooth wave pulsing
Grant 9,788,405 - Kawasaki , et al. October 10, 2 | 2017-10-10 |
RF pulse reflection reduction for processing substrates
Grant 9,754,767 - Kawasaki September 5, 2 | 2017-09-05 |
RF power delivery regulation for processing substrates
Grant 9,741,539 - Kawasaki , et al. August 22, 2 | 2017-08-22 |
Rf Pulse Reflection Reduction For Processing Substrates
App 20170103873 - KAWASAKI; Katsumasa | 2017-04-13 |
Rf Power Delivery Regulation For Processing Substrates
App 20170098527 - KAWASAKI; Katsumasa ; et al. | 2017-04-06 |
Rf Power Delivery With Approximated Saw Tooth Wave Pulsing
App 20170099722 - KAWASAKI; KATSUMASA ; et al. | 2017-04-06 |
Automatic impedance tuning with RF dual level pulsing
Grant 9,614,524 - Kawasaki April 4, 2 | 2017-04-04 |
Methods for etching materials using synchronized RF pulses
Grant 9,269,587 - Shimizu , et al. February 23, 2 | 2016-02-23 |
Methods For Etching Materials Using Synchronized Rf Pulses
App 20150072530 - KIM; Jong Mun ; et al. | 2015-03-12 |
Synchronized radio frequency pulsing for plasma etching
Grant 8,962,488 - Liao , et al. February 24, 2 | 2015-02-24 |
Etch Process Having Adaptive Control With Etch Depth Of Pressure And Power
App 20140342570 - Doan; Kenny Linh ; et al. | 2014-11-20 |
Synchronized Radio Frequency Pulsing For Plasma Etching
App 20130213935 - LIAO; BRYAN ; et al. | 2013-08-22 |
Synchronized radio frequency pulsing for plasma etching
Grant 8,404,598 - Liao , et al. March 26, 2 | 2013-03-26 |
Methods And Apparatus For Radio Frequency (rf) Plasma Processing
App 20120000888 - KAWASAKI; KATSUMASA ; et al. | 2012-01-05 |
Synchronized Radio Frequency Pulsing For Plasma Etching
App 20110031216 - LIAO; BRYAN ; et al. | 2011-02-10 |
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