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Heat treatment method of light irradiation type Grant 11,430,676 - Kawarazaki , et al. August 30, 2 | 2022-08-30 |
Light-irradiation Heat Treatment Apparatus App 20210274598 - ABE; Makoto ;   et al. | 2021-09-02 |
Light-irradiation heat treatment apparatus Grant 11,089,657 - Abe , et al. August 10, 2 | 2021-08-10 |
Light-irradiation heat treatment method and heat treatment apparatus Grant 10,978,319 - Aoyama , et al. April 13, 2 | 2021-04-13 |
Heat Treatment Method Of Light Irradiation Type App 20210043477 - KAWARAZAKI; Hikaru ;   et al. | 2021-02-11 |
Light irradiation type heat treatment method and heat treatment apparatus Grant 10,903,126 - Kawarazaki January 26, 2 | 2021-01-26 |
Light-irradiation heat treatment method and heat treatment apparatus Grant 10,790,171 - Aoyama , et al. September 29, 2 | 2020-09-29 |
Heat treatment method for dopant introduction Grant 10,777,415 - Fuse , et al. Sept | 2020-09-15 |
Light Irradiation Type Heat Treatment Method And Heat Treatment Apparatus App 20200243402 - Kawarazaki; Hikaru | 2020-07-30 |
Light irradiation type heat treatment method and heat treatment apparatus Grant 10,658,250 - Kawarazaki | 2020-05-19 |
Light-irradiation heat treatment method and heat treatment apparatus Grant 10,580,667 - Aoyama , et al. | 2020-03-03 |
Thermal processing apparatus and thermal processing method through light irradiation Grant 10,573,569 - Furukawa , et al. Feb | 2020-02-25 |
Thermal processing method through light irradiation Grant 10,446,397 - Aoyama , et al. Oc | 2019-10-15 |
Light-irradiation Heat Treatment Method And Heat Treatment Apparatus App 20190311924 - AOYAMA; Takayuki ;   et al. | 2019-10-10 |
Light irradiation type heat treatment method and heat treatment apparatus Grant 10,424,483 - Aoyama , et al. Sept | 2019-09-24 |
Heat Treatment Method For Dopant Introduction App 20190244817 - FUSE; Kazuhiko ;   et al. | 2019-08-08 |
Light-irradiation heat treatment apparatus Grant 10,354,894 - Abe , et al. July 16, 2 | 2019-07-16 |
Thermal Processing Apparatus And Thermal Processing Method Through Light Irradiation App 20190181058 - FURUKAWA; Masashi ;   et al. | 2019-06-13 |
Heat Treatment Method And Heat Treatment Apparatus App 20190164789 - AOYAMA; Takayuki ;   et al. | 2019-05-30 |
Light Irradiation Type Heat Treatment Method And Heat Treatment Apparatus App 20190157168 - Kawarazaki; Hikaru | 2019-05-23 |
Light Irradiation Type Heat Treatment Method And Heat Treatment Apparatus App 20190109007 - AOYAMA; Takayuki ;   et al. | 2019-04-11 |
Light-irradiation Heat Treatment Method And Heat Treatment Apparatus App 20190027385 - AOYAMA; Takayuki ;   et al. | 2019-01-24 |
Light irradiation type heat treatment method and heat treatment apparatus Grant 10,181,404 - Aoyama , et al. Ja | 2019-01-15 |
Light-irradiation heat treatment method and heat treatment apparatus Grant 10,121,683 - Aoyama , et al. November 6, 2 | 2018-11-06 |
Crystal Structure Control Method And Heat Treatment Method App 20180202071 - Kawarazaki; Hikaru ;   et al. | 2018-07-19 |
Method and apparatus for heat-treating high dielectric constant film Grant 9,966,254 - Kawarazaki May 8, 2 | 2018-05-08 |
Method And Apparatus For Heat-treating High Dielectric Constant Film App 20180068847 - KAWARAZAKI; Hikaru | 2018-03-08 |
Light-irradiation Heat Treatment Method And Heat Treatment Apparatus App 20180005848 - AOYAMA; TAKAYUKI ;   et al. | 2018-01-04 |
Method and apparatus for heat-treating high dielectric constant film Grant 9,837,266 - Kawarazaki December 5, 2 | 2017-12-05 |
Light Irradiation Type Heat Treatment Method And Heat Treatment Apparatus App 20170309489 - AOYAMA; Takayuki ;   et al. | 2017-10-26 |
Light-irradiation Heat Treatment Apparatus App 20170243770 - ABE; Makoto ;   et al. | 2017-08-24 |
Light irradiation type heat treatment method and heat treatment apparatus Grant 9,741,576 - Aoyama , et al. August 22, 2 | 2017-08-22 |
Thermal Processing Apparatus And Thermal Processing Method Through Light Irradiation App 20170178979 - FURUKAWA; Masashi ;   et al. | 2017-06-22 |
Thermal Processing Method Through Light Irradiation App 20170117152 - AOYAMA; Takayuki ;   et al. | 2017-04-27 |
Method And Apparatus For Heat-treating High Dielectric Constant Film App 20170098543 - KAWARAZAKI; Hikaru | 2017-04-06 |
Light Irradiation Type Heat Treatment Method And Heat Treatment Apparatus App 20170062223 - AOYAMA; Takayuki ;   et al. | 2017-03-02 |
Light-irradiation Heat Treatment Method And Heat Treatment Apparatus App 20170062249 - AOYAMA; Takayuki ;   et al. | 2017-03-02 |
Method and apparatus for heat-treating high dielectric constant film Grant 9,557,110 - Kawarazaki January 31, 2 | 2017-01-31 |
Light-irradiation Heat Treatment Apparatus App 20160262207 - ABE; Makoto ;   et al. | 2016-09-08 |
Method And Apparatus For Heat-treating High Dielectric Constant Film App 20160195333 - KAWARAZAKI; Hikaru | 2016-07-07 |