Kawanobe; Yoshio
Patent Applications and Registrations
Patent applications and USPTO patent grants for Kawanobe; Yoshio.The latest application filed is for "exposure apparatus and method of manufacturing device".
- Kawanobe; Yoshio - Utsunomiya-shi JP
- Kawanobe; Yoshio - Utsunomiya JP
| Patent | Date |
|---|---|
| Exposure Apparatus And Method Of Manufacturing Device App 20090075210 - Takagi; Atsushi ; et al. | 2009-03-19 |
| Exposure Apparatus And Method Of Manufacturing Device App 20080198345 - Kawasaki; Youji ; et al. | 2008-08-21 |
| Immersion Exposure Apparatus And Method Of Manufacturing Device App 20080198347 - Kawasaki; Youji ; et al. | 2008-08-21 |
| Focus measurement in projection exposure apparatus Grant 6,633,390 - Shiode , et al. October 14, 2 | 2003-10-14 |
| Focus measurement in projection exposure apparatus App 20020015158 - Shiode, Yoshihiro ; et al. | 2002-02-07 |
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