KAWANO; Yumiko
Patent Applications and Registrations
Patent applications and USPTO patent grants for KAWANO; Yumiko.The latest application filed is for "film formation method and film formation apparatus".
Company Profile
4.49.64
- KAWANO; Yumiko - Nirasaki-shi Yamanashi
- KAWANO; Yumiko - Yamanashi JP
- Kawano; Yumiko - Hosaka-cho JP
- KAWANO; Yumiko - Nirasaki City JP
- Kawano; Yumiko - Nirasaki JP
- Kawano; Yumiko - Yamanashi-Ken JP
- Kawano; Yumiko - Kofu JP
- Kawano; Yumiko - Kofu-city JP
- Kawano, Yumiko - Tokyo JP
- Kawano, Yumiko - Nirasaki-Shi Yamanashi JP
- Kawano, Yumiko - Kofu-Shi JP
- Kawano, Yumiko - Iwakubo-cho JP
- Kawano; Yumiko - Chiba JP
Patent Activity
| Patent | Date |
|---|---|
| Film Formation Method And Film Formation Device App 20220186362 - AZUMO; Shuji ; et al. | 2022-06-16 |
| Method For Forming Film App 20220189778 - IKE; Shinichi ; et al. | 2022-06-16 |
| Film Formation Method And Film Formation Apparatus App 20220189777 - KAWANO; Yumiko ; et al. | 2022-06-16 |
| Film Formation Method And Film Formation Device App 20220181144 - KAWANO; Yumiko ; et al. | 2022-06-09 |
| Method For Area Selective Deposition Using A Surface Cleaning Process App 20210398846 - Tapily; Kandabara N. ; et al. | 2021-12-23 |
| Method Of Manufacturing Semiconductor Device App 20210399085 - KAWANO; Yumiko ; et al. | 2021-12-23 |
| Film Forming Method App 20210246547 - AZUMO; Shuji ; et al. | 2021-08-12 |
| Film Forming Method App 20210087691 - AZUMO; Shuji ; et al. | 2021-03-25 |
| Selective film forming method and method of manufacturing semiconductor device Grant 10,490,443 - Kawano , et al. Nov | 2019-11-26 |
| Method For Forming Tungsten Film App 20190161853 - Aoyama; Shintaro ; et al. | 2019-05-30 |
| Selective Film Forming Method and Method of Manufacturing Semiconductor Device App 20190096750 - KAWANO; Yumiko ; et al. | 2019-03-28 |
| Heat treatment apparatus Grant 9,750,087 - Yonenaga , et al. August 29, 2 | 2017-08-29 |
| Ge--Sb--Te film forming method, Ge--Te film forming method, and Sb--Te film forming method Grant 9,246,098 - Kawano , et al. January 26, 2 | 2016-01-26 |
| Method for forming Ge-Sb-Te film and storage medium Grant 9,187,822 - Kawano , et al. November 17, 2 | 2015-11-17 |
| Heat Treatment Apparatus App 20150201468 - YONENAGA; Tomihiro ; et al. | 2015-07-16 |
| Heat Treatment Apparatus And Heat Treatment Method App 20150093518 - YONENAGA; Tomihiro ; et al. | 2015-04-02 |
| Method for forming Ge-Sb-Te film and storage medium Grant 8,927,060 - Kawano , et al. January 6, 2 | 2015-01-06 |
| Cobalt Base Film-forming Method, Cobalt Base Film-forming Material, And Novel Compound App 20140248427 - Machida; Hideaki ; et al. | 2014-09-04 |
| Ge-Sb-Te FILM FORMING METHOD, Ge-Te FILM FORMING METHOD, AND Sb-Te FILM FORMING METHOD App 20140162401 - Kawano; Yumiko ; et al. | 2014-06-12 |
| Polymerized film forming method and polymerized film forming apparatus Grant 8,691,338 - Kawano , et al. April 8, 2 | 2014-04-08 |
| Method for Sr--Ti--O-based film formation Grant 8,679,913 - Kawano , et al. March 25, 2 | 2014-03-25 |
| Heat treatment apparatus Grant 8,674,273 - Yonenaga , et al. March 18, 2 | 2014-03-18 |
| Heat treatment apparatus Grant 8,658,951 - Yonenaga , et al. February 25, 2 | 2014-02-25 |
| Ruthenium Film Formation Method And Computer Readable Storage Medium App 20130230652 - KAWANO; Yumiko ; et al. | 2013-09-05 |
| METHOD FOR FORMING Ge-Sb-Te FILM AND STORAGE MEDIUM App 20130183446 - Kawano; Yumiko ; et al. | 2013-07-18 |
| Method for forming Ge-Sb-Te film and storage medium Grant 8,372,688 - Kawano , et al. February 12, 2 | 2013-02-12 |
| Method for forming SrTiO.sub.3 film and storage medium Grant 8,361,550 - Kakimoto , et al. January 29, 2 | 2013-01-29 |
| Process for forming the strontium-containing thin film Grant 8,293,327 - Kadokura , et al. October 23, 2 | 2012-10-23 |
| METHOD FOR FORMING Ge-Sb-Te FILM AND STORAGE MEDIUM App 20120108005 - Kawano; Yumiko ; et al. | 2012-05-03 |
| METHOD FOR FORMING Ge-Sb-Te FILM AND STORAGE MEDIUM App 20120107505 - Kawano; Yumiko ; et al. | 2012-05-03 |
| Heat Treatment Apparatus App 20110248024 - YONENAGA; Tomihiro ; et al. | 2011-10-13 |
| Raw material feeding device, film formation system and method for feeding gaseous raw material Grant 8,029,621 - Yamasaki , et al. October 4, 2 | 2011-10-04 |
| Heat Treatment Apparatus App 20110210117 - Yonenaga; Tomihiro ; et al. | 2011-09-01 |
| Polymerized Film Forming Method And Polymerized Film Forming Apparatus App 20110171384 - Kawano; Yumiko ; et al. | 2011-07-14 |
| Method of film deposition Grant 7,960,278 - Yamasaki , et al. June 14, 2 | 2011-06-14 |
| Film Forming Method And Storage Medium App 20110052810 - Kawano; Yumiko ; et al. | 2011-03-03 |
| Sr-ti-o-based Film Forming Method And Storage Medium App 20110036288 - Kawano; Yumiko ; et al. | 2011-02-17 |
| METHOD FOR Sr-Ti-O-BASED FILM FORMATION AND STORAGE MEDIUM App 20110014797 - Kawano; Yumiko ; et al. | 2011-01-20 |
| Method for forming SrTiO.sub.3 film Grant 7,816,282 - Kawano , et al. October 19, 2 | 2010-10-19 |
| Method For Forming Srtio3 Film And Storage Medium App 20100015335 - Kakimoto; Akinobu ; et al. | 2010-01-21 |
| Metal Film Decarbonizing Method, Film Forming Method And Semiconductor Device Manufacturing Method App 20090291549 - Yamasaki; Hideaki ; et al. | 2009-11-26 |
| Film Forming Method And Apparatus App 20090283038 - Gunji; Isao ; et al. | 2009-11-19 |
| Raw Material Feeding Device And Film Formation System App 20090250006 - Yamasaki; Hideaki ; et al. | 2009-10-08 |
| ALD film forming method Grant 7,582,544 - Gunji , et al. September 1, 2 | 2009-09-01 |
| Method Of Forming Tasin Film App 20090197410 - Nakamura; Kazuhito ; et al. | 2009-08-06 |
| Substrate Treating Apparatus App 20090165720 - KOJIMA; Yasuhiko ; et al. | 2009-07-02 |
| Method of Film Deposition and Film Deposition System App 20090142491 - Nakamura; Kazuhito ; et al. | 2009-06-04 |
| Method of Film Deposition and Film Deposition System App 20090140353 - Yamasaki; Hideaki ; et al. | 2009-06-04 |
| Method For Treating Substrate And Recording Medium App 20090117270 - Yamasaki; Hideaki ; et al. | 2009-05-07 |
| Ruthenium Film Formation Method And Computer Readable Storage Medium App 20090035466 - KAWANO; Yumiko ; et al. | 2009-02-05 |
| Thin film forming method and thin film forming device Grant 7,482,283 - Yamasaki , et al. January 27, 2 | 2009-01-27 |
| Process For Forming The Strontium-containing Thin Film App 20090004383 - KADOKURA; Hidekimi ; et al. | 2009-01-01 |
| Method for cleaning substrate processing chamber Grant 7,456,109 - Yamasaki , et al. November 25, 2 | 2008-11-25 |
| Method for processing a substrate Grant 7,419,702 - Nakamura , et al. September 2, 2 | 2008-09-02 |
| Method For Forming Srtio3 Film App 20080175994 - KAWANO; Yumiko ; et al. | 2008-07-24 |
| Transition metal thin film forming method Grant 7,361,595 - Yamasaki , et al. April 22, 2 | 2008-04-22 |
| Film formation method Grant 7,344,754 - Yamasaki , et al. March 18, 2 | 2008-03-18 |
| Film Forming Method And Apparatus App 20070134919 - Gunji; Isao ; et al. | 2007-06-14 |
| Method for forming a passivated metal layer Grant 7,189,431 - Yamasaki , et al. March 13, 2 | 2007-03-13 |
| Method of forming an oxidation-resistant TiSiN film Grant 7,105,060 - Shimogaki , et al. September 12, 2 | 2006-09-12 |
| Method of depositing metal layers from metal-carbonyl precursors Grant 7,078,341 - Yamasaki , et al. July 18, 2 | 2006-07-18 |
| Method of forming a tantalum-containing gate electrode structure Grant 7,067,422 - Nakamura , et al. June 27, 2 | 2006-06-27 |
| CVD process capable of reducing incubation time Grant 7,063,871 - Yamasaki , et al. June 20, 2 | 2006-06-20 |
| Method for cleaning substrate processing chamber App 20060124151 - Yamasaki; Hideaki ; et al. | 2006-06-15 |
| Low-pressure deposition of ruthenium and rhenium metal layers from metal carbonyl precursors App 20060068588 - Yamasaki; Hideaki ; et al. | 2006-03-30 |
| Deposition of ruthenium metal layers in a thermal chemical vapor deposition process App 20060068098 - Yamasaki; Hideaki ; et al. | 2006-03-30 |
| Method For Forming A Passivated Metal Layer App 20060068097 - Yamasaki; Hideaki ; et al. | 2006-03-30 |
| Low-pressure deposition of metal layers from metal-carbonyl precursors Grant 6,989,321 - Yamasaki , et al. January 24, 2 | 2006-01-24 |
| Processing system, evacuating system for processing system, low-pressure CVD system, and evacuating system and trapping device for low-pressure CVD system Grant 6,966,936 - Yamasaki , et al. November 22, 2 | 2005-11-22 |
| Substrate treating apparatus App 20050235918 - Kojima, Yasuhiko ; et al. | 2005-10-27 |
| Film formation method App 20050233079 - Yamasaki, Hideaki ; et al. | 2005-10-20 |
| Method of forming a tantalum-containing gate electrode structure App 20050227441 - Nakamura, Kazuhito ; et al. | 2005-10-13 |
| Method for processing a substrate App 20050221002 - Nakamura, Kazuhito ; et al. | 2005-10-06 |
| Method of forming a metal layer using an intermittent precursor gas flow process Grant 6,924,223 - Yamasaki , et al. August 2, 2 | 2005-08-02 |
| Method of manufacturing a WN contact plug Grant 6,919,268 - Yamasaki , et al. July 19, 2 | 2005-07-19 |
| Method of forming metal wiring and semiconductor manufacturing apparatus for forming metal wiring Grant 6,913,996 - Yamasaki , et al. July 5, 2 | 2005-07-05 |
| Film forming apparatus App 20050120955 - Yamasaki, Hideaki ; et al. | 2005-06-09 |
| Method of depositing metal layers from metal-carbonyl precursors App 20050079708 - Yamasaki, Hideaki ; et al. | 2005-04-14 |
| Method of forming a metal layer using an intermittent precursor gas flow process App 20050069632 - Yamasaki, Hideaki ; et al. | 2005-03-31 |
| Low-pressure deposition of metal layers from metal-carbonyl precursors App 20050070100 - Yamasaki, Hideaki ; et al. | 2005-03-31 |
| Method of forming an oxidation-resistant TiSiN film App 20050020065 - Shimogaki, Yukihiro ; et al. | 2005-01-27 |
| Method of making a metal oxide capacitor, including a barrier film Grant 6,846,711 - Yamasaki , et al. January 25, 2 | 2005-01-25 |
| Thin film forming method and thin film forming apparatus App 20040231585 - Yamasaki, Hideaki ; et al. | 2004-11-25 |
| Film forming unit Grant 6,797,068 - Yamasaki , et al. September 28, 2 | 2004-09-28 |
| Method of forming an oxidation-resistant TiSiN film Grant 6,793,969 - Shimogaki , et al. September 21, 2 | 2004-09-21 |
| Processing method and processing apparatus App 20040060513 - Kojima, Yasuhiko ; et al. | 2004-04-01 |
| CVD process capable of reducing incubation time App 20040025789 - Yamasaki, Hideaki ; et al. | 2004-02-12 |
| Thin film forming method and thin film forming device App 20040029379 - Yamasaki, Hideaki ; et al. | 2004-02-12 |
| Film-formation apparatus and source supplying apparatus therefor, gas concentration measuring method App 20040007180 - Yamasaki, Hideaki ; et al. | 2004-01-15 |
| Method of forming an oxidation-resistant TiSiN film App 20030148605 - Shimogaki, Yukihiro ; et al. | 2003-08-07 |
| Apparatus and method for delivery of precursor vapor from low vapor pressure liquid sources to a CVD chamber Grant 6,548,112 - Hillman , et al. April 15, 2 | 2003-04-15 |
| Semiconductor device and method of manufacturing the same App 20030038314 - Yamasaki, Hideaki ; et al. | 2003-02-27 |
| Processing system, evacuating system for processing system, low-pressure CVD system, and evacuating system and trapping device for low-pressure CVD system App 20030037730 - Yamasaki, Hideaki ; et al. | 2003-02-27 |
| Method of forming metal wiring and semiconductor manufacturing apparatus for forming metal wiring App 20030003729 - Yamasaki, Hideaki ; et al. | 2003-01-02 |
| Method and apparatus for manufacturing semiconductor device App 20020173078 - Kawano, Yumiko ; et al. | 2002-11-21 |
| CVD apparatus and CVD method Grant 6,436,203 - Kaizuka , et al. August 20, 2 | 2002-08-20 |
| Semiconductor device fabricating method and system for carrying out the same Grant 6,399,484 - Yamasaki , et al. June 4, 2 | 2002-06-04 |
| Semiconductor device and method of manufacturing the same App 20020027240 - Yamasaki, Hideaki ; et al. | 2002-03-07 |
| Semiconductor device manufacturing method App 20010034127 - Yamasaki, Hideaki ; et al. | 2001-10-25 |
| Semiconductor device and manufacturing method therefor App 20010020715 - Yamasaki, Hideaki ; et al. | 2001-09-13 |
| CVD film forming method in which a film formation preventing gas is supplied in a direction from a rear surface of an object to be processed Grant 6,210,486 - Mizukami , et al. April 3, 2 | 2001-04-03 |
| CVD apparatus and CVD method Grant 6,089,184 - Kaizuka , et al. July 18, 2 | 2000-07-18 |
| Metal interconnection and method for making Grant 5,973,402 - Shinriki , et al. October 26, 1 | 1999-10-26 |
| Method for making metal interconnection with chlorine plasma etch Grant 5,627,102 - Shinriki , et al. May 6, 1 | 1997-05-06 |
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