Kawamura; Shigeru

Patent Applications and Registrations

Patent applications and USPTO patent grants for Kawamura; Shigeru.The latest application filed is for "substrate cleaning apparatus, substrate cleaning method, and substrate processing apparatus".

Company Profile

0.7.11

Kawamura; Shigeru - Nirasaki JP
KAWAMURA; Shigeru - Nirasaki-shi JP
Kawamura; Shigeru - Yamanashi JP
Kawamura, Shigeru - Kai JP
Kawamura; Shigeru - Tokyo JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Substrate cleaning apparatus, substrate cleaning method, and substrate processing apparatus Grant 8,945,412 - Kawamura , et al. February 3, 2	2015-02-03
Substrate processing method and substrate processing apparatus Grant 8,647,440 - Kawamura , et al. February 11, 2	2014-02-11
Substrate Cleaning Apparatus, Substrate Cleaning Method, And Substrate Processing Apparatus App 20120298132 - KAWAMURA; Shigeru ; et al.	2012-11-29
Analysis method and analysis apparatus Grant 7,923,680 - Dobashi , et al. April 12, 2	2011-04-12
Method Of Helping Particle Detection, Method Of Particle Detection,apparatus For Helping Particle Detection,and System For Particle Detection App 20110058157 - Kawamura; Shigeru ; et al.	2011-03-10
Substrate Processing Method And Substrate Processing Apparatus App 20100043820 - Kawamura; Shigeru ; et al.	2010-02-25
Analyzing Method and Analyzing Apparatus App 20090218483 - Dobashi; Kazuya ; et al.	2009-09-03
Substrate Cleaning Apparatus, Substrate Cleaning Method, And Substrate Treatment Apparatus App 20090065027 - Kawamura; Shigeru ; et al.	2009-03-12
Substrate Cleaning Device And Substrate Processing Apparatus App 20080230096 - KAWAMURA; Shigeru ; et al.	2008-09-25
Apparatus and method for measuring or applying thermal expansion/shrinkage rate App 20050143950 - Kawamura, Shigeru	2005-06-30
Film forming method and film forming apparatus App 20050026454 - Konishi, Nobuo ; et al.	2005-02-03
Film forming method by radiating a plasma on a surface of a low dielectric constant film Grant 6,800,546 - Konishi , et al. October 5, 2	2004-10-05
Analyzing method for non-uniform-density sample and device and system thereof App 20030157559 - Omote, Kazuhiko ; et al.	2003-08-21
Film forming method and film forming apparatus App 20020177298 - Konishi, Nobuo ; et al.	2002-11-28
Method and apparatus for observing porous amorphous film, and method and apparatus for forming the same App 20020122879 - Kawamura, Shigeru	2002-09-05
Low distortion amplifier circuit Grant 4,481,483 - Kawamura November 6, 1	1984-11-06

uspto.report is an independent third-party trademark research tool that is not affiliated, endorsed, or sponsored by the United States Patent and Trademark Office (USPTO) or any other governmental organization. The information provided by uspto.report is based on publicly available data at the time of writing and is intended for informational purposes only.

While we strive to provide accurate and up-to-date information, we do not guarantee the accuracy, completeness, reliability, or suitability of the information displayed on this site. The use of this site is at your own risk. Any reliance you place on such information is therefore strictly at your own risk.

All official trademark data, including owner information, should be verified by visiting the official USPTO website at www.uspto.gov. This site is not intended to replace professional legal advice and should not be used as a substitute for consulting with a legal professional who is knowledgeable about trademark law.