| Patent | Date |
|---|
Compound semiconductor substrate including electron transition layer and barrier layer
Grant 11,316,018 - Narukawa , et al. April 26, 2 | 2022-04-26 |
Compound Semiconductor Substrate
App 20220077288 - OUCHI; Sumito ; et al. | 2022-03-10 |
Compound Semiconductor Substrate
App 20220069090 - SUZUKI; Hiroki ; et al. | 2022-03-03 |
Compound Semiconductor Device, Compound Semiconductor Substrate, And Method For Manufacturing Compound Semiconductor Device
App 20220005945 - HISHIKI; Shigeomi ; et al. | 2022-01-06 |
Compound Semiconductor Substrate
App 20200402922 - OUCHI; Sumito ; et al. | 2020-12-24 |
Compound Semiconductor Substrate
App 20200020778 - Narukawa; Mitsuhisa ; et al. | 2020-01-16 |
Compound semiconductor substrate with SiC layer
Grant 10,354,864 - Narukawa , et al. July 16, 2 | 2019-07-16 |
Vibration reduction apparatus of hybrid vehicle
Grant 10,253,843 - Kawamura , et al. | 2019-04-09 |
Composite semiconductor substrate
Grant 10,186,421 - Fukazawa , et al. Ja | 2019-01-22 |
Control apparatus for transmission
Grant 10,086,841 - Kuzuhara , et al. October 2, 2 | 2018-10-02 |
COMPOUND SEMICONDUCTOR SUBSTRATE WITH SiC LAYER
App 20180277363 - Narukawa; Mitsuhisa ; et al. | 2018-09-27 |
Vibration Reduction Apparatus Of Hybrid Vehicle
App 20180073593 - Kawamura; Keisuke ; et al. | 2018-03-15 |
Composite Semiconductor Substrate
App 20180053647 - FUKAZAWA; Akira ; et al. | 2018-02-22 |
Control Apparatus For Transmission
App 20170305430 - Kuzuhara; Keiji ; et al. | 2017-10-26 |
Vehicle Power Transmission Apparatus
App 20160053875 - Kawamura; Keisuke | 2016-02-25 |
Method of manufacturing single crystal 3C-SiC substrate and single crystal 3C-SiC substrate obtained from the manufacturing method
Grant 8,986,448 - Asamura , et al. March 24, 2 | 2015-03-24 |
Vacuum processing apparatus
Grant 8,931,432 - Kawamura , et al. January 13, 2 | 2015-01-13 |
Method for manufacturing nitrogen compound semiconductor substrate and nitrogen compound semiconductor substrate, and method for manufacturing single crystal SiC substrate and single crystal SiC substrate
Grant 8,563,442 - Kawamura , et al. October 22, 2 | 2013-10-22 |
Vacuum processing apparatus and operating method for vacuum processing apparatus
Grant 8,529,704 - Sasakawa , et al. September 10, 2 | 2013-09-10 |
Method Of Manufacturing Single Crystal 3c-sic Substrate And Single Crystal 3c-sic Substrate Obtained From The Manufacturing Method
App 20130040103 - Asamura; Hidetoshi ; et al. | 2013-02-14 |
Molding Apparatus, Method Of Forming Molded Product, And Molded Product
App 20130004708 - Kayama; Shun ; et al. | 2013-01-03 |
Method For Manufacturing Nitrogen Compound Semiconductor Substrate And Nitrogen Compound Semiconductor Substrate, And Method For Manufacturing Single Crystal Sic Substrate And Single Crystal Sic Substrate
App 20110089433 - Kawamura; Keisuke ; et al. | 2011-04-21 |
Photovoltaic Device And Process For Producing Photovoltaic Device
App 20110073185 - Nishimiya; Tatsuyuki ; et al. | 2011-03-31 |
Vacuum Processing Apparatus And Operating Method For Vacuum Processing Apparatus
App 20100310785 - Sasakawa; Eishiro ; et al. | 2010-12-09 |
Method for plasma-enhanced chemical vapor deposition and apparatus for plasma-enhanced chemical vapor deposition
Grant 7,833,587 - Mashima , et al. November 16, 2 | 2010-11-16 |
Vacuum Processing Apparatus And Deposition Method Using The Vacuum Processing Apparatus
App 20100009096 - Kawamura; Keisuke ; et al. | 2010-01-14 |
Thin-film deposition apparatus using discharge electrode and solar cell fabrication method
App 20090159432 - Kawano; Shingo ; et al. | 2009-06-25 |
High-frequency power supply structure and plasma CVD device using the same
Grant 7,319,295 - Mashima , et al. January 15, 2 | 2008-01-15 |
Wafer holding, wafer support member, wafer boat and heat treatment furnace
Grant 7,204,887 - Kawamura , et al. April 17, 2 | 2007-04-17 |
Method and device for generating uniform high-frequency plasma over large surface area used for plasma chemical vapor deposition apparatus
Grant 7,205,034 - Kawamura , et al. April 17, 2 | 2007-04-17 |
Information terminal apparatus
Grant 7,167,358 - Iwasaki , et al. January 23, 2 | 2007-01-23 |
High frequency plasma generator and high frequency plasma generating method
Grant 7,141,516 - Kawamura , et al. November 28, 2 | 2006-11-28 |
Production method for SIMOX substrate and SIMOX substrate
Grant 7,067,402 - Matsumura , et al. June 27, 2 | 2006-06-27 |
Plasma chemical vapor deposition method and plasma chemical vapor deposition device
App 20050272261 - Mashima, Hiroshi ; et al. | 2005-12-08 |
Method and device for generating uniform high-frequency plasma over large surface area used for plasma chemical vapor deposition apparatus
App 20050255255 - Kawamura, Keisuke ; et al. | 2005-11-17 |
High frequency plasma generator and high frequency plasma generating method
App 20050241768 - Kawamura, Keisuke ; et al. | 2005-11-03 |
Plasma processing system and its substrate processing process, plasma enhanced chemical vapor deposition system and its film deposition process
App 20050223990 - Kawamura, Keisuke ; et al. | 2005-10-13 |
High-frequency power supply structure and plasma cvd device using the same
App 20050127844 - Mashima, Hiroshi ; et al. | 2005-06-16 |
Information terminal apparatus
App 20040191614 - Iwasaki, Yuuki ; et al. | 2004-09-30 |
Production method for simox substrate and simox substrate
App 20040171228 - Matsumura, Atsuki ; et al. | 2004-09-02 |
Simox substrate and method for production thereof
Grant 6,767,801 - Kawamura , et al. July 27, 2 | 2004-07-27 |
SOI substrate and method for production thereof
Grant 6,617,034 - Hamaguchi , et al. September 9, 2 | 2003-09-09 |
Simox substrate and method for production thereof
App 20030036289 - Kawamura, Keisuke ; et al. | 2003-02-20 |
Wafer holder, wafer support member, wafer holding device, and heat treating furnance
App 20030029570 - Kawamura, Keisuke ; et al. | 2003-02-13 |
Exhaust emission purifier
App 20010036428 - Tamura, Yasuki ; et al. | 2001-11-01 |
Plasma type exhaust gas cleaning apparatus
App 20010023589 - Tamura, Yasuki ; et al. | 2001-09-27 |
Apparatus and method for treating exhaust gas and pulse generator used therefor
Grant 6,007,681 - Kawamura , et al. December 28, 1 | 1999-12-28 |
| 