loadpatents
Patent applications and USPTO patent grants for KAWAMOTO; Yoshifumi.The latest application filed is for "fabrication system and fabrication method".
Patent | Date |
---|---|
Fabrication System And Fabrication Method App 20100131093 - YOKOYAMA; Natsuki ;   et al. | 2010-05-27 |
Fabrication system and fabrication method Grant 7,603,194 - Yokoyama , et al. October 13, 2 | 2009-10-13 |
Fabrication system and fabrication method App 20080243293 - Yokoyama; Natsuki ;   et al. | 2008-10-02 |
Fabrication system and fabrication method Grant 7,392,106 - Yokoyama , et al. June 24, 2 | 2008-06-24 |
Fabrication system and fabrication method Grant 7,310,563 - Yokoyama , et al. December 18, 2 | 2007-12-18 |
Fabrication system and fabrication method Grant 7,062,344 - Yokoyama , et al. June 13, 2 | 2006-06-13 |
Fabrication system and fabrication method App 20060111802 - Yokoyama; Natsuki ;   et al. | 2006-05-25 |
Fabrication system and fabrication method App 20060111805 - Yokoyama; Natsuki ;   et al. | 2006-05-25 |
Semiconductor memory device Grant 6,878,586 - Kimura , et al. April 12, 2 | 2005-04-12 |
Fabrication system and fabrication method App 20040107020 - Yokoyama, Natsuki ;   et al. | 2004-06-03 |
Dynamic random access memory including a logic circuit and an improved storage capacitor arrangement Grant 6,700,152 - Fukuda , et al. March 2, 2 | 2004-03-02 |
Semiconductor memory device App 20030205751 - Kimura, Shinichiro ;   et al. | 2003-11-06 |
Semiconductor memory device with recessed array region Grant RE38,296 - Moriuchi , et al. November 4, 2 | 2003-11-04 |
Semiconductor integrated circuit device and process for manufacturing the same App 20020195641 - Fukuda, Takuya ;   et al. | 2002-12-26 |
Semiconductor integrated circuit device and process for manufacture the same Grant 6,432,769 - Fukuda , et al. August 13, 2 | 2002-08-13 |
Semiconductor integrated circuit device having memory cells App 20010008288 - Kimura, Shinichiro ;   et al. | 2001-07-19 |
Fabrication system and fabrication method Grant 6,099,598 - Yokoyama , et al. August 8, 2 | 2000-08-08 |
Method and apparatus for fabricating semiconductor devices Grant 5,981,399 - Kawamura , et al. November 9, 1 | 1999-11-09 |
Fabrication system and method having inter-apparatus transporter Grant 5,858,863 - Yokoyama , et al. January 12, 1 | 1999-01-12 |
Fabrication system and method having inter-apparatus transporter Grant 5,820,679 - Yokoyama , et al. October 13, 1 | 1998-10-13 |
Wafer transport method Grant 5,601,686 - Kawamura , et al. February 11, 1 | 1997-02-11 |
Semiconductor memory device having stacked capacitors Grant 5,583,358 - Kimura , et al. December 10, 1 | 1996-12-10 |
Wafer transport method Grant 5,562,800 - Kawamura , et al. October 8, 1 | 1996-10-08 |
Semiconductor device including arrangement for reducing junction degradation Grant 5,426,326 - Ohyu , et al. June 20, 1 | 1995-06-20 |
Semiconductor memory with trench capacitor Grant 5,357,131 - Sunami , et al. October 18, 1 | 1994-10-18 |
Semiconductor device having a low-resistivity planar wiring structure Grant 5,200,635 - Kaga , et al. April 6, 1 | 1993-04-06 |
Semiconductor memory device with recessed array region Grant 5,196,910 - Moriuchi , et al. March 23, 1 | 1993-03-23 |
Semiconductor memory device having stacked capacitor cells Grant 5,140,389 - Kimura , et al. * August 18, 1 | 1992-08-18 |
Process for manufacturing vertical dynamic random access memories Grant 5,106,775 - Kaga , et al. April 21, 1 | 1992-04-21 |
Semiconductor memory having stacked capacitor Grant 5,012,310 - Kimura , et al. April 30, 1 | 1991-04-30 |
Vertical MOSFET DRAM Grant 4,984,030 - Sunami , et al. January 8, 1 | 1991-01-08 |
Semiconductor memory device having stacked capacitor cells Grant 4,970,564 - Kimura , et al. November 13, 1 | 1990-11-13 |
Vertical dynamic random access memory Grant 4,967,247 - Kaga , et al. October 30, 1 | 1990-10-30 |
Semiconductor memory Grant 4,901,128 - Sunami , et al. February 13, 1 | 1990-02-13 |
Method of making a semiconductor memory device with recessed array region Grant 4,882,289 - Moriuchi , et al. November 21, 1 | 1989-11-21 |
Method for formation of insulation film on silicon buried in trench Grant 4,873,203 - Kaga , et al. October 10, 1 | 1989-10-10 |
Static random-access memory having multilevel conductive layer Grant 4,853,894 - Yamanaka , et al. August 1, 1 | 1989-08-01 |
Dram with FET stacked over capacitor Grant 4,751,557 - Sunami , et al. June 14, 1 | 1988-06-14 |
Gas for selectively etching silicon nitride and process for selectively etching silicon nitride with the gas Grant 4,529,476 - Kawamoto , et al. July 16, 1 | 1985-07-16 |
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