| Patent | Date |
|---|
Quality evaluation method for laminate having protective layer on surface of oxide semiconductor thin film and quality control method for oxide semiconductor thin film
Grant 10,203,367 - Hayashi , et al. Feb | 2019-02-12 |
Method for evaluating oxide semiconductor thin film, method for managing quality of oxide semiconductor thin film, and evaluation element and evaluation device used in above evaluation method
Grant 9,816,944 - Hayashi , et al. November 14, 2 | 2017-11-14 |
Method for evaluating quality of oxide semiconductor thin film and laminated body having protective film on surface of oxide semiconductor thin film, and method for managing quality of oxide semiconductor thin film
Grant 9,780,005 - Kawakami , et al. October 3, 2 | 2017-10-03 |
Method For Evaluating Quality Of Oxide Semiconductor Thin Film And Laminated Body Having Protective Film On Surface Of Oxide Semiconductor Thin Film, And Method For Managing Quality Of Oxide Semiconductor Thin Film
App 20170194218 - KAWAKAMI; Nobuyuki ; et al. | 2017-07-06 |
Quality Evaluation Method For Laminate Having Protective Layer On Surface Of Oxide Semiconductor Thin Film And Quality Control Method For Oxide Semiconductor Thin Film
App 20170184660 - HAYASHI; Kazushi ; et al. | 2017-06-29 |
Method For Evaluating Oxide Semiconductor Thin Film, Method For Managing Quality Of Oxide Semiconductor Thin Film, And Evaluation Element And Evaluation Device Used In Above Evaluation Method
App 20160282284 - HAYASHI; Kazushi ; et al. | 2016-09-29 |
Electrical Contact Member And Inspection Connection Device
App 20150301081 - HIRANO; Takayuki ; et al. | 2015-10-22 |
Al alloy film for display device, display device, and sputtering target
Grant 8,786,090 - Gotou , et al. July 22, 2 | 2014-07-22 |
Wiring structure, thin film transistor substrate, method for manufacturing thin film transistor substrate, and display device
Grant 8,535,997 - Kawakami , et al. September 17, 2 | 2013-09-17 |
Interconnection structure, a thin film transistor substrate, and a manufacturing method thereof, as well as a display device
Grant 8,299,614 - Kawakami , et al. October 30, 2 | 2012-10-30 |
Thin film transistor substrate and display device
Grant 8,217,397 - Ochi , et al. July 10, 2 | 2012-07-10 |
Al-Ni-La-Si system Al-based alloy sputtering target and process for producing the same
Grant 8,163,143 - Takagi , et al. April 24, 2 | 2012-04-24 |
Membrane structure element and method for manufacturing same
Grant 8,057,882 - Hirano , et al. November 15, 2 | 2011-11-15 |
Layered structure and its manufacturing method
Grant 8,053,083 - Gotou , et al. November 8, 2 | 2011-11-08 |
Organic El Display Device Reflective Anode And Method For Manufacturing The Same
App 20110248272 - Ochi; Mototaka ; et al. | 2011-10-13 |
Wiring Structure, Thin Film Transistor Substrate, Method For Manufacturing Thin Film Transistor Substrate, And Display Device
App 20110121297 - Kawakami; Nobuyuki ; et al. | 2011-05-26 |
Interconnection Structure, A Thin Film Transistor Substrate, And A Manufacturing Method Thereof, As Well As A Display Device
App 20110024761 - Kawakami; Nobuyuki ; et al. | 2011-02-03 |
Thin Film Transistor Substrate And Display Device
App 20100295053 - Ochi; Mototaka ; et al. | 2010-11-25 |
Thin film transistor substrate and display device
Grant 7,781,767 - Kawakami , et al. August 24, 2 | 2010-08-24 |
Al Alloy Film For Display Device,display Device, And Sputtering Target
App 20100065847 - Gotou; Hiroshi ; et al. | 2010-03-18 |
Membrane Structure Element and Method for Manufacturing Same
App 20090176064 - Hirano; Takayuki ; et al. | 2009-07-09 |
Al-ni-la-si System Al-based Alloy Sputtering Target And Process For Producing The Same
App 20090026072 - Takagi; Katsutoshi ; et al. | 2009-01-29 |
Dielectric line and production method therefor
App 20090017255 - Maruyama; Masakatsu ; et al. | 2009-01-15 |
Layered Structure And Its Manufacturing Method
App 20090004490 - GOTOU; Hiroshi ; et al. | 2009-01-01 |
Dielectric line and production method therefor
Grant 7,432,038 - Maruyama , et al. October 7, 2 | 2008-10-07 |
Source/drain electrodes, thin-film transistor substrates, manufacture methods thereof, and display devices
Grant 7,411,298 - Kawakami , et al. August 12, 2 | 2008-08-12 |
Thin Film Transistor Substrate And Display Device
App 20070278497 - KAWAKAMI; Nobuyuki ; et al. | 2007-12-06 |
Feed antenna including dielectric waveguide
Grant 7,209,088 - Maruyama , et al. April 24, 2 | 2007-04-24 |
Porous substrate with smooth surface and production method thereof
App 20070077409 - Hirano; Takayuki ; et al. | 2007-04-05 |
Ultraviolet sensor and method for manufacturing the same
Grant 7,193,241 - Hayashi , et al. March 20, 2 | 2007-03-20 |
Source/drain electrodes, thin-film transistor substrates, manufacture methods thereof, and display devices
App 20070040172 - Kawakami; Nobuyuki ; et al. | 2007-02-22 |
Heat spreader and semiconductor device and package using the same
Grant 7,067,903 - Tachibana , et al. June 27, 2 | 2006-06-27 |
Diamond semiconductor device and method for manufacturing the same
Grant 7,064,352 - Yokota , et al. June 20, 2 | 2006-06-20 |
Dielectric line and production method therefor
App 20060102937 - Maruyama; Masakatsu ; et al. | 2006-05-18 |
Method for forming porous film and porous film formed by the method
App 20060051970 - Kawakami; Nobuyuki ; et al. | 2006-03-09 |
Feed antenna including dielectric waveguide
App 20060050003 - Maruyama; Masakatsu ; et al. | 2006-03-09 |
Diamond sensor
App 20060001029 - Hayashi; Kazushi ; et al. | 2006-01-05 |
Ultraviolet sensor and method for manufacturing the same
App 20050181122 - Hayashi, Kazushi ; et al. | 2005-08-18 |
Diamond semiconductor device and method for manufacturing the same
App 20050127373 - Yokota, Yoshihiro ; et al. | 2005-06-16 |
Method for producing porous material
App 20050119360 - Kawakami, Nobuyuki ; et al. | 2005-06-02 |
Fine structure composite and drying method of fine structure using the same
App 20050051930 - Kawakami, Nobuyuki ; et al. | 2005-03-10 |
Heat spreader and semiconductor device and package using the same
App 20040238946 - Tachibana, Takeshi ; et al. | 2004-12-02 |
Method for drying microstructure member
Grant 6,804,900 - Kawakami , et al. October 19, 2 | 2004-10-19 |
Process and apparatus for removing residues from the microstructure of an object
App 20040198627 - Masuda, Kaoru ; et al. | 2004-10-07 |
Method of forming buried wiring
Grant 6,777,321 - Nogami , et al. August 17, 2 | 2004-08-17 |
Method and system for processing substrate
Grant 6,703,316 - Inoue , et al. March 9, 2 | 2004-03-09 |
Method for drying microstructure member
App 20040038532 - Kawakami, Nobuyuki ; et al. | 2004-02-26 |
Fine structure composite and drying method of fine structure using the same
App 20040038060 - Kawakami, Nobuyuki ; et al. | 2004-02-26 |
Process for drying an object having microstructure and the object obtained by the same
App 20030183251 - Kawakami, Nobuyuki ; et al. | 2003-10-02 |
Process and apparatus for removing residues from the microstructure of an object
App 20030106573 - Masuda, Kaoru ; et al. | 2003-06-12 |
Method of forming buried wiring, and apparatus for processing substratum
App 20030072888 - Nogami, Takeshi ; et al. | 2003-04-17 |
Process for drying an object having microstructure and the object obtained by the same
App 20020184788 - Kawakami, Nobuyuki ; et al. | 2002-12-12 |
Process and apparatus for removing residues from the microstructure of an object
App 20020164873 - Masuda, Kaoru ; et al. | 2002-11-07 |
Method and system for processing substrate
App 20020160625 - Inoue, Yoichi ; et al. | 2002-10-31 |
Method and apparatus for making aerogel film
Grant 6,364,953 - Kawakami , et al. April 2, 2 | 2002-04-02 |
| 