Kawakami; Eigo
Patent Applications and Registrations
Patent applications and USPTO patent grants for Kawakami; Eigo.The latest application filed is for "pattern transferring apparatus and pattern transferring method".
Company Profile
2.49.29
- Kawakami; Eigo - Utsunomiya N/A JP
- KAWAKAMI; Eigo - Utsunomiya-shi JP
- - Utsunomiya JP
- Kawakami; Eigo - Utsunomiyua JP
- Kawakami; Eigo - Tochigi JP
- Kawakami; Eigo - Tochigi-ken JP
- Kawakami; Eigo - Utsunomiyua-shi JP
- Kawakami, Eigo - Utsunomiya-shi Tochigi-Ken JP
- Kawakami; Eigo - Ebina JP
- Kawakami; Eigo - Atsugi JP
- Kawakami; Eigo - Kawasaki JP
Patent Activity
| Patent | Date |
|---|---|
| Transfer apparatus and method of manufacturing device Grant 9,188,854 - Kawakami November 17, 2 | 2015-11-17 |
| Imprinting apparatus and method therefor Grant 9,039,402 - Kawakami , et al. May 26, 2 | 2015-05-26 |
| Imprinting machine and device manufacturing method Grant 8,834,144 - Nakamura , et al. September 16, 2 | 2014-09-16 |
| Imprint apparatus and article manufacturing method Grant 8,770,964 - Kawakami July 8, 2 | 2014-07-08 |
| Pattern Transferring Apparatus And Pattern Transferring Method App 20140151936 - KASUMI; Kazuyuki ; et al. | 2014-06-05 |
| Imprint apparatus and method of manufacturing article Grant 8,734,701 - Kawakami May 27, 2 | 2014-05-27 |
| Pattern transferring apparatus and pattern transferring method Grant 08616874 - | 2013-12-31 |
| Pattern transferring apparatus and pattern transferring method Grant 8,616,874 - Kasumi , et al. December 31, 2 | 2013-12-31 |
| Imprint apparatus and article manufacturing method Grant 8,414,279 - Kawakami , et al. April 9, 2 | 2013-04-09 |
| Imprint apparatus and method of manufacturing article Grant 8,404,169 - Kawakami , et al. March 26, 2 | 2013-03-26 |
| Processing apparatus Grant 8,393,885 - Kasumi , et al. March 12, 2 | 2013-03-12 |
| Transfer apparatus and method of manufacturing device Grant 8,226,392 - Kawakami July 24, 2 | 2012-07-24 |
| Transfer Apparatus And Method Of Manufacturing Device App 20110316193 - Kawakami; Eigo | 2011-12-29 |
| Imprint Apparatus And Article Manufacturing Method App 20110169181 - KAWAKAMI; Eigo | 2011-07-14 |
| Imprint Apparatus And Method Of Manufacturing Article App 20100314798 - Kawakami; Eigo | 2010-12-16 |
| Processing apparatus and method Grant 7,846,346 - Kawakami , et al. December 7, 2 | 2010-12-07 |
| Processing Apparatus And Method App 20100289190 - Kawakami; Eigo ; et al. | 2010-11-18 |
| Imprinting machine and device manufacturing method Grant 7,815,424 - Nakamura , et al. October 19, 2 | 2010-10-19 |
| Processing apparatus Grant 7,815,425 - Tokita , et al. October 19, 2 | 2010-10-19 |
| Processing method Grant 7,807,065 - Tokita , et al. October 5, 2 | 2010-10-05 |
| Processing apparatus and method Grant 7,789,647 - Kawakami , et al. September 7, 2 | 2010-09-07 |
| Processing apparatus and device manufacturing method Grant 7,785,091 - Kasumi , et al. August 31, 2 | 2010-08-31 |
| Imprinting Machine And Device Manufacturing Method App 20100148397 - NAKAMURA; Takashi ; et al. | 2010-06-17 |
| Exposure apparatus and device manufacturing method Grant 7,719,659 - Kawakami May 18, 2 | 2010-05-18 |
| Pattern transferring mold, pattern transferring apparatus and device manufacturing method using the same Grant 7,690,912 - Tokita , et al. April 6, 2 | 2010-04-06 |
| Imprint Apparatus And Method Of Manufacturing Article App 20100078840 - Kawakami; Eigo ; et al. | 2010-04-01 |
| Imprint Apparatus And Article Manufacturing Method App 20100072649 - Kawakami; Eigo ; et al. | 2010-03-25 |
| Imprint Apparatus And Method Of Manufacturing Article App 20100072664 - Kawakami; Eigo ; et al. | 2010-03-25 |
| Imprinting Method App 20100072667 - Kawakami; Eigo ; et al. | 2010-03-25 |
| Imprinting Apparatus And Method Therefor App 20100072653 - Kawakami; Eigo ; et al. | 2010-03-25 |
| Processing method and system Grant 7,649,184 - Kawakami January 19, 2 | 2010-01-19 |
| Transfer Apparatus And Method Of Manufacturing Device App 20090295006 - Kawakami; Eigo | 2009-12-03 |
| Processing Apparatus App 20080254626 - KASUMI; Kazuyuki ; et al. | 2008-10-16 |
| Exposure Apparatus And Device Manufacturing Method App 20080186463 - KAWAKAMI; EIGO | 2008-08-07 |
| Processing apparatus Grant 7,381,272 - Kasumi , et al. June 3, 2 | 2008-06-03 |
| Exposure apparatus and device manufacturing method Grant 7,382,434 - Kawakami June 3, 2 | 2008-06-03 |
| Processing Apparatus And Device Manufacturing Method App 20080093339 - Kasumi; Kazuyuki ; et al. | 2008-04-24 |
| Exposure apparatus and device manufacturing method Grant 7,236,231 - Nakamura , et al. June 26, 2 | 2007-06-26 |
| Exposure apparatus, device manufacturing method, pattern generator and maintenance method to check for pixel deterioration Grant 7,233,383 - Tokita , et al. June 19, 2 | 2007-06-19 |
| Processing Method App 20070132157 - Tokita; Toshinobu ; et al. | 2007-06-14 |
| Fine pattern forming apparatus and fine pattern inspecting apparatus Grant 7,196,321 - Kawakami , et al. March 27, 2 | 2007-03-27 |
| Exposure apparatus and device manufacturing method Grant 7,180,575 - Kasumi , et al. February 20, 2 | 2007-02-20 |
| Pattern transferring apparatus and pattern transferring method App 20060192928 - Kasumi; Kazuyuki ; et al. | 2006-08-31 |
| Pattern transferring mold, pattern transferring apparatus and device manufacturing method using the same App 20060192320 - Tokita; Toshinobu ; et al. | 2006-08-31 |
| Imprinting machine and device manufacturing method App 20060157444 - Nakamura; Takashi ; et al. | 2006-07-20 |
| Exposure apparatus and device manufacturing method App 20060087635 - Kazumi; Kazuyuki ; et al. | 2006-04-27 |
| Positioning apparatus, atmosphere substituting method, exposure apparatus, and device manufacturing method Grant 6,990,173 - Kawakami , et al. January 24, 2 | 2006-01-24 |
| Processing apparatus and method App 20050275125 - Kawakami, Eigo ; et al. | 2005-12-15 |
| Fine pattern forming apparatus and fine pattern inspecting apparatus App 20050269035 - Kawakami, Eigo ; et al. | 2005-12-08 |
| Exposure apparatus, and method, device manufacturing method, pattern generator and maintenance method App 20050248659 - Kasumi, Kazuyuki ; et al. | 2005-11-10 |
| Exposure apparatus, device manufacturing method, pattern generator and maintenance method App 20050237375 - Tokita, Toshinobu ; et al. | 2005-10-27 |
| Processing apparatus App 20050230346 - Kasumi, Kazuyuki ; et al. | 2005-10-20 |
| Exposure apparatus and device manufacturing method App 20050219485 - Nakamura, Takashi ; et al. | 2005-10-06 |
| Processing apparatus App 20050212156 - Tokita, Toshinobu ; et al. | 2005-09-29 |
| Exposure apparatus and device manufacturing method App 20050146695 - Kawakami, Eigo | 2005-07-07 |
| Processing method and system App 20040222383 - Kawakami, Eigo | 2004-11-11 |
| Microprobe, preparation thereof and electronic device by use of said microprobe Grant 5,994,698 - Kawade , et al. November 30, 1 | 1999-11-30 |
| Two scanning probes information recording/reproducing system with one probe to detect atomic reference location on a recording medium Grant 5,721,721 - Yanagisawa , et al. February 24, 1 | 1998-02-24 |
| Substrate conveying device and method of controlling the same Grant 5,641,264 - Kuno , et al. June 24, 1 | 1997-06-24 |
| Encoder for controlling measurements in the range of a few angstroms Grant 5,519,686 - Yanagisawa , et al. May 21, 1 | 1996-05-21 |
| Exposure method Grant 5,443,932 - Ohta , et al. August 22, 1 | 1995-08-22 |
| Conveying apparatus and method of controlling the same Grant 5,226,523 - Kawakami , et al. July 13, 1 | 1993-07-13 |
| Exposure apparatus for controlling intensity of exposure radiation Grant 5,157,700 - Kurosawa , et al. October 20, 1 | 1992-10-20 |
| Microprobe preparation thereof and electronic device by use of said microprobe Grant 5,072,116 - Kawade , et al. December 10, 1 | 1991-12-10 |
| Process for producing optical element Grant 4,985,186 - Nose , et al. January 15, 1 | 1991-01-15 |
| Variable-focus optical element and focus detecting device utilizing the same Grant 4,802,746 - Baba , et al. February 7, 1 | 1989-02-07 |
| Image stabilizing device Grant 4,788,596 - Kawakami , et al. November 29, 1 | 1988-11-29 |
| Anti-vibration imaging device Grant 4,780,739 - Kawakami , et al. October 25, 1 | 1988-10-25 |
| Optical device Grant 4,685,766 - Nishimura , et al. August 11, 1 | 1987-08-11 |
| Optical display utilizing thermally formed bubble in a liquid core waveguide Grant 4,640,592 - Nishimura , et al. February 3, 1 | 1987-02-03 |
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