loadpatents
Patent applications and USPTO patent grants for Kawai; Jiro.The latest application filed is for "electrostatic chuck and semiconductor-liquid crystal manufacturing apparatus".
Patent | Date |
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Electrostatic chuck and semiconductor-liquid crystal manufacturing apparatus Grant 10,147,628 - Shiraiwa , et al. De | 2018-12-04 |
Electrostatic chuck and semiconductor-liquid crystal manufacturing apparatus Grant 9,887,117 - Katayama , et al. February 6, 2 | 2018-02-06 |
Electrostatic chuck and method for manufacturing the electrostatic chuck Grant 9,660,557 - Shiraiwa , et al. May 23, 2 | 2017-05-23 |
Electrostatic chuck apparatus Grant 9,252,039 - Shiraiwa , et al. February 2, 2 | 2016-02-02 |
Electrostatic chuck Grant 9,240,340 - Shiraiwa , et al. January 19, 2 | 2016-01-19 |
Electrostatic Chuck And Semiconductor-liquid Crystal Manufacturing Apparatus App 20150348814 - SHIRAIWA; Norio ;   et al. | 2015-12-03 |
Electrostatic Chuck And Semiconductor-liquid Crystal Manufacturing Apparatus App 20150340261 - KATAYAMA; Yoshifumi ;   et al. | 2015-11-26 |
Electrostatic Chuck Apparatus App 20140254061 - SHIRAIWA; Norio ;   et al. | 2014-09-11 |
Electrostatic Chuck And Method For Manufacturing The Electrostatic Chuck App 20130308244 - SHIRAIWA; Norio ;   et al. | 2013-11-21 |
Electrostatic Chuck App 20130286531 - Shiraiwa; Norio ;   et al. | 2013-10-31 |
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