Patent | Date |
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Chemical mechanical polishing aqueous dispersion and chemical mechanical polishing method Grant 7,550,020 - Ikeda , et al. June 23, 2 | 2009-06-23 |
Cleaning composition, method for cleaning semiconductor substrate, and process for manufacturing semiconductor device Grant 7,498,294 - Konno , et al. March 3, 2 | 2009-03-03 |
Chemical Mechanical Polishing Agent Kit And Chemical Mechanical Polishing Method Using The Same App 20080274620 - SHIDA; Hirotaka ;   et al. | 2008-11-06 |
Chemical mechanical polishing pad Grant 7,442,116 - Miyauchi , et al. October 28, 2 | 2008-10-28 |
Chemical mechanical polishing aqueous dispersion and chemical mechanical polishing method Grant 7,378,349 - Konno , et al. May 27, 2 | 2008-05-27 |
Polishing pad for semiconductor wafer, polishing multilayered body for semiconductor wafer having same, and method for polishing semiconductor wafer Grant 7,323,415 - Shiho , et al. January 29, 2 | 2008-01-29 |
Chemical mechanical polishing aqueous dispersion and chemical mechanical polishing method Grant 7,252,782 - Ikeda , et al. August 7, 2 | 2007-08-07 |
Process for chemical mechanical polishing of semiconductor substrate and aqueous dispersion for chemical mechanical polishing Grant 7,183,211 - Konno , et al. February 27, 2 | 2007-02-27 |
Chemical mechanical polishing pad and chemical mechanical polishing method Grant 7,183,213 - Shiho , et al. February 27, 2 | 2007-02-27 |
Chemical/mechanical polishing method for STI Grant 7,163,448 - Hattori , et al. January 16, 2 | 2007-01-16 |
Method of chemical mechanical polishing Grant 7,153,369 - Motonari , et al. December 26, 2 | 2006-12-26 |
Chemical mechanical polishing aqueous dispersion, chemical mechanical polishing method, and kit for preparing chemical mechanical polishing aqueous dispersion App 20060276041 - Uchikura; Kazuhito ;   et al. | 2006-12-07 |
Chemical mechanical polishing aqueous dispersion, chemical mechanical polishing method, and kit for preparing chemical mechanical polishing aqueous dispersion App 20060201914 - Uchikura; Kazuhito ;   et al. | 2006-09-14 |
Aqueous dispersion for chemical/mechanical polishing Grant 7,090,786 - Hattori , et al. August 15, 2 | 2006-08-15 |
Aqueous dispersion for chemical mechanical polishing Grant 7,087,530 - Motonari , et al. August 8, 2 | 2006-08-08 |
Composition for polishing pad and polishing pad using the same Grant 7,077,879 - Ogawa , et al. July 18, 2 | 2006-07-18 |
Polishing pad for semiconductor wafer and laminated body for polishing of semiconductor wafer equipped with the same as well as method for polishing of semiconductor wafer App 20060128271 - Shiho; Hiroshi ;   et al. | 2006-06-15 |
Aqueous dispersion for chemical mechanical polishing, chemical mechanical polishing process, production process of semiconductor device and material for preparing an aqueous dispersion for chemical mechanical polishing Grant 7,005,382 - Nishimoto , et al. February 28, 2 | 2006-02-28 |
Polishing pad Grant 6,992,123 - Shiho , et al. January 31, 2 | 2006-01-31 |
Chemical mechanical polishing aqueous dispersion and chemical mechanical polishing method App 20060010781 - Ikeda; Norihiko ;   et al. | 2006-01-19 |
Cleaning composition for semiconductor components and process for manufacturing semiconductor device App 20050284844 - Hattori, Masayuki ;   et al. | 2005-12-29 |
Polishing pad Grant 6,976,910 - Hosaka , et al. December 20, 2 | 2005-12-20 |
Chemical mechanical polishing pad, manufacturing process thereof and chemical mechanical polishing method for semiconductor wafers App 20050245171 - Hosaka, Yukio ;   et al. | 2005-11-03 |
Chemical mechanical polishing pad, manufacturing process thereof and chemical mechanical polishing method App 20050239380 - Hosaka, Yukio ;   et al. | 2005-10-27 |
Chemical mechanical polishing aqueous dispersion and chemical mechanical polishing method App 20050227451 - Konno, Tomohisa ;   et al. | 2005-10-13 |
Chemical mechanical polishing pad, production method thereof, and chemical mechanical polishing process App 20050222336 - Okamoto, Takahiro ;   et al. | 2005-10-06 |
Chemical mechanical polishing aqueous dispersion and chemical mechanical polishing method Grant 6,935,928 - Uchikura , et al. August 30, 2 | 2005-08-30 |
Cleaning composition, method for cleaning semiconductor substrate, and process for manufacturing semiconductor device App 20050176606 - Konno, Tomohisa ;   et al. | 2005-08-11 |
Slurry for chemical mechanical polishing and method of manufacturing semiconductor device Grant 6,924,227 - Minamihaba , et al. August 2, 2 | 2005-08-02 |
Chemical mechanical polishing aqueous dispersion and chemical mechanical polishing method App 20050164510 - Ikeda, Norihiko ;   et al. | 2005-07-28 |
Chemical mechanical polishing pad App 20050113011 - Miyauchi, Hiroyuki ;   et al. | 2005-05-26 |
Chemical mechanical polishing aqueous dispersion and chemical mechanical polishing method App 20050037693 - Uchikura, Kazuhito ;   et al. | 2005-02-17 |
Chemical mechanical polishing pad and chemical mechanical polishing method App 20050014376 - Shiho, Hiroshi ;   et al. | 2005-01-20 |
Aqueous dispersion for chemical/mechanical polishing App 20050001199 - Hattori, Masayuki ;   et al. | 2005-01-06 |
Polishing pad App 20050003749 - Hosaka, Yukio ;   et al. | 2005-01-06 |
Method of machining semiconductor wafer-use polishing pad and semiconductor wafer-use polishing pad App 20040266326 - Shiho, Hiroshi ;   et al. | 2004-12-30 |
Window member for chemical mechanical polishing and polishing pad Grant 6,832,949 - Konno , et al. December 21, 2 | 2004-12-21 |
Composition for polishing pad and polishing pad using the same App 20040244299 - Ogawa, Toshihiro ;   et al. | 2004-12-09 |
Chemical mechanical polishing agent kit and chemical mechanical polishing method using the same App 20040237413 - Shida, Hirotaka ;   et al. | 2004-12-02 |
Chemical/mechanical polishing method for STI App 20040235396 - Hattori, Masayuki ;   et al. | 2004-11-25 |
Polishing pad and chemical mechanical polishing method App 20040224616 - Shiho, Hiroshi ;   et al. | 2004-11-11 |
Polishing pad and method of polishing a semiconductor wafer App 20040224611 - Aoi, Hiromi ;   et al. | 2004-11-11 |
Abrasive pad, method and metal mold for manufacturing the same, and semiconductor wafer polishing method App 20040203320 - Hosaka, Yukio ;   et al. | 2004-10-14 |
Composition for polishing pad and polishing pad using the same Grant 6,790,883 - Ogawa , et al. September 14, 2 | 2004-09-14 |
Aqueous dispersion for chemical mechanical polishing Grant 6,786,944 - Hattori , et al. September 7, 2 | 2004-09-07 |
Aqueous dispersion for chemical mechanical polishing and production process of semiconductor device App 20040162011 - Konno, Tomohisa ;   et al. | 2004-08-19 |
Aqueous dispersion for chemical mechanical polishing App 20040144755 - Motonari, Masayuki ;   et al. | 2004-07-29 |
Aqueous dispersion for chemical mechanical polishing, chemical mechanical polishing process, production process of semiconductor device and material for preparing an aqueous dispersion for chemical mechanical polishing App 20040132305 - Nishimoto, Kazuo ;   et al. | 2004-07-08 |
Polishing pad App 20040118051 - Shiho, Hiroshi ;   et al. | 2004-06-24 |
Composition for washing a polishing pad and method for washing a polishing pad Grant 6,740,629 - Ando , et al. May 25, 2 | 2004-05-25 |
Composition for polishing pad and polishing pad therewith App 20040063391 - Hosaka, Yukio ;   et al. | 2004-04-01 |
Polishing pad and multi-layer polishing pad App 20040014413 - Kawahashi, Nobuo ;   et al. | 2004-01-22 |
Aqueous dispersion for chemical mechanical polishing used for polishing of copper Grant 6,653,267 - Yano , et al. November 25, 2 | 2003-11-25 |
Aqueous dispersion for chemical mechanical polishing App 20030196386 - Hattori, Masayuki ;   et al. | 2003-10-23 |
Process for chemical mechanical polishing of semiconductor substrate and aqueous dispersion for chemical mechanical polishing App 20030153183 - Konno, Tomohisa ;   et al. | 2003-08-14 |
Window member for chemical mechanical polishing and polishing pad App 20030129931 - Konno, Tomohisa ;   et al. | 2003-07-10 |
Aqueous dispersion for chemical mechanical polishing Grant 6,559,056 - Hattori , et al. May 6, 2 | 2003-05-06 |
Aqueous dispersion for chemical mechanical polishing Grant 6,527,818 - Hattori , et al. March 4, 2 | 2003-03-04 |
Composition for washing a polishing pad and method for washing a polishing pad App 20030004085 - Ando, Michiaki ;   et al. | 2003-01-02 |
Method of chemical mechanical polishing App 20020193451 - Motonari, Masayuki ;   et al. | 2002-12-19 |
Slurry for chemical mechanical polishing and method of manufacturing semiconductor device App 20020023389 - Minamihaba, Gaku ;   et al. | 2002-02-28 |
Aqueous dispersion for chemical mechanical polishing used for polishing of copper App 20020016275 - Yano, Hiroyuki ;   et al. | 2002-02-07 |
Aqueous dispersion for chemical mechanical polishing App 20020011031 - Hattori, Masayuki ;   et al. | 2002-01-31 |
Composition for polishing pad and polishing pad using the same App 20020010232 - Ogawa, Toshihiro ;   et al. | 2002-01-24 |
Aqueous dispersion for chemical mechanical polishing App 20020005017 - Motonari, Masayuki ;   et al. | 2002-01-17 |
Aqueous dispersion for chemical mechanical polishing App 20010049912 - Motonari, Masayuki ;   et al. | 2001-12-13 |
Aqueous dispersion for chemical mechanical polishing App 20010039766 - Hattori, Masayuki ;   et al. | 2001-11-15 |
Aqueous dispersion for chemical mechanical polishing and chemical mechanical polishing process App 20010008828 - Uchikura, Kazuhito ;   et al. | 2001-07-19 |
Process for producing a polyorganosiloxane-based thermoplastic resin Grant 5,773,532 - Okaniwa , et al. June 30, 1 | 1998-06-30 |
Coated particles, hollow particles, and process for manufacturing the same Grant 5,318,797 - Matijevic , et al. June 7, 1 | 1994-06-07 |