KAWAGUCHI; Mark

Patent Applications and Registrations

Patent applications and USPTO patent grants for KAWAGUCHI; Mark.The latest application filed is for "substrate processing system including dual ion filter for downstream plasma".

Company Profile

2.12.16

KAWAGUCHI; Mark - San Carlos CA
KAWAGUCHI; Mark - San Ccarlos CA
Kawaguchi; Mark - Sunnyvale CA
Kawaguchi; Mark - San Jose CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Substrate Processing System Including Dual Ion Filter For Downstream Plasma App 20220076924 - BRAVO; Andrew Stratton ; et al.	2022-03-10
Efficient Cleaning And Etching Of High Aspect Ratio Structures App 20210249274 - ZHU; Ji ; et al.	2021-08-12
In situ vapor deposition polymerization to form polymers as precursors to viscoelastic fluids for particle removal from substrates Grant 11,065,654 - Kawaguchi , et al. July 20, 2	2021-07-20
Systems And Methods For Plasma-less De-halogenation App 20190051540 - Zhu; Ji ; et al.	2019-02-14
In Situ Vapor Deposition Polymerization To Form Polymers As Precursors To Viscoelastic Fluids For Particle Removal From Substrates App 20190015878 - KAWAGUCHI; Mark ; et al.	2019-01-17
Ultrahigh Selective Nitride Etch To Form Finfet Devices App 20180269070 - Eason; Kwame ; et al.	2018-09-20
Method for substrate cleaning including movement of substrate below substrate cleaning module Grant 8,900,374 - Lin , et al. December 2, 2	2014-12-02
Method of particle contaminant removal Grant 8,828,145 - Sabba , et al. September 9, 2	2014-09-09
Multi-stage substrate cleaning method and apparatus Grant 8,757,177 - Kholodenko , et al. June 24, 2	2014-06-24
System And Method For Monitoring Wafer Stress App 20140083463 - Valcore; John ; et al.	2014-03-27
Multi-stage Substrate Cleaning Method And Apparatus App 20130068261 - Kholodenko; Arnold ; et al.	2013-03-21
Multi-stage substrate cleaning method and apparatus Grant 8,317,934 - Kholodenko , et al. November 27, 2	2012-11-27
System and method for monitoring wafer stress Grant 8,293,023 - Valcore , et al. October 23, 2	2012-10-23
Method for controlling corrosion of a substrate Grant 8,101,025 - Lim , et al. January 24, 2	2012-01-24
System And Method For Monitoring Wafer Stress App 20110094538 - Valcore; John ; et al.	2011-04-28
Apparatus and System for Cleaning Substrate App 20110048467 - Lin; Cheng-Yu (Sean) ; et al.	2011-03-03
Apparatus and system for cleaning substrate Grant 7,849,554 - Lin , et al. December 14, 2	2010-12-14
Multi-Stage Substrate Cleaning Method and Apparatus App 20100288311 - Kholodenko; Arnold ; et al.	2010-11-18
Apparatus And System For Cleaning Substrate App 20100269285 - Lin; Cheng-Yu (Sean) ; et al.	2010-10-28
Method of Particle Contaminant Removal App 20100229890 - Sabba; Yizhak T. ; et al.	2010-09-16
Method for controlling corrosion of a substrate App 20060137710 - Lim; Eu Jin ; et al.	2006-06-29
Substrate cleaning apparatus and method Grant 6,692,903 - Chen , et al. February 17, 2	2004-02-17
Substrate cleaning apparatus and method App 20020072016 - Chen, Haojiang ; et al.	2002-06-13

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