KAWADA; Yuki

Patent Applications and Registrations

Patent applications and USPTO patent grants for KAWADA; Yuki.The latest application filed is for "substrate support, plasma processing system, and plasma etching method".

Company Profile

9.4.8

KAWADA; Yuki - Miyagi JP
KAWADA; Yuki - Kurokawa-gun JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Substrate Support, Plasma Processing System, And Plasma Etching Method App 20220270862 - HAYASAKA; Naoto ; et al.	2022-08-25
Antenna device, radiation method of electromagnetic waves, plasma processing apparatus, and plasma processing method Grant 10,896,811 - Ito , et al. January 19, 2	2021-01-19
Antenna, plasma processing device and plasma processing method Grant 10,832,892 - Takahashi , et al. November 10, 2	2020-11-10
Antenna and plasma processing apparatus Grant 10,825,658 - Kawada , et al. November 3, 2	2020-11-03
Antenna Device, Radiation Method Of Electromagnetic Waves, Plasma Processing Apparatus, And Plasma Processing Method App 20200075292 - ITO; Ayako ; et al.	2020-03-05
Antenna, Plasma Processing Device And Plasma Processing Method App 20200058468 - TAKAHASHI; Kazuki ; et al.	2020-02-20
Antenna device and plasma processing apparatus Grant 10,553,402 - Kawada , et al. Fe	2020-02-04
Antenna Device And Plasma Processing Apparatus App 20190333736 - KAWADA; Yuki ; et al.	2019-10-31
Antenna Device And Plasma Processing Apparatus App 20190279845 - MATSUMOTO; Naoki ; et al.	2019-09-12
Microwave Output Device And Plasma Processing Apparatus App 20190267216 - KANEKO; Kazushi ; et al.	2019-08-29
Microwave Output Device And Plasma Processing Apparatus App 20190244789 - KANEKO; Kazushi ; et al.	2019-08-08
Antenna And Plasma Processing Apparatus App 20180374678 - KAWADA; Yuki ; et al.	2018-12-27

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