| Patent | Date |
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Pattern Shape Evaluation Device, Pattern Shape Evaluation System, And Pattern Shape Evaluation Method
App 20220034653 - Shintani; Atsuko ; et al. | 2022-02-03 |
Water-absorbing resin composition
Grant 10,961,358 - Iwamura , et al. March 30, 2 | 2021-03-30 |
Absorption Agent And Absorbent Article
App 20200398253 - KAWADA; Hiroki ; et al. | 2020-12-24 |
Pattern measurement method and pattern measurement device
Grant 10,816,333 - Kawada October 27, 2 | 2020-10-27 |
Pattern measuring method and pattern measuring apparatus
Grant 10,665,424 - Kawada , et al. | 2020-05-26 |
Particulate water absorbing agent
Grant 10,562,006 - Torii , et al. Feb | 2020-02-18 |
Water-absorbing Resin Composition
App 20190338082 - IWAMURA; Taku ; et al. | 2019-11-07 |
Measurement device, calibration method of measurement device, and calibration member
Grant 10,438,771 - Hatano , et al. O | 2019-10-08 |
Pattern height measurement device and charged particle beam device
Grant 10,393,509 - Kawada , et al. A | 2019-08-27 |
Pattern Measurement Method and Pattern Measurement Device
App 20190170509 - KAWADA; Hiroki | 2019-06-06 |
Particulate Water Absorbing Agent
App 20190111411 - TORII; Kazushi ; et al. | 2019-04-18 |
Pattern Measuring Method and Pattern Measuring Apparatus
App 20190066973 - KAWADA; Hiroki ; et al. | 2019-02-28 |
Pattern measurement method and pattern measurement device
Grant 10,184,790 - Kawada , et al. Ja | 2019-01-22 |
Height measurement device and charged particle beam device
Grant 10,101,150 - Kawada , et al. October 16, 2 | 2018-10-16 |
Measurement system and measurement method
Grant 10,002,743 - Hotta , et al. June 19, 2 | 2018-06-19 |
Control device, charged particle beam apparatus, program and method for producing processed product
Grant 9,934,940 - Tomimatsu , et al. April 3, 2 | 2018-04-03 |
Height Measurement Device and Charged Particle Beam Device
App 20170343340 - KAWADA; Hiroki ; et al. | 2017-11-30 |
Method for estimating shape before shrink and CD-SEM apparatus
Grant 9,830,524 - Sekiguchi , et al. November 28, 2 | 2017-11-28 |
Charged particle beam device and inspection device
Grant 9,824,938 - Yamaguchi , et al. November 21, 2 | 2017-11-21 |
Control Device, Charged Particle Beam Apparatus, Program And Method For Producing Processed Product
App 20170278673 - Tomimatsu; Satoshi ; et al. | 2017-09-28 |
Pattern Height Measurement Device and Charged Particle Beam Device
App 20170211929 - KAWADA; Hiroki ; et al. | 2017-07-27 |
Image processing device, charged particle beam device, charged particle beam device adjustment sample, and manufacturing method thereof
Grant 9,702,695 - Kawada , et al. July 11, 2 | 2017-07-11 |
Method and device for line pattern shape evaluation
Grant 9,658,063 - Yamaguchi , et al. May 23, 2 | 2017-05-23 |
Pattern Measurement Method And Pattern Measurement Device
App 20170138725 - Kawada; Hiroki ; et al. | 2017-05-18 |
Measurement Device, Calibration Method Of Measurement Device, And Calibration Member
App 20170092462 - HATANO; Michio ; et al. | 2017-03-30 |
Measurement System And Measurement Method
App 20170047197 - HOTTA; Shoji ; et al. | 2017-02-16 |
Charged Particle Beam Device And Inspection Device
App 20170040230 - Yamaguchi; Atsuko ; et al. | 2017-02-09 |
Measurement method, image processing device, and charged particle beam apparatus
Grant 9,536,170 - Ohashi , et al. January 3, 2 | 2017-01-03 |
Method And Device For Line Pattern Shape Evaluation
App 20160123726 - YAMAGUCHI; Atsuko ; et al. | 2016-05-05 |
Measuring method, data processing apparatus and electron microscope using same
Grant 9,305,744 - Ohashi , et al. April 5, 2 | 2016-04-05 |
Pattern dimension measurement method and charged particle beam apparatus
Grant 9,297,649 - Kawada , et al. March 29, 2 | 2016-03-29 |
Semiconductor inspection device and semiconductor inspection method using the same
Grant 9,123,504 - Yamaguchi , et al. September 1, 2 | 2015-09-01 |
Measurement Method, Image Processing Device, And Charged Particle Beam Apparatus
App 20150110406 - Ohashi; Takeyoshi ; et al. | 2015-04-23 |
Method and apparatus for measuring displacement between patterns and scanning electron microscope installing unit for measuring displacement between patterns
Grant 9,000,366 - Yamaguchi , et al. April 7, 2 | 2015-04-07 |
Method For Estimating Shape Before Shrink And Cd-sem Apparatus
App 20150036914 - Sekiguchi; Tomoko ; et al. | 2015-02-05 |
Measuring Method, Data Processing Apparatus And Electron Microscope Using Same
App 20140246585 - Ohashi; Takeyoshi ; et al. | 2014-09-04 |
Pattern Dimension Measurement Method And Charged Particle Beam Apparatus
App 20140048706 - Kawada; Hiroki ; et al. | 2014-02-20 |
Method And Apparatus For Measuring Displacement Between Patterns And Scanning Electron Microscope Installing Unit For Measuring Displacement Between Patterns
App 20130264479 - YAMAGUCHI; Atsuko ; et al. | 2013-10-10 |
Tool-to-tool matching control method and its system for scanning electron microscope
Grant 8,502,144 - Oosaki , et al. August 6, 2 | 2013-08-06 |
Image Processing Device, Charged Particle Beam Device, Charged Particle Beam Device Adjustment Sample, and Manufacturing Method Thereof
App 20130146763 - Kawada; Hiroki ; et al. | 2013-06-13 |
Scanning electron microscope and CD measurement calibration standard specimen
Grant 8,399,832 - Mizuno , et al. March 19, 2 | 2013-03-19 |
Length measurement system
Grant 8,369,602 - Yamaguchi , et al. February 5, 2 | 2013-02-05 |
Scanning electron microscope and image signal processing method
Grant 8,362,426 - Kobaru , et al. January 29, 2 | 2013-01-29 |
Apparatus for data analysis
Grant 8,300,919 - Yamaguchi , et al. October 30, 2 | 2012-10-30 |
Charged particle beam apparatus and methods for capturing images using the same
Grant 8,207,512 - Shishido , et al. June 26, 2 | 2012-06-26 |
Image forming method and charged particle beam apparatus
Grant 8,203,504 - Kobaru , et al. June 19, 2 | 2012-06-19 |
Semiconductor Inspection Device And Semiconductor Inspection Method Using The Same
App 20120098954 - Yamaguchi; Atsuko ; et al. | 2012-04-26 |
Sample dimension measuring method and scanning electron microscope
Grant 8,080,789 - Nasu , et al. December 20, 2 | 2011-12-20 |
Tool-To-Tool Matching Control Method And Its System For Scanning Electron Microscope
App 20110278453 - Oosaki; Mayuka ; et al. | 2011-11-17 |
Sample and method for evaluating resolution of scanning electron microscope, and electron scanning microscope
Grant 8,022,356 - Oosaki , et al. September 20, 2 | 2011-09-20 |
Tool-to-tool matching control method and its system for scanning electron microscope
Grant 8,003,940 - Oosaki , et al. August 23, 2 | 2011-08-23 |
Charged Particel Beam Apparatus And Methods For Capturing Images Using The Same
App 20110133080 - SHISHIDO; Chie ; et al. | 2011-06-09 |
Sample dimension measuring method and scanning electron microscope
Grant 7,910,886 - Kawada , et al. March 22, 2 | 2011-03-22 |
Image Forming Method And Charged Particle Beam Apparatus
App 20110032176 - KOBARU; Atsushi ; et al. | 2011-02-10 |
Image forming method and charged particle beam apparatus
Grant 7,817,105 - Kobaru , et al. October 19, 2 | 2010-10-19 |
Method and apparatus for measuring dimension using electron microscope
Grant 7,817,860 - Shishido , et al. October 19, 2 | 2010-10-19 |
Charged particle beam apparatus and methods for capturing images using the same
Grant 7,807,980 - Shishido , et al. October 5, 2 | 2010-10-05 |
Sample and method for evaluating resolution of scanning electron microscope, and electron scanning microscope
App 20100133426 - Oosaki; Mayuka ; et al. | 2010-06-03 |
Evaluation method of fine pattern feature, its equipment, and method of semiconductor device fabrication
Grant 7,684,937 - Yamaguchi , et al. March 23, 2 | 2010-03-23 |
Sample dimension measuring method and scanning electron microscope
App 20100038535 - Nasu; Osamu ; et al. | 2010-02-18 |
Method for measuring dimensions of sample and scanning electron microscope
Grant 7,659,508 - Nasu , et al. February 9, 2 | 2010-02-09 |
High-accuracy pattern shape evaluating method and apparatus
Grant 7,619,751 - Yamaguchi , et al. November 17, 2 | 2009-11-17 |
Apparatus For Data Analysis
App 20090263024 - YAMAGUCHI; Atsuko ; et al. | 2009-10-22 |
Sample and method for evaluating resolution of scanning electron microscope, and electron scanning microscope
Grant 7,605,364 - Oosaki , et al. October 20, 2 | 2009-10-20 |
Method And Apparatus For Measuring Dimension Using Electron Microscope
App 20090224152 - SHISHIDO; Chie ; et al. | 2009-09-10 |
Tool-To-Tool Matching Control Method And its System For Scanning Electron Microscope
App 20090121134 - Oosaki; Mayuka ; et al. | 2009-05-14 |
Method for controlling charged particle beam, and charged particle beam apparatus
Grant 7,511,272 - Kawada , et al. March 31, 2 | 2009-03-31 |
Length Measurement System
App 20090046896 - YAMAGUCHI; Atsuko ; et al. | 2009-02-19 |
Tool-to-tool matching control method and its system for scanning electron microscope
Grant 7,476,857 - Oosaki , et al. January 13, 2 | 2009-01-13 |
Method and apparatus for measuring dimension using electron microscope
Grant 7,460,714 - Shishido , et al. December 2, 2 | 2008-12-02 |
Scanning electron microscope and CD measurement calibration standard specimen
App 20080272297 - Mizuno; Takeshi ; et al. | 2008-11-06 |
High-accuracy Pattern Shape Evaluating Method And Apparatus
App 20080226177 - Yamaguchi; Atsuko ; et al. | 2008-09-18 |
Evaluation method of fine pattern feature, its equipment, and method of semiconductor device fabrication
App 20080215274 - Yamaguchi; Atsuko ; et al. | 2008-09-04 |
Scanning electron microscope and CD measurement calibration standard specimen
Grant 7,420,168 - Mizuno , et al. September 2, 2 | 2008-09-02 |
Scanning electron microscope, method for measuring a dimension of a pattern using the same, and apparatus for correcting difference between scanning electron microscopes
Grant 7,408,154 - Oosaki , et al. August 5, 2 | 2008-08-05 |
Measuring method and its apparatus
Grant 7,408,155 - Oosaki , et al. August 5, 2 | 2008-08-05 |
Sample dimension measuring method and scanning electron microscope
App 20080179517 - Kawada; Hiroki ; et al. | 2008-07-31 |
High-accuracy pattern shape evaluating method and apparatus
Grant 7,405,835 - Yamaguchi , et al. July 29, 2 | 2008-07-29 |
Electron microscope, measuring method using the same, electron microscope system, and method for controlling the system
Grant 7,399,964 - Shishido , et al. July 15, 2 | 2008-07-15 |
Scanning electron microscope
Grant 7,375,329 - Fujita , et al. May 20, 2 | 2008-05-20 |
Evaluation method of fine pattern feature, its equipment, and method of semiconductor device fabrication
Grant 7,366,620 - Yamaguchi , et al. April 29, 2 | 2008-04-29 |
Scanning electron microscope and CD measurement calibration standard specimen
Grant 7,361,898 - Mizuno , et al. April 22, 2 | 2008-04-22 |
Sample And Method For Evaluating Resolution Of Scanning Electron Microscope, And Electron Scanning Microscope
App 20080067337 - Oosaki; Mayuka ; et al. | 2008-03-20 |
Scanning electron microscope and CD measurement calibration standard specimen
App 20080023627 - Mizuno; Takeshi ; et al. | 2008-01-31 |
Method and apparatus for measuring dimension using electron microscope
App 20070286494 - Shishido; Chie ; et al. | 2007-12-13 |
Method of measurement accuracy improvement by control of pattern shrinkage
Grant 7,288,763 - Ikeda , et al. October 30, 2 | 2007-10-30 |
Sample dimension measuring method and scanning electron microscope
Grant 7,285,777 - Kawada , et al. October 23, 2 | 2007-10-23 |
High-accuracy pattern shape evaluating method and apparatus
App 20070242885 - Yamaguchi; Atsuko ; et al. | 2007-10-18 |
Method and apparatus for measuring dimension using electron microscope
Grant 7,269,287 - Shishido , et al. September 11, 2 | 2007-09-11 |
Focus adjustment method and focus adjustment apparatus
App 20070200947 - Kobaru; Atsushi ; et al. | 2007-08-30 |
Charged particle beam apparatus and methods for capturing images using the same
App 20070164219 - Shishido; Chie ; et al. | 2007-07-19 |
Image forming method and charged particle beam apparatus
App 20070159662 - Kobaru; Atsushi ; et al. | 2007-07-12 |
High-accuracy pattern shape evaluating method and apparatus
Grant 7,230,723 - Yamaguchi , et al. June 12, 2 | 2007-06-12 |
Tool-to-tool matching control method and its system for scanning electron microscope
App 20070114405 - Oosaki; Mayuka ; et al. | 2007-05-24 |
Method And Apparatus For Measuring Dimension Using Electron Microscope
App 20070092130 - Shishido; Chie ; et al. | 2007-04-26 |
Method for controlling charged particle beam, and charged particle beam apparatus
App 20070085020 - Kawada; Hiroki ; et al. | 2007-04-19 |
Scanning electron microscope and image signal processing method
App 20070064100 - Kobaru; Atsushi ; et al. | 2007-03-22 |
Image forming method and charged particle beam apparatus
Grant 7,187,345 - Kobaru , et al. March 6, 2 | 2007-03-06 |
Image Forming Method And Charged Particle Beam Apparatus
App 20070024528 - Kobaru; Atsushi ; et al. | 2007-02-01 |
Scanning electron microscope and a method for evaluating accuracy of repeated measurement using the same
Grant 7,164,127 - Nakagaki , et al. January 16, 2 | 2007-01-16 |
Method for controlling charged particle beam, and charged particle beam apparatus
Grant 7,154,090 - Kawada , et al. December 26, 2 | 2006-12-26 |
Method of measurement accuracy improvement by control of pattern shrinkage
App 20060192119 - Ikeda; Satoshi ; et al. | 2006-08-31 |
High-accuracy pattern shape evaluating method and apparatus
App 20060145076 - Yamaguchi; Atsuko ; et al. | 2006-07-06 |
Scanning electron microscope
App 20060108527 - Fujita; Masashi ; et al. | 2006-05-25 |
Pattern inspection method
Grant 7,049,589 - Yamaguchi , et al. May 23, 2 | 2006-05-23 |
Method of measurement accuracy improvement by control of pattern shrinkage
Grant 7,045,782 - Ikeda , et al. May 16, 2 | 2006-05-16 |
Scanning electron microscope, method for measuring a dimension of a pattern using the same, and apparatus for correcting difference between scanning electron microscopes
App 20060091309 - Oosaki; Mayuka ; et al. | 2006-05-04 |
Mesuring method and its apparatus
App 20060060774 - Oosaki; Mayuka ; et al. | 2006-03-23 |
Evaluation method of fine pattern feature, its equipment, and method of semiconductor device fabrication
App 20060036409 - Yamaguchi; Atsuko ; et al. | 2006-02-16 |
Scanning electron microscope
Grant 6,995,370 - Fujita , et al. February 7, 2 | 2006-02-07 |
Scanning electron microscope and CD measurement calibration standard specimen
App 20050285035 - Mizuno, Takeshi ; et al. | 2005-12-29 |
Method for controlling charged particle beam, and charged particle beam apparatus
App 20050253067 - Kawada, Hiroki ; et al. | 2005-11-17 |
Sample dimension measuring method and scanning electron microscope
App 20050247876 - Kawada, Hiroki ; et al. | 2005-11-10 |
Electron microscope, measuring method using the same, electron microscope system, and method for controlling the system
App 20050247860 - Shishido, Chie ; et al. | 2005-11-10 |
Scanning electron microscope and a method for evaluating accuracy of repeated measurement using the same
App 20050205780 - Nakagaki, Ryo ; et al. | 2005-09-22 |
Method of measurement accuracy improvement by control of pattern shrinkage
App 20050161602 - Ikeda, Satoshi ; et al. | 2005-07-28 |
Scanning electron microscope
App 20050145791 - Fujita, Masashi ; et al. | 2005-07-07 |
Pattern inspection method
App 20040195507 - Yamaguchi, Atsuko ; et al. | 2004-10-07 |
Method for measuring dimensions of sample and scanning electron microscope
App 20040051040 - Nasu, Osamu ; et al. | 2004-03-18 |
Semiconductor device manufacturing apparatus and method with optical monitoring of state of processing chamber
Grant 5,536,359 - Kawada , et al. July 16, 1 | 1996-07-16 |
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