KAWABE; Yoshio

Patent Applications and Registrations

Patent applications and USPTO patent grants for KAWABE; Yoshio.The latest application filed is for "light source apparatus, optical apparatus, exposure apparatus, device manufacturing method, illuminating method, exposure method, and method for manufacturing optical apparatus".

Company Profile

3.16.21

KAWABE; Yoshio - Tokyo JP
KAWABE; Yoshio - Kumagaya-shi JP
Kawabe; Yoshio - Kumagaya JP
Kawabe; Yoshio - Kumogaya-City JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Light Source Apparatus, Optical Apparatus, Exposure Apparatus, Device Manufacturing Method, Illuminating Method, Exposure Method, And Method For Manufacturing Optical Apparatus App 20220260923 - KOMATSUDA; Hideki ; et al.	2022-08-18
Light source apparatus, optical apparatus, exposure apparatus, device manufacturing method, illuminating method, exposure method, and method for manufacturing optical apparatus Grant 11,353,795 - Komatsuda , et al. June 7, 2	2022-06-07
Processing Apparatus, And Manufacturing Method Of Movable Body App 20210205920 - SHIRAISHI; Masayuki ; et al.	2021-07-08
Processing Apparatus, Processing System, And Manufacturing Method Of Movable Body App 20210197312 - SHIRAISHI; Masayuki ; et al.	2021-07-01
Reflective image-forming optical system, exposure apparatus, and device manufacturing method Grant 10,976,669 - Kawabe April 13, 2	2021-04-13
Light Source Apparatus, Optical Apparatus, Exposure Apparatus, Device Manufacturing Method, Illuminating Method, Exposure Method, And Method For Manufacturing Optical Apparatus App 20210026251 - KOMATSUDA; Hideki ; et al.	2021-01-28
Processing Apparatus, And Manufacturing Method Of Movable Body App 20200391325 - SHIRAISHI; Masayuki ; et al.	2020-12-17
Processing Apparatus, And Manufacturing Method Of Movable Body App 20200361036 - SHIRAISHI; Masayuki ; et al.	2020-11-19
Processing Apparatus, And Manufacturing Method Of Movable Body App 20200353560 - SHIRAISHI; Masayuki ; et al.	2020-11-12
Light source apparatus, optical apparatus, exposure apparatus, device manufacturing method, illuminating method, exposure method, and method for manufacturing optical apparatus Grant 10,831,106 - Komatsuda , et al. November 10, 2	2020-11-10
Reflective Image-forming Optical System, Exposure Apparatus, And Device Manufacturing Method App 20200174375 - KAWABE; Yoshio	2020-06-04
Reflective image-forming optical system, exposure apparatus, and device manufacturing method Grant 10,599,042 - Kawabe	2020-03-24
Light Source Apparatus, Optical Apparatus, Exposure Apparatus, Device Manufacturing Method, Illuminating Method, Exposure Method App 20190302435 - KOMATSUDA; Hideki ; et al.	2019-10-03
Light source apparatus, optical apparatus, exposure apparatus, device manufacturing method, illuminating method, exposure method, and method for manufacturing optical apparatus Grant 10,345,708 - Komatsuda , et al. July 9, 2	2019-07-09
Reflective mirror, projection optical system, exposure apparatus, and device manufacturing method Grant 10,191,387 - Kawabe , et al. Ja	2019-01-29
Reflective Image-forming Optical System, Exposure Apparatus, And Device Manufacturing Method App 20180299781 - KAWABE; Yoshio	2018-10-18
Reflective image-forming optical system, exposure apparatus, and device manufacturing method Grant 10,025,195 - Kawabe July 17, 2	2018-07-17
Reflective Mirror, Projection Optical System, Exposure Apparatus, And Device Manufacturing Method App 20180120713 - Kawabe; Yoshio ; et al.	2018-05-03
Reflective mirror, projection optical system, exposure apparatus, and device manufacturing method Grant 9,864,278 - Kawabe , et al. January 9, 2	2018-01-09
Light Source Apparatus, Optical Apparatus, Exposure Apparatus, Device Manufacturing Method, Illuminating Method, Exposure Method, And Method For Manufacturing Optical Apparatus App 20170285314 - KOMATSUDA; Hideki ; et al.	2017-10-05
Reflective Mirror, Projection Optical System, Exposure Apparatus, And Device Manufacturing Method App 20170206994 - Kawabe; Yoshio ; et al.	2017-07-20
Light source apparatus, optical apparatus, exposure apparatus, device manufacturing method, illuminating method, exposure method, and method for manufacturing optical apparatus Grant 9,703,204 - Komatsuda , et al. July 11, 2	2017-07-11
Reflective Image-forming Optical System, Exposure Apparatus, And Device Manufacturing Method App 20170115574 - KAWABE; Yoshio	2017-04-27
Reflective mirror, projection optical system, exposure apparatus, and device manufacturing method Grant 9,606,447 - Kawabe , et al. March 28, 2	2017-03-28
Reflective image-forming optical system, exposure apparatus, and device manufacturing method Grant 9,541,842 - Kawabe January 10, 2	2017-01-10
Reflector, Projection Optical System, Exposure Apparatus, And Device Manufacturing Method App 20150219997 - Kawabe; Yoshio ; et al.	2015-08-06
Reflective imaging optical system, exposure apparatus, and method for producing device Grant 9,075,322 - Kawabe July 7, 2	2015-07-07
Reflective Image-forming Optical System, Exposure Apparatus, And Device Manufacturing Method App 20150085270 - KAWABE; Yoshio	2015-03-26
Optical integrator, illumination optical system, exposure apparatus, and device manufacturing method Grant 8,497,977 - Kawabe July 30, 2	2013-07-30
Light Source Apparatus, Optical Apparatus, Exposure Apparatus, Device Manufacturing Method, Illuminating Method, Exposure Method, And Method For Manufacturing Optical Apparatus App 20130128248 - Komatsuda; Hideki ; et al.	2013-05-23
Illumination Optical Apparatus, Exposure Apparatus, And Device Manufacturing Method App 20120188526 - Oshino; Tetsuya ; et al.	2012-07-26
Reflective Imaging Optical System, Exposure Apparatus, And Method For Producing Device App 20120062864 - KAWABE; Yoshio	2012-03-15
Optical Integrator, Illumination Optical System, Exposure Apparatus, And Device Manufacturing Method App 20100231880 - KAWABE; Yoshio	2010-09-16

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