| Patent | Date |
|---|
Multi-spot analysis system with multiple optical probes
Grant 11,441,893 - Dighe , et al. September 13, 2 | 2022-09-13 |
Sensitive particle detection with spatially-varying polarization rotator and polarizer
Grant 11,243,175 - Liu , et al. February 8, 2 | 2022-02-08 |
Apparatus And Method For Rotating An Optical Objective
App 20210356406 - Romanovsky; Anatoly ; et al. | 2021-11-18 |
Sensitive Particle Detection With Spatially-varying Polarization Rotator And Polarizer
App 20210164918 - Liu; Xuefeng ; et al. | 2021-06-03 |
Sensitive particle detection with spatially-varying polarization rotator and polarizer
Grant 10,948,423 - Liu , et al. March 16, 2 | 2021-03-16 |
Radial polarizer for particle detection
Grant 10,942,135 - Leong , et al. March 9, 2 | 2021-03-09 |
Sensitive Particle Detection with Spatially-Varying Polarization Rotator and Polarizer
App 20200264109 - Liu; Xuefeng ; et al. | 2020-08-20 |
Radial Polarizer for Particle Detection
App 20200150054 - Leong; Jenn-Kuen ; et al. | 2020-05-14 |
Wafer inspection
Grant 10,488,348 - Romanovsky , et al. Nov | 2019-11-26 |
Multi-Spot Analysis System with Multiple Optical Probes
App 20190331592 - Dighe; Prasanna ; et al. | 2019-10-31 |
Wafer Inspection
App 20180164228 - Romanovsky; Anatoly ; et al. | 2018-06-14 |
Wafer inspection
Grant 9,915,622 - Romanovsky , et al. March 13, 2 | 2018-03-13 |
TDI sensor in a darkfield system
Grant 9,891,177 - Vazhaeparambil , et al. February 13, 2 | 2018-02-13 |
TDI Sensor in a Darkfield System
App 20160097727 - Vazhaeparambil; Jijen ; et al. | 2016-04-07 |
Wafer inspection
Grant 9,279,774 - Romanovsky , et al. March 8, 2 | 2016-03-08 |
Wafer Inspection
App 20150369753 - Romanovsky; Anatoly ; et al. | 2015-12-24 |
Monitoring incident beam position in a wafer inspection system
Grant 8,934,091 - Reich , et al. January 13, 2 | 2015-01-13 |
Grazing and normal incidence interferometer having common reference surface
Grant 8,786,842 - Muller , et al. July 22, 2 | 2014-07-22 |
Monitoring Incident Beam Position in a Wafer Inspection System
App 20140071437 - Reich; Juergen ; et al. | 2014-03-13 |
Photomultiplier tube optimized for surface inspection in the ultraviolet
Grant 8,629,384 - Biellak , et al. January 14, 2 | 2014-01-14 |
Segmented polarizer for optimizing performance of a surface inspection system
Grant 8,520,208 - Biellak , et al. August 27, 2 | 2013-08-27 |
Computer-implemented methods, computer-readable media, and systems for determining one or more characteristics of a wafer
Grant 8,494,802 - Chen , et al. July 23, 2 | 2013-07-23 |
Wafer Inspection
App 20130016346 - Romanovsky; Anatoly ; et al. | 2013-01-17 |
Fast laser power control with improved reliability for surface inspection
Grant 8,294,887 - Biellak , et al. October 23, 2 | 2012-10-23 |
Computer-implemented methods for inspecting and/or classifying a wafer
Grant 8,269,960 - Reich , et al. September 18, 2 | 2012-09-18 |
Segmented polarizer for optimizing performance of a surface inspection system
Grant 8,169,613 - Biellak , et al. May 1, 2 | 2012-05-01 |
Dynamic range extension in surface inspection systems
Grant 8,134,698 - Wolters , et al. March 13, 2 | 2012-03-13 |
Method and apparatus for measuring shape or thickness information of a substrate
Grant 8,068,234 - Tang , et al. November 29, 2 | 2011-11-29 |
Computer-implemented Methods, Computer-readable Media, And Systems For Determining One Or More Characteristics Of A Wafer
App 20110196639 - Chen; Haiguang ; et al. | 2011-08-11 |
Systems and methods for determining two or more characteristics of a wafer
Grant 7,912,658 - Biellak , et al. March 22, 2 | 2011-03-22 |
Method And Apparatus For Measuring Shape Or Thickness Information Of A Substrate
App 20100208272 - Tang; Shouhong ; et al. | 2010-08-19 |
Computer-implemented Methods For Inspecting And/or Classifying A Wafer
App 20100060888 - Reich; Juergen ; et al. | 2010-03-11 |
Systems And Methods For Determining Two Or More Characteristics Of A Wafer
App 20090299655 - Biellak; Stephen ; et al. | 2009-12-03 |
Methods and systems for detecting pinholes in a film formed on a wafer or for monitoring a thermal process tool
Grant 7,528,944 - Chen , et al. May 5, 2 | 2009-05-05 |
Computer-implemented methods and systems for determining a configuration for a light scattering inspection system
Grant 7,436,505 - Belyaev , et al. October 14, 2 | 2008-10-14 |
Methods And Systems For Detecting Pinholes In A Film Formed On A Wafer Or For Monitoring A Thermal Process Tool
App 20080018887 - Chen; David ; et al. | 2008-01-24 |
Computer-Implemented Methods and Systems for Determining a Configuration for a Light Scattering Inspection System
App 20070229809 - Belyaev; Alexander ; et al. | 2007-10-04 |
Reduced coherence symmetric grazing incidence differential interferometer
Grant 7,173,715 - Mueller , et al. February 6, 2 | 2007-02-06 |
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