Kaushal; Tony S.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Kaushal; Tony S..The latest application filed is for "abatement of fluorine gas from effluent".
- Kaushal; Tony S. - Cupertino CA
- Kaushal; Tony S. - Peoria IL
| Patent | Date |
|---|---|
| Erosion-resistant components for plasma process chambers Grant 7,670,688 - Kaushal , et al. March 2, 2 | 2010-03-02 |
| Abatement of fluorine gas from effluent App 20070022958 - Shamouilian; Shamouil ; et al. | 2007-02-01 |
| Method and apparatus for polishing metal and dielectric substrates Grant 6,960,521 - Moon , et al. November 1, 2 | 2005-11-01 |
| Method and apparatus for polishing metal and dielectric substrates App 20050032381 - Moon, Yongsik ; et al. | 2005-02-10 |
| Heated catalytic treatment of an effluent gas from a substrate fabrication process Grant 6,824,748 - Kaushal , et al. November 30, 2 | 2004-11-30 |
| Methods and apparatus for polishing substrates comprising conductive and dielectric materials with reduced topographical defects Grant 6,790,768 - Moon , et al. September 14, 2 | 2004-09-14 |
| Elements having erosion resistance Grant 6,789,498 - Kaushal , et al. September 14, 2 | 2004-09-14 |
| Chemical mechanical polishing endpoinat detection Grant 6,709,314 - Kaushal , et al. March 23, 2 | 2004-03-23 |
| Erosion-resistant components for plasma process chambers App 20040033385 - Kaushal, Tony S. ; et al. | 2004-02-19 |
| Abatement of hazardous gases in effluent Grant 6,689,252 - Shamouilian , et al. February 10, 2 | 2004-02-10 |
| Treatment of hazardous gases in effluent Grant 6,673,323 - Bhatnagar , et al. January 6, 2 | 2004-01-06 |
| Elements having erosion resistance App 20030159657 - Kaushal, Tony S. ; et al. | 2003-08-28 |
| Chemical mechanical polishing endpoinat detection App 20030087586 - Kaushal, Tony S. ; et al. | 2003-05-08 |
| Sensor for in-situ pad wear during CMP App 20030060127 - Kaushal, Tony S. ; et al. | 2003-03-27 |
| Method and apparatus for polishing metal and dielectric substrates App 20030029841 - Moon, Yongsik ; et al. | 2003-02-13 |
| Corrosion resistant coating for semiconductor processing chamber App 20030029563 - Kaushal, Tony S. ; et al. | 2003-02-13 |
| Abatement of fluorine gas from effluent App 20020192129 - Shamouilian, Shamouil ; et al. | 2002-12-19 |
| Heated catalytic treatment of an effluent gas from a substrate fabrication process App 20020182131 - Kaushal, Tony S. ; et al. | 2002-12-05 |
| Abatement of fluorine gas from effluent Grant 6,468,490 - Shamouilian , et al. October 22, 2 | 2002-10-22 |
| Erosion resistant gas energizer Grant 6,391,146 - Bhatnagar , et al. May 21, 2 | 2002-05-21 |
| Porous ceramic liner for a plasma source Grant 6,367,412 - Ramaswamy , et al. April 9, 2 | 2002-04-09 |
| Composite ceramic and metal article Grant 5,137,789 - Kaushal August 11, 1 | 1992-08-11 |
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