Kaushal; Sanjeev

Patent Applications and Registrations

Patent applications and USPTO patent grants for Kaushal; Sanjeev.The latest application filed is for "method and apparatus for autonomous tool parameter impact identification system for semiconductor manufacturing".

Company Profile

3.39.36

Kaushal; Sanjeev - San Jose CA
Kaushal; Sanjeev - Los Altos Hills CA
Kaushal; Sanjeev - Austin TX

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
System and method for learning and/or optimizing manufacturing processes Grant 10,635,993 - Kaushal , et al.	2020-04-28
Method and apparatus for autonomous tool parameter impact identification system for semiconductor manufacturing Grant 10,571,900 - Kaushal , et al. Feb	2020-02-25
Tool failure analysis using space-distorted similarity Grant 10,228,678 - Kaushal , et al.	2019-03-12
Method and apparatus for autonomous identification of particle contamination due to isolated process events and systematic trends Grant 10,133,265 - Waterman , et al. November 20, 2	2018-11-20
Method And Apparatus For Autonomous Tool Parameter Impact Identification System For Semiconductor Manufacturing App 20170329318 - Kaushal; Sanjeev ; et al.	2017-11-16
Method and apparatus for autonomous tool parameter impact identification system for semiconductor manufacturing Grant 9,746,849 - Kaushal , et al. August 29, 2	2017-08-29
Tool Failure Analysis Using Space-distorted Similarity App 20170023927 - Kaushal; Sanjeev ; et al.	2017-01-26
Method And Apparatus For Autonomous Identification Of Particle Contamination Due To Isolated Process Events And Systematic Trends App 20160334782 - Waterman; Aaron Archer ; et al.	2016-11-17
System And Method For Learning And/or Optimizing Manufacturing Processes App 20160307116 - Kaushal; Sanjeev ; et al.	2016-10-20
Method and apparatus for self-learning and self-improving a semiconductor manufacturing tool Grant 9,424,528 - Kaushal , et al. August 23, 2	2016-08-23
Method and apparatus for autonomous identification of particle contamination due to isolated process events and systematic trends Grant 9,405,289 - Waterman , et al. August 2, 2	2016-08-02
System and method for learning and/or optimizing manufacturing processes Grant 9,396,443 - Kaushal , et al. July 19, 2	2016-07-19
Autonomous biologically based learning tool Grant 9,275,335 - Kaushal , et al. March 1, 2	2016-03-01
System And Method For Modeling And/or Analyzing Manufacturing Processes App 20150332167 - Kaushal; Sanjeev ; et al.	2015-11-19
System And Method For Learning And/or Optimizing Manufacturing Processes App 20150161520 - Kaushal; Sanjeev ; et al.	2015-06-11
Tool performance by linking spectroscopic information with tool operational parameters and material measurement information Grant 8,954,184 - Kaushal , et al. February 10, 2	2015-02-10
Biologically Based Chamber Matching App 20140304196 - Kaushal; Sanjeev ; et al.	2014-10-09
Method And Apparatus For Self-learning And Self-improving A Semiconductor Manufacturing Tool App 20140229409 - Kaushal; Sanjeev ; et al.	2014-08-14
Method And Apparatus For Autonomous Identification Of Particle Contamination Due To Isolated Process Events And Systematic Trends App 20140163712 - Waterman; Aaron Archer ; et al.	2014-06-12
Method and apparatus for self-learning and self-improving a semiconductor manufacturing tool Grant 8,744,607 - Kaushal , et al. June 3, 2	2014-06-03
Method And Apparatus For Autonomous Tool Parameter Impact Identification System For Semiconductor Manufacturing App 20140135970 - Kaushal; Sanjeev ; et al.	2014-05-15
Method and system for detection of tool performance degradation and mismatch Grant 8,725,667 - Kaushal , et al. May 13, 2	2014-05-13
Biologically based chamber matching Grant 8,723,869 - Kaushal , et al. May 13, 2	2014-05-13
Method And Apparatus For Self-learning And Self-improving A Semiconductor Manufacturing Tool App 20130151447 - Kaushal; Sanjeev ; et al.	2013-06-13
Method and apparatus for self-learning and self-improving a semiconductor manufacturing tool Grant 8,396,582 - Kaushal , et al. March 12, 2	2013-03-12
Biologically Based Chamber Matching App 20120242667 - Kaushal; Sanjeev ; et al.	2012-09-27
Autonomous Biologically Based Learning Tool App 20120209798 - Kaushal; Sanjeev ; et al.	2012-08-16
Tool Performance By Linking Spectroscopic Information With Tool Operational Parameters And Material Measurement Information App 20120185813 - Kaushal; Sanjeev ; et al.	2012-07-19
Autonomous biologically based learning tool Grant 8,190,543 - Kaushal , et al. May 29, 2	2012-05-29
Autonomous adaptive system and method for improving semiconductor manufacturing quality Grant 8,078,552 - Kaushal , et al. December 13, 2	2011-12-13
Method of monitoring a semiconductor processing system using a wireless sensor network Grant 8,026,113 - Kaushal , et al. September 27, 2	2011-09-27
Autonomous Biologically Based Learning Tool App 20110131162 - Kaushal; Sanjeev ; et al.	2011-06-02
Method and apparatus for monolayer deposition (MLD) Grant 7,838,072 - Kaushal , et al. November 23, 2	2010-11-23
Silicon germanium surface layer for high-k dielectric integration Grant 7,737,051 - Dip , et al. June 15, 2	2010-06-15
Method And Apparatus For Self-learning And Self-improving A Semiconductor Manufacturing Tool App 20100138026 - Kaushal; Sanjeev ; et al.	2010-06-03
Method of correcting systematic error in a metrology system Grant 7,710,565 - Kaushal , et al. May 4, 2	2010-05-04
Method And System For Detection Of Tool Performance Degradation And Mismatch App 20090240366 - Kaushal; Sanjeev ; et al.	2009-09-24
Autonomous Adaptive Semiconductor Manufacturing App 20090228408 - Kaushal; Sanjeev ; et al.	2009-09-10
Optical measurement system with systematic error correction Grant 7,561,269 - Kaushal , et al. July 14, 2	2009-07-14
Optical Measurement System With Systematic Error Correction App 20090153842 - Kaushal; Sanjeev ; et al.	2009-06-18
Method Of Correcting Systematic Error In A Metrology System App 20090157343 - Kaushal; Sanjeev ; et al.	2009-06-18
Method for creating a built-in self test (BIST) table for monitoring a monolayer deposition (MLD) system Grant 7,526,699 - Kaushal , et al. April 28, 2	2009-04-28
Monitoring a monolayer deposition (MLD) system using a built-in self test (BIST) table Grant 7,519,885 - Kaushal , et al. April 14, 2	2009-04-14
Method for monolayer deposition Grant 7,459,175 - Kaushal , et al. December 2, 2	2008-12-02
Wafer curvature estimation, monitoring, and compensation Grant 7,452,793 - Kaushal , et al. November 18, 2	2008-11-18
Built-in self test for a thermal processing system Grant 7,444,572 - Kaushal , et al. October 28, 2	2008-10-28
Monitoring a thermal processing system Grant 7,406,644 - Kaushal , et al. July 29, 2	2008-07-29
Spintronic transistor Grant 7,342,244 - Kaushal , et al. March 11, 2	2008-03-11
Monitoring a single-wafer processing system Grant 7,340,377 - Kaushal , et al. March 4, 2	2008-03-04
Spintronic Transistor App 20080017843 - Kaushal; Sanjeev ; et al.	2008-01-24
Monitoring a system during low-pressure processes Grant 7,302,363 - Kaushal , et al. November 27, 2	2007-11-27
Method For Creating A Built-in Self Test (bist) Table For Monitoring A Monolayer Deposition (mld) System App 20070259285 - Kaushal; Sanjeev ; et al.	2007-11-08
Monitoring A Thermal Processing System App 20070255991 - Kaushal; Sanjeev ; et al.	2007-11-01
Monitoring A System During Low-pressure Processes App 20070239375 - Kaushal; Sanjeev ; et al.	2007-10-11
Monitoring A Monolayer Deposition (mld) System Using A Built-in Self Test (bist) Table App 20070234953 - Kaushal; Sanjeev ; et al.	2007-10-11
Monitoring A Single-wafer Processing System App 20070233427 - Kaushal; Sanjeev ; et al.	2007-10-04
Semiconductor Processing System With Wireless Sensor Network Monitoring System Incorporated Therewith App 20070221125 - Kaushal; Sanjeev ; et al.	2007-09-27
Method Of Monitoring A Semiconductor Processing System Using A Wireless Sensor Network App 20070224712 - Kaushal; Sanjeev ; et al.	2007-09-27
Built-in self test for a thermal processing system App 20070061652 - Kaushal; Sanjeev ; et al.	2007-03-15
Built-in self test for a thermal processing system Grant 7,165,011 - Kaushal , et al. January 16, 2	2007-01-16
Heat treating device Grant 7,141,765 - Makiya , et al. November 28, 2	2006-11-28
Wafer curvature estimation, monitoring, and compensation App 20060241891 - Kaushal; Sanjeev ; et al.	2006-10-26
Methods for adaptive real time control of a thermal processing system Grant 7,101,816 - Kaushal , et al. September 5, 2	2006-09-05
Method and apparatus for monolayer deposition App 20060166501 - Kaushal; Sanjeev ; et al.	2006-07-27
Method and apparatus for monolayer deposition (MLD) App 20060165890 - Kaushal; Sanjeev ; et al.	2006-07-27
Adaptive real time control of a reticle/mask system Grant 7,025,280 - Kaushal , et al. April 11, 2	2006-04-11
Silicon germanium surface layer for high-k dielectric integration App 20050199877 - Dip, Anthony ; et al.	2005-09-15
Adaptive real time control of a reticle/mask system App 20050167514 - Kaushal, Sanjeev ; et al.	2005-08-04
Methods for adaptive real time control of a thermal processing system App 20050149886 - Kaushal, Sanjeev ; et al.	2005-07-07

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