loadpatents
Patent applications and USPTO patent grants for Kaufman; Harold R..The latest application filed is for "end-hall ion source with enhanced radiation cooling".
Patent | Date |
---|---|
End-hall ion source with enhanced radiation cooling Grant 10,068,739 - Kaufman , et al. September 4, 2 | 2018-09-04 |
End-Hall Ion Source With Enhanced Radiation Cooling App 20180012722 - KAUFMAN; Harold R. ;   et al. | 2018-01-11 |
End-hall ion source with enhanced radiation cooling Grant 8,994,258 - Kaufman , et al. March 31, 2 | 2015-03-31 |
End-hall ion source with enhanced radiation cooling App 20150084496 - Kaufman; Harold R. ;   et al. | 2015-03-26 |
Mitigation of plasma-inductor termination Grant 8,698,401 - Kaufman , et al. April 15, 2 | 2014-04-15 |
Mitigation of plasma-inductor termination App 20110163674 - Kaufman; Harold R. ;   et al. | 2011-07-07 |
Power supply for a hot-filament cathode Grant 7,843,138 - Geissler , et al. November 30, 2 | 2010-11-30 |
Industrial hollow cathode Grant 7,728,498 - Shonka , et al. June 1, 2 | 2010-06-01 |
Industrial hollow cathode with radiation shield structure Grant 7,667,379 - Kaufman , et al. February 23, 2 | 2010-02-23 |
Power supply for a hot-filament cathode App 20090309509 - Geissler; Steven J. ;   et al. | 2009-12-17 |
Industrial hollow cathode App 20070222358 - Shonka; Chris M. ;   et al. | 2007-09-27 |
Industrial hollow cathode with radiation shield structure App 20060132017 - Kaufman; Harold R. ;   et al. | 2006-06-22 |
Power supply for a hot-filament cathode Grant 6,911,789 - Geissler , et al. June 28, 2 | 2005-06-28 |
Pulsed operation of hall-current ion sources Grant 6,870,164 - Baldwin , et al. March 22, 2 | 2005-03-22 |
Ion optics with shallow dished grids Grant 6,864,485 - Kahn , et al. March 8, 2 | 2005-03-08 |
Apparatus for sputter deposition Grant 6,843,891 - Kahn , et al. January 18, 2 | 2005-01-18 |
Power supply for a hot-filament cathode App 20040183470 - Geissler, Steven J. ;   et al. | 2004-09-23 |
Hall-current ion source Grant 6,750,600 - Kaufman , et al. June 15, 2 | 2004-06-15 |
Ion-source neutralization with a hot-filament cathode-neutralizer Grant 6,724,160 - Kaufman , et al. April 20, 2 | 2004-04-20 |
Apparatus for sputter deposition Grant 6,682,634 - Kahn , et al. January 27, 2 | 2004-01-27 |
Industrial hollow cathode App 20040000853 - Kaufman, Harold R. ;   et al. | 2004-01-01 |
Ion-source neutralization with a hot-filament cathode-neutralizer App 20030193295 - Kaufman, Harold R. ;   et al. | 2003-10-16 |
Modular gridless ion source Grant 6,608,431 - Kaufman August 19, 2 | 2003-08-19 |
Hall-current ion source App 20020163289 - Kaufman, Harold R. ;   et al. | 2002-11-07 |
Magnetic Field For Small Closed-drift Ion Source App 20020145389 - Bugrova, Antonina Ivanovna ;   et al. | 2002-10-10 |
Ion-assisted magnetron deposition Grant 6,454,910 - Zhurin , et al. September 24, 2 | 2002-09-24 |
Ion optics with shallow dished grids App 20020074508 - Kahn, James R. ;   et al. | 2002-06-20 |
Sputter deposition using multiple targets App 20010045352 - Robinson, Raymond S. ;   et al. | 2001-11-29 |
Apparatus for sputter deposition App 20010004047 - Kahn, James R. ;   et al. | 2001-06-21 |
Closed drift ion source with improved magnetic field Grant 5,763,989 - Kaufman June 9, 1 | 1998-06-09 |
Capacitively coupled radiofrequency plasma source Grant 5,274,306 - Kaufman , et al. December 28, 1 | 1993-12-28 |
Radio frequency hollow cathode Grant 4,954,751 - Kaufman , et al. September 4, 1 | 1990-09-04 |
End-Hall ion source Grant 4,862,032 - Kaufman , et al. August 29, 1 | 1989-08-29 |
Broad-beam electron source Grant 4,684,848 - Kaufman , et al. August 4, 1 | 1987-08-04 |
Hollow cathode Grant 4,633,129 - Cuomo , et al. December 30, 1 | 1986-12-30 |
Hollow cathode enhanced magnetron sputter device Grant 4,588,490 - Cuomo , et al. May 13, 1 | 1986-05-13 |
Hall ion generator for working surfaces with a low energy high intensity ion beam Grant 4,541,890 - Cuomo , et al. September 17, 1 | 1985-09-17 |
Programmable ion beam patterning system Grant 4,523,971 - Cuomo , et al. June 18, 1 | 1985-06-18 |
Electron bombardment ion sources Grant 4,481,062 - Kaufman , et al. November 6, 1 | 1984-11-06 |
Compact plug connectable ion source Grant 4,446,403 - Cuomo , et al. May 1, 1 | 1984-05-01 |
Apparatus and method for neutralizing ion beams Grant 4,419,203 - Harper , et al. December 6, 1 | 1983-12-06 |
Ion source for reactive ion etching Grant 4,259,145 - Harper , et al. March 31, 1 | 1981-03-31 |
Electron-bombardment ion source including segmented anode of electrically conductive, magnetic material Grant 3,969,646 - Reader , et al. July 13, 1 | 1976-07-13 |
Electron-bombardment ion source including alternating potential means for cyclically varying the focussing of ion beamlets Grant 3,952,228 - Reader , et al. April 20, 1 | 1976-04-20 |
Electron-bombardment ion sources Grant 3,913,320 - Reader , et al. October 21, 1 | 1975-10-21 |
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