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Patent applications and USPTO patent grants for Katsuyama; Akiko.The latest application filed is for "pattern formation method".
Patent | Date |
---|---|
Pattern formation method Grant 6,673,523 - Kishimura , et al. January 6, 2 | 2004-01-06 |
Pattern formation method App 20030091941 - Kishimura, Shinji ;   et al. | 2003-05-15 |
Pattern formation method Grant 6,528,240 - Kishimura , et al. March 4, 2 | 2003-03-04 |
Method for forming hole pattern App 20020113035 - Shimomura, Koji ;   et al. | 2002-08-22 |
Pattern formation method App 20010049075 - Kishimura, Shinji ;   et al. | 2001-12-06 |
Resist composition for deep ultraviolet light Grant 5,695,910 - Urano , et al. December 9, 1 | 1997-12-09 |
Resist material Grant 5,558,971 - Urano , et al. September 24, 1 | 1996-09-24 |
Pattern formation method Grant 5,558,976 - Urano , et al. September 24, 1 | 1996-09-24 |
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