loadpatents
Patent applications and USPTO patent grants for Katsuoka; Seiji.The latest application filed is for "polishing apparatus".
Patent | Date |
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Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method Grant 11,426,834 - Miyazaki , et al. August 30, 2 | 2022-08-30 |
Polishing Apparatus App 20200269381 - Shinozaki; Hiroyuki ;   et al. | 2020-08-27 |
Polishing apparatus Grant 10,688,620 - Shinozaki , et al. | 2020-06-23 |
Substrate Processing Apparatus, Substrate Processing Method, Substrate Holding Mechanism, And Substrate Holding Method App 20200047309 - Miyazaki; Mitsuru ;   et al. | 2020-02-13 |
Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method Grant 10,486,285 - Miyazaki , et al. Nov | 2019-11-26 |
Polishing Apparatus And Polishing Method App 20180093360 - SHINOZAKI; Hiroyuki ;   et al. | 2018-04-05 |
Substrate Processing Apparatus, Substrate Processing Method, Substrate Holding Mechanism, And Substrate Holding Method App 20170252894 - MIYAZAKI; Mitsuru ;   et al. | 2017-09-07 |
Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method Grant 9,687,957 - Miyazaki , et al. June 27, 2 | 2017-06-27 |
Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method Grant 9,358,662 - Miyazaki , et al. June 7, 2 | 2016-06-07 |
Polishing apparatus and polishing method Grant 9,144,881 - Nakao , et al. September 29, 2 | 2015-09-29 |
Substrate Processing Apparatus, Substrate Processing Method, Substrate Holding Mechanism, And Substrate Holding Method App 20150050863 - MIYAZAKI; Mitsuru ;   et al. | 2015-02-19 |
Substrate Processing Apparatus, Substrate Processing Method, Substrate Holding Mechanism, And Substrate Holding Method App 20140302676 - MIYAZAKI; Mitsuru ;   et al. | 2014-10-09 |
Polishing Apparatus And Polishing Method App 20140242885 - Nakao; Hidetaka ;   et al. | 2014-08-28 |
Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method Grant 8,795,032 - Miyazaki , et al. August 5, 2 | 2014-08-05 |
Substrate holding apparatus, substrate holding method, and substrate processing apparatus Grant 8,777,198 - Sekimoto , et al. July 15, 2 | 2014-07-15 |
Method and apparatus for polishing object Grant 8,257,143 - Katsuoka , et al. September 4, 2 | 2012-09-04 |
Substrate processing method and apparatus Grant 8,225,803 - Katsuoka , et al. July 24, 2 | 2012-07-24 |
Substrate Holding Apparatus, Substrate Holding Method, And Substrate Processing Apparatus App 20120141246 - SEKIMOTO; Masahiko ;   et al. | 2012-06-07 |
Substrate holding apparatus, substrate holding method, and substrate processing apparatus Grant 8,141,513 - Sekimoto , et al. March 27, 2 | 2012-03-27 |
Substrate holder, plating apparatus, and plating method Grant 8,133,376 - Yoshioka , et al. March 13, 2 | 2012-03-13 |
Hand having rocking mechanism and substrate delivering device having the same Grant 8,038,136 - Sanemasa , et al. October 18, 2 | 2011-10-18 |
Substrate Polishing Apparatus And Method App 20110237163 - Katsuoka; Seiji ;   et al. | 2011-09-29 |
Substrate Processing Method And Apparatus App 20110203518 - KATSUOKA; Seiji ;   et al. | 2011-08-25 |
Substrate polishing apparatus and method Grant 7,976,362 - Katsuoka , et al. July 12, 2 | 2011-07-12 |
Substrate processing method and apparatus Grant 7,959,977 - Katsuoka , et al. June 14, 2 | 2011-06-14 |
Substrate Holding Apparatus, Substrate Holding Method, And Substrate Processing Apparatus App 20110094442 - SEKIMOTO; Masahiko ;   et al. | 2011-04-28 |
Substrate holding apparatus, substrate holding method, and substrate processing apparatus Grant 7,886,685 - Sekimoto , et al. February 15, 2 | 2011-02-15 |
Substrate Holder, Plating Apparatus, And Plating Method App 20100320090 - YOSHIOKA; Junichiro ;   et al. | 2010-12-23 |
Substrate holder, plating apparatus, and plating method Grant 7,807,027 - Yoshioka , et al. October 5, 2 | 2010-10-05 |
Substrate Processing Method And Apparatus App 20100221432 - Katsuoka; Seiji ;   et al. | 2010-09-02 |
Substrate holding apparatus Grant 7,735,450 - Katsuoka , et al. June 15, 2 | 2010-06-15 |
Substrate processing method and apparatus Grant 7,735,451 - Katsuoka , et al. June 15, 2 | 2010-06-15 |
Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method App 20090305612 - Miyazaki; Mitsuru ;   et al. | 2009-12-10 |
Substrate Polishing Apparatus And Method App 20090291624 - KATSUOKA; Seiji ;   et al. | 2009-11-26 |
Hand Having Rocking Mechanism And Substrate Delivering Device Having The Same App 20090236786 - SANEMASA; Hiroki ;   et al. | 2009-09-24 |
Substrate polishing apparatus and method Grant 7,585,205 - Katsuoka , et al. September 8, 2 | 2009-09-08 |
Method and apparatus for polishing object App 20090209176 - Katsuoka; Seiji ;   et al. | 2009-08-20 |
Substrate processing apparatus and substrate processing method Grant 7,575,636 - Katsuoka , et al. August 18, 2 | 2009-08-18 |
Substrate processing apparatus and substrate processing method Grant 7,442,257 - Katsuoka , et al. October 28, 2 | 2008-10-28 |
Substrate processing unit and substrate processing apparatus App 20080178800 - Katsuoka; Seiji ;   et al. | 2008-07-31 |
Electrolytic processing apparatus and substrate processing method Grant 7,374,646 - Suzuki , et al. May 20, 2 | 2008-05-20 |
Substrate processing unit and substrate processing apparatus Grant 7,368,016 - Katsuoka , et al. May 6, 2 | 2008-05-06 |
Substrate polishing apparatus and method App 20080085658 - Katsuoka; Seiji ;   et al. | 2008-04-10 |
Apparatus for and method of processing substrate Grant 7,341,634 - Yokoyama , et al. March 11, 2 | 2008-03-11 |
Substrate Cleaning Apparatus and Substrate Processing Unit App 20070277930 - Yokoyama; Toshi ;   et al. | 2007-12-06 |
Substrate processing apparatus and substrate processing method App 20070214620 - Miyazaki; Mitsuru ;   et al. | 2007-09-20 |
Substrate processing apparatus and substrate processing method Grant 7,235,135 - Miyazaki , et al. June 26, 2 | 2007-06-26 |
Substrate holding apparatus, substrate holding method, and substrate processing apparatus App 20070070575 - Sekimoto; Masahiko ;   et al. | 2007-03-29 |
Substrate processing apparatus and substrate processing method App 20060243205 - Katsuoka; Seiji ;   et al. | 2006-11-02 |
Substrate processing apparatus and substrate processing method App 20060243204 - Katsuoka; Seiji ;   et al. | 2006-11-02 |
Substrate processing apparatus and substrate processing method App 20060236929 - Katsuoka; Seiji ;   et al. | 2006-10-26 |
Polishing apparatus Grant 7,101,255 - Katsuoka , et al. September 5, 2 | 2006-09-05 |
Substrate processing apparatus and substrate processing method Grant 7,087,117 - Katsuoka , et al. August 8, 2 | 2006-08-08 |
Substrate processing unit and substrate processing apparatus App 20050281947 - Katsuoka, Seiji ;   et al. | 2005-12-22 |
Substrate processing apparatus App 20050236268 - Mishima, Koji ;   et al. | 2005-10-27 |
Polishing apparatus App 20050227596 - Katsuoka, Seiji ;   et al. | 2005-10-13 |
Substrate processing apparatus and substrate processing method App 20050158478 - Katsuoka, Seiji ;   et al. | 2005-07-21 |
Polishing apparatus Grant 6,918,814 - Katsuoka , et al. July 19, 2 | 2005-07-19 |
Substrate holder, plating apparatus, and plating method App 20050092600 - Yoshioka, Junichiro ;   et al. | 2005-05-05 |
Substrate processing apparatus and substrate processing method App 20050072358 - Katsuoka, Seiji ;   et al. | 2005-04-07 |
Method and apparatus for controlling electrolytic solution App 20050051434 - Mishima, Koji ;   et al. | 2005-03-10 |
Plating apparatus, plating method and substrate processing apparatus App 20050023149 - Nakada, Tsutomu ;   et al. | 2005-02-03 |
Substrate holder, plating apparatus, and plating method Grant 6,844,274 - Yoshioka , et al. January 18, 2 | 2005-01-18 |
Electrolytic solution supply and recovery facility and liquid component replenishment apparatus App 20040256221 - Mishima, Koji ;   et al. | 2004-12-23 |
Electrolytic processing apparatus and substrate processing method App 20040256238 - Suzuki, Hidenao ;   et al. | 2004-12-23 |
Substrate processing method and apparatus App 20040131766 - Katsuoka, Seiji ;   et al. | 2004-07-08 |
Apparatus for and method of processing substrate App 20040045502 - Yokoyama, Toshio ;   et al. | 2004-03-11 |
Substrate processing apparatus and substrate processing method App 20040040131 - Miyazaki, Mitsuru ;   et al. | 2004-03-04 |
Substrate holder, plating apparatus, and plating method App 20040037682 - Yoshioka, Junichiro ;   et al. | 2004-02-26 |
Polishing apparatus Grant 6,629,883 - Katsuoka , et al. October 7, 2 | 2003-10-07 |
Polishing apparatus App 20020124373 - Katsuoka, Seiji ;   et al. | 2002-09-12 |
Workpiece polishing apparatus comprising a fluid pressure bag provided between a pressing surface and the workpiece and method of use thereof Grant 6,435,949 - Katsuoka , et al. August 20, 2 | 2002-08-20 |
Polishing apparatus and method Grant 6,402,597 - Sakurai , et al. June 11, 2 | 2002-06-11 |
Apparatus and method for polishing workpiece Grant 6,354,918 - Togawa , et al. March 12, 2 | 2002-03-12 |
Polishing apparatus App 20020025764 - Katsuoka, Seiji ;   et al. | 2002-02-28 |
Polishing apparatus App 20010044266 - Katsuoka, Seiji ;   et al. | 2001-11-22 |
Polishing device Grant 6,293,858 - Kimura , et al. September 25, 2 | 2001-09-25 |
Polishing apparatus Grant 6,139,677 - Togawa , et al. October 31, 2 | 2000-10-31 |
Polishing apparatus Grant 5,860,847 - Sakurai , et al. January 19, 1 | 1999-01-19 |
Polishing apparatus Grant 5,839,947 - Kimura , et al. November 24, 1 | 1998-11-24 |
Dressing apparatus and method Grant 5,643,067 - Katsuoka , et al. July 1, 1 | 1997-07-01 |
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