loadpatents
Patent applications and USPTO patent grants for Katsunuma; Takayuki.The latest application filed is for "medical infusion pump, method of controlling medical infusion pump, and medical infusion pump system".
Patent | Date |
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Method and apparatus for controlling a shape of a pattern over a substrate Grant 11,443,954 - Katsunuma September 13, 2 | 2022-09-13 |
Method and device for controlling a thickness of a protective film on a substrate Grant 11,417,527 - Katsunuma August 16, 2 | 2022-08-16 |
Medical Infusion Pump, Method Of Controlling Medical Infusion Pump, And Medical Infusion Pump System App 20220241496 - Katsunuma; Takayuki ;   et al. | 2022-08-04 |
Substrate Processing Method And Substrate Processing System App 20220115235 - HISAMATSU; Toru ;   et al. | 2022-04-14 |
Method And Device For Controlling A Thickness Of A Protective Film On A Substrate App 20220068645 - KATSUNUMA; Takayuki | 2022-03-03 |
Substrate processing method Grant 11,264,236 - Hisamatsu , et al. March 1, 2 | 2022-03-01 |
Substrate processing method Grant 11,114,304 - Katsunuma , et al. September 7, 2 | 2021-09-07 |
Etching Method, Substrate Processing Apparatus, And Substrate Processing System App 20210233778 - TOMURA; Maju ;   et al. | 2021-07-29 |
Substrate Processing Method And Substrate Processing Apparatus App 20210202262 - NISHIDE; Daisuke ;   et al. | 2021-07-01 |
Method And Apparatus For Controlling A Shape Of A Pattern Over A Substrate App 20210175091 - Katsunuma; Takayuki | 2021-06-10 |
Method For Etching Film And Plasma Processing Apparatus App 20210151301 - NIIZEKI; Tomohiko ;   et al. | 2021-05-20 |
Method Of Etching Film And Plasma Processing Apparatus App 20210143019 - KATSUNUMA; Takayuki | 2021-05-13 |
Etching Method App 20210134604 - KATSUNUMA; Takayuki | 2021-05-06 |
Substrate Processing Method, Method For Manufacturing Semiconducor Device, And Plasma Processing Apparatus App 20210098234 - KATSUNUMA; Takayuki ;   et al. | 2021-04-01 |
Etching Method, Plasma Processing Apparatus, And Substrate Processing System App 20210082713 - KATSUNUMA; Takayuki ;   et al. | 2021-03-18 |
Plasma Etching Method App 20210050222 - Katsunuma; Takayuki | 2021-02-18 |
Method of etching film and plasma processing apparatus Grant 10,923,360 - Katsunuma February 16, 2 | 2021-02-16 |
Etching method Grant 10,916,442 - Katsunuma February 9, 2 | 2021-02-09 |
Plasma etching method Grant 10,854,470 - Katsunuma December 1, 2 | 2020-12-01 |
Plasma etching method Grant 10,854,430 - Katsunuma December 1, 2 | 2020-12-01 |
Etching method and plasma processing apparatus Grant 10,811,274 - Katsunuma October 20, 2 | 2020-10-20 |
Medical Pump, Method Of Controlling Medical Pump, And Medical Pump System App 20200206419 - Katsunuma; Takayuki | 2020-07-02 |
Substrate Processing Method App 20200194257 - HISAMATSU; Toru ;   et al. | 2020-06-18 |
Substrate Processing Method App 20200176265 - KATSUNUMA; Takayuki ;   et al. | 2020-06-04 |
Etching Method App 20200111679 - TABATA; Masahiro ;   et al. | 2020-04-09 |
Etching method Grant 10,541,147 - Tabata , et al. Ja | 2020-01-21 |
Method Of Etching Film And Plasma Processing Apparatus App 20190362984 - KATSUNUMA; Takayuki | 2019-11-28 |
Etching Method And Plasma Processing Apparatus App 20190318936 - KATSUNUMA; Takayuki | 2019-10-17 |
Plasma Etching Method App 20190139781 - Katsunuma; Takayuki | 2019-05-09 |
Fluidic pump Grant 10,195,339 - Katsunuma Fe | 2019-02-05 |
Selective plasma etching method of a first region containing a silicon atom and an oxygen atom Grant 10,090,191 - Tomura , et al. October 2, 2 | 2018-10-02 |
Plasma Etching Method App 20180151333 - KATSUNUMA; Takayuki | 2018-05-31 |
Etching Method App 20180130670 - KATSUNUMA; Takayuki | 2018-05-10 |
Etching method Grant 9,899,232 - Katsunuma February 20, 2 | 2018-02-20 |
Method of manufacturing a semiconductor device Grant 9,881,806 - Katsunuma , et al. January 30, 2 | 2018-01-30 |
Etching Method App 20170323825 - Tomura; Maju ;   et al. | 2017-11-09 |
Method for etching organic film Grant 9,735,027 - Lee , et al. August 15, 2 | 2017-08-15 |
Etching Method App 20170011939 - TABATA; Masahiro ;   et al. | 2017-01-12 |
Etching Method App 20160379834 - KATSUNUMA; Takayuki | 2016-12-29 |
Method For Etching Organic Film App 20160307775 - LEE; Chungjong ;   et al. | 2016-10-20 |
Plasma etching method and plasma etching apparatus Grant 9,460,897 - Katsunuma October 4, 2 | 2016-10-04 |
Etching method Grant 9,396,962 - Kitagaito , et al. July 19, 2 | 2016-07-19 |
Method Of Manufacturing A Semiconductor Device App 20160196981 - KATSUNUMA; Takayuki ;   et al. | 2016-07-07 |
Plasma etching method and semiconductor device manufacturing method Grant 9,330,930 - Kubota , et al. May 3, 2 | 2016-05-03 |
Method of manufacturing a semiconductor device Grant 9,318,340 - Katsunuma , et al. April 19, 2 | 2016-04-19 |
Plasma Etching Method And Plasma Etching Apparatus App 20150294841 - KATSUNUMA; Takayuki | 2015-10-15 |
Plasma etching method and plasma processing apparatus Grant 9,147,580 - Katsunuma , et al. September 29, 2 | 2015-09-29 |
Fluidic Pump App 20150265763 - KATSUNUMA; Takayuki | 2015-09-24 |
Etching Method App 20150243522 - Kitagaito; Keiji ;   et al. | 2015-08-27 |
Plasma processing method and plasma processing apparatus Grant 9,087,676 - Katsunuma , et al. July 21, 2 | 2015-07-21 |
Plasma Etching Method And Semiconductor Device Manufacturing Method App 20150187588 - KUBOTA; Kazuhiro ;   et al. | 2015-07-02 |
Plasma etching method and semiconductor device manufacturing method Grant 9,048,178 - Kubota , et al. June 2, 2 | 2015-06-02 |
Method Of Manufacturing A Semiconductor Device App 20140273486 - Katsunuma; Takayuki ;   et al. | 2014-09-18 |
Plasma Etching Method And Semiconductor Device Manufacturing Method App 20140234992 - Kubota; Kazuhiro ;   et al. | 2014-08-21 |
Plasma Processing Method And Plasma Processing Apparatus App 20140197135 - Katsunuma; Takayuki ;   et al. | 2014-07-17 |
Semiconductor device manufacturing method and computer-readable storage medium Grant 8,735,299 - Watanabe , et al. May 27, 2 | 2014-05-27 |
Plasma processing apparatus, plasma processing method and storage medium Grant 8,703,002 - Matsudo , et al. April 22, 2 | 2014-04-22 |
Plasma Etching Method And Plasma Processing Apparatus App 20130267094 - KATSUNUMA; Takayuki ;   et al. | 2013-10-10 |
Plasma Processing Apparatus, Plasma Processing Method And Storage Medium App 20130122714 - MATSUDO; Tatsuo ;   et al. | 2013-05-16 |
Semiconductor Device Manufacturing Method And Computer-readable Storage Medium App 20120225561 - Watanabe; Seiichi ;   et al. | 2012-09-06 |
Plasma Processing Apparatus, Plasma Processing Method And Storage Medium App 20090047795 - MATSUDO; Tatsuo ;   et al. | 2009-02-19 |
Etching method and etching apparatus Grant 7,189,653 - Katsunuma March 13, 2 | 2007-03-13 |
Etching method and etching apparatus App 20050150863 - Katsunuma, Takayuki | 2005-07-14 |
Plasma processing apparatus and processing method App 20030102087 - Ito, Youbun ;   et al. | 2003-06-05 |
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