Patent | Date |
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Method for producing silicon carbide single crystal and silicon carbide single crystal substrate Grant 10,711,369 - Sato , et al. | 2020-07-14 |
Silicon Carbide Single Crystal Substrate And Process For Producing Same App 20190024257 - SATO; Shinya ;   et al. | 2019-01-24 |
Silicon carbide single crystal substrate and process for producing same Grant 10,119,200 - Sato , et al. November 6, 2 | 2018-11-06 |
Low resistivity single crystal silicon carbide wafer Grant 9,915,011 - Fujimoto , et al. March 13, 2 | 2018-03-13 |
Method For Producing Silicon Carbide Single Crystal And Silicon Carbide Single Crystal Substrate App 20170342593 - SATO; Shinya ;   et al. | 2017-11-30 |
Single-crystal silicon carbide and single-crystal silicon carbide wafer Grant 9,777,403 - Nakabayashi , et al. October 3, 2 | 2017-10-03 |
Process for producing epitaxial silicon carbide single crystal substrate and epitaxial silicon carbide single crystal substrate obtained by the same Grant 9,691,607 - Aigo , et al. June 27, 2 | 2017-06-27 |
Silicon carbide single crystal wafer and manufacturing method for same Grant 9,234,297 - Sato , et al. January 12, 2 | 2016-01-12 |
Silicon Carbide Single Crystal Substrate And Process For Producing Same App 20150267319 - Sato; Shinya ;   et al. | 2015-09-24 |
Apparatus for manufacturing single-crystal silicon carbide Grant 9,068,277 - Nakabayashi , et al. June 30, 2 | 2015-06-30 |
Crucible vessel and crucible cover having grooves for producing single-crystal silicon carbide, production apparatus and method Grant 8,936,680 - Katsuno , et al. January 20, 2 | 2015-01-20 |
Production process of epitaxial silicon carbide single crystal substrate Grant 8,927,396 - Aigo , et al. January 6, 2 | 2015-01-06 |
Silicon Carbide Single Crystal Wafer And Manufacturing Method For Same App 20140363607 - Sato; Shinya ;   et al. | 2014-12-11 |
Epitaxial silicon carbide single crystal substrate and process for producing the same Grant 8,901,570 - Aigo , et al. December 2, 2 | 2014-12-02 |
Epitaxial Silicon Carbide Single Crystal Substrate And Method For Producing Same App 20130320357 - Aigo; Takashi ;   et al. | 2013-12-05 |
Production Process Of Epitaxial Silicon Carbide Single Crystal Substrate App 20130217213 - Aigo; Takashi ;   et al. | 2013-08-22 |
Epitaxial Silicon Carbide Single Crystal Substrate And Process For Producing The Same App 20130049014 - Aigo; Takashi ;   et al. | 2013-02-28 |
Process For Producing Epitaxial Silicon Carbide Single Crystal Substrate And Epitaxial Silicon Carbide Single Crystal Substrate Obtained By The Same App 20130029158 - Aigo; Takashi ;   et al. | 2013-01-31 |
Crucible For Producing Single-crystal Silicon Carbide, And Production Apparatus And Production Method For Producing Single-crystal Silicon Carbide App 20110308449 - Katsuno; Masakazu ;   et al. | 2011-12-22 |
SiC single-crystal substrate and method of producing SiC single-crystal substrate Grant 8,044,408 - Fujimoto , et al. October 25, 2 | 2011-10-25 |
Single-crystal Silicon Carbide And Single-crystal Silicon Carbide Wafer App 20110206929 - Nakabayashi; Masashi ;   et al. | 2011-08-25 |
Single-crystal silicon carbide ingot, and substrate and epitaxial wafer obtained therefrom Grant 7,972,704 - Ohtani , et al. July 5, 2 | 2011-07-05 |
Sic Single-crystal Substrate And Method Of Producing Sic Single-crystal Substrate App 20100295059 - FUJIMOTO; Tatsuo ;   et al. | 2010-11-25 |
Single-crystal Silicon Carbide Ingot, And Substrate And Epitaxial Wafer Obtained Therefrom App 20100289033 - Ohtani; Noboru ;   et al. | 2010-11-18 |
Seed crystal consisting of silicon carbide single crystal and method for producing ingot using the same App 20100089311 - Ohtani; Noboru ;   et al. | 2010-04-15 |
Seed crystal consisting of silicon carbide single crysatal and method for producing ingot using the same App 20100083897 - Ohtani; Noboru ;   et al. | 2010-04-08 |
Low resistivity single crystal silicon carbide wafer App 20100080956 - Fujimoto; Tatsuo ;   et al. | 2010-04-01 |
Apparatus For Manufacturing Single-crystal Silicon Carbide App 20090205565 - Nakabayashi; Masashi ;   et al. | 2009-08-20 |
Seed crystal consisting of silicon carbide carbide single crystal and method for producing ingot using the same App 20080020212 - Ohtani; Noboru ;   et al. | 2008-01-24 |
Seed crystal of silicon carbide single crystal and method for producing ingot using same App 20050160965 - Ohtani, Noboru ;   et al. | 2005-07-28 |