| Patent | Date |
|---|
All-solid-state lithium battery and method for manufacturing same
Grant 11,404,683 - Tanaka , et al. August 2, 2 | 2022-08-02 |
Sintered compact, circuit component, and method of producing sintered compact
Grant 11,332,410 - Atsuji , et al. May 17, 2 | 2022-05-17 |
Composite sintered body, semiconductor manufacturing apparatus member, and method of manufacturing composite sintered body
Grant 11,230,502 - Yagi , et al. January 25, 2 | 2022-01-25 |
All-solid-state Secondary Battery
App 20210408584 - ONISHI; Harunobu ; et al. | 2021-12-30 |
Solid Electrolyte And Method For Producing Solid Electrolyte
App 20210408583 - MIYAZAKI; Reona ; et al. | 2021-12-30 |
Cordierite-based sintered body, method for producing the same, and composite substrate
Grant 11,198,648 - Isoda , et al. December 14, 2 | 2021-12-14 |
MgO-based ceramic film, member for semiconductor manufacturing apparatus, and method for forming MgO-based ceramic film
Grant 11,152,195 - Sato , et al. October 19, 2 | 2021-10-19 |
Ceramic structure, member for substrate-holding apparatus, and method for producing the ceramic structure
Grant 11,011,404 - Katsuda , et al. May 18, 2 | 2021-05-18 |
Composite substrate, method for producing the same, and electronic device
Grant 10,998,881 - Nomoto , et al. May 4, 2 | 2021-05-04 |
Solid electrolyte, all-solid-state lithium-ion secondary battery, production method for solid electrolyte
Grant 10,964,974 - Kojima , et al. March 30, 2 | 2021-03-30 |
Lithium Ion Conductive Material, All-solid-state Secondary Battery, And Method Of Manufacturing Solid Electrolyte
App 20210009434 - KOJIMA; Miyuki ; et al. | 2021-01-14 |
Composite Sintered Body, Semiconductor Manufacturing Apparatus Member, And Method Of Manufacturing Composite Sintered Body
App 20200407279 - ATSUJI; Kyohei ; et al. | 2020-12-31 |
Ceramic structure, method for manufacturing the same, and member for semiconductor manufacturing apparatus
Grant 10,863,587 - Atsuji , et al. December 8, 2 | 2020-12-08 |
Composite Sintered Body, Semiconductor Manufacturing Apparatus Member, And Method Of Manufacturing Composite Sintered Body
App 20200350196 - NAGAI; Asumi ; et al. | 2020-11-05 |
Solid Electrolyte
App 20200343585 - MIYAZAKI; Reona ; et al. | 2020-10-29 |
All-solid-state Lithium Battery And Method For Manufacturing Same
App 20200280047 - TANAKA; Kei ; et al. | 2020-09-03 |
Secondary Battery
App 20200266494 - TAKEUCHI; Yukihisa ; et al. | 2020-08-20 |
All-solid Lithium Battery And Method Of Manufacturing Same
App 20200259217 - A1 | 2020-08-13 |
Sintered Compact, Circuit Component, And Method Of Producing Sintered Compact
App 20200165168 - ATSUJI; Kyohei ; et al. | 2020-05-28 |
Member for semiconductor manufacturing apparatus, method for producing the same, and heater including shaft
Grant 10,631,370 - Nagai , et al. | 2020-04-21 |
Composite Sintered Body, Semiconductor Manufacturing Apparatus Member, And Method Of Manufacturing Composite Sintered Body
App 20190292105 - YAGI; En ; et al. | 2019-09-26 |
Sialon sintered body, method for producing the same, composite substrate, and electronic device
Grant 10,399,906 - Nomoto , et al. Sep | 2019-09-03 |
Composite Substrate, Method For Producing The Same, And Electronic Device
App 20190207585 - NOMOTO; Yuki ; et al. | 2019-07-04 |
Bonding material composition, aluminum nitride bonded body, and method for producing the same
Grant 10,293,581 - Goto , et al. | 2019-05-21 |
Solid Electrolyte, All-solid-state Lithium-ion Secondary Battery, Production Method For Solid Electrolyte
App 20190006710 - KOJIMA; Miyuki ; et al. | 2019-01-03 |
Mullite-containing sintered body, method for manufacturing the same, and composite substrate
Grant 9,981,876 - Isoda , et al. May 29, 2 | 2018-05-29 |
Sialon Sintered Body, Method For Producing The Same, Composite Substrate, And Electronic Device
App 20180079690 - NOMOTO; Yuki ; et al. | 2018-03-22 |
Ceramic member, member for semiconductor manufacturing apparatus, and method for manufacturing ceramic member
Grant 9,892,950 - Watanabe , et al. February 13, 2 | 2018-02-13 |
Ceramic material, method for manufacturing the same, and semiconductor manufacturing apparatus member
Grant 9,856,147 - Sato , et al. January 2, 2 | 2018-01-02 |
Mullite sintered body, method for producing the same, and composite substrate
Grant 9,776,924 - Isoda , et al. October 3, 2 | 2017-10-03 |
Mullite-containing Sintered Body, Method For Manufacturing The Same, And Composite Substrate
App 20170275206 - ISODA; Yoshinori ; et al. | 2017-09-28 |
Cordierite-based Sintered Body, Method For Producing The Same, And Composite Substrate
App 20170275207 - ISODA; Yoshinori ; et al. | 2017-09-28 |
Cordierite sintered body, method for manufacturing the same, composite substrate, and electronic device
Grant 9,771,303 - Isoda , et al. September 26, 2 | 2017-09-26 |
Ceramic Structure, Method For Manufacturing The Same, And Member For Semiconductor Manufacturing Apparatus
App 20170251524 - ATSUJI; Kyohei ; et al. | 2017-08-31 |
Member For Semiconductor Manufacturing Apparatus, Method For Producing The Same, And Heater Including Shaft
App 20170127475 - NAGAI; Asumi ; et al. | 2017-05-04 |
Ceramic Structure, Member For Substrate-holding Apparatus, And Method For Producing The Ceramic Structure
App 20170117175 - KATSUDA; Yuji ; et al. | 2017-04-27 |
MgO-BASED CERAMIC FILM, MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS, AND METHOD FOR FORMING MgO-BASED CERAMIC FILM
App 20170117120 - SATO; Yosuke ; et al. | 2017-04-27 |
Thermal spray coating, member for semiconductor manufacturing equipment, feedstock material for thermal spray, and method for producing thermal spray coating
Grant 9,567,467 - Sato , et al. February 14, 2 | 2017-02-14 |
Ceramic Material, Method For Manufacturing The Same, And Semiconductor Manufacturing Apparatus Member
App 20170029286 - SATO; Yosuke ; et al. | 2017-02-02 |
Thermal Spray Coating, Member For Semiconductor Manufacturing Equipment, Feedstock Material For Thermal Spray, And Method For Producing Thermal Spray Coating
App 20160376196 - SATO; Yosuke ; et al. | 2016-12-29 |
Bonding Material Composition, Aluminum Nitride Bonded Body, And Method For Producing The Same
App 20160361900 - GOTO; Masashi ; et al. | 2016-12-15 |
Bonding material composition, aluminum nitride bonded body, and method for producing the same
Grant 9,481,813 - Goto , et al. November 1, 2 | 2016-11-01 |
Ceramic material and sputtering target member
Grant 9,475,733 - Sato , et al. October 25, 2 | 2016-10-25 |
Cordierite Sintered Body, Method For Manufacturing The Same, Composite Substrate, And Electronic Device
App 20160264471 - ISODA; Yoshinori ; et al. | 2016-09-15 |
Heating device
Grant 9,437,463 - Kondo , et al. September 6, 2 | 2016-09-06 |
Ceramic material and sputtering target member
Grant 9,409,824 - Sato , et al. August 9, 2 | 2016-08-09 |
Mullite Sintered Body, Method For Producing The Same, And Composite Substrate
App 20160185668 - ISODA; Yoshinori ; et al. | 2016-06-30 |
Heating device
Grant 9,287,144 - Kondo , et al. March 15, 2 | 2016-03-15 |
Cooling plate, method for manufacturing the same, and member for semiconductor manufacturing apparatus
Grant 9,255,747 - Jindo , et al. February 9, 2 | 2016-02-09 |
Lanthanum boride sintered body and method for producing the same
Grant 9,257,210 - Hattori , et al. February 9, 2 | 2016-02-09 |
Cooling plate, method for manufacturing the same, and member for semiconductor manufacturing apparatus
Grant 9,257,315 - Jindo , et al. February 9, 2 | 2016-02-09 |
Heating device
Grant 9,245,775 - Kondo , et al. January 26, 2 | 2016-01-26 |
Electrostatic chuck
Grant 9,202,718 - Aikawa , et al. December 1, 2 | 2015-12-01 |
Dense composite material, method for producing the same, and component for semiconductor production equipment
Grant 9,188,397 - Jindo , et al. November 17, 2 | 2015-11-17 |
Dense composite material, method for manufacturing the same, joined body, and member for semiconductor manufacturing apparatuses
Grant 9,184,070 - Jindo , et al. November 10, 2 | 2015-11-10 |
Electrostatic chuck
Grant 9,184,081 - Aikawa , et al. November 10, 2 | 2015-11-10 |
Laminated structure, member for semiconductor manufacturing apparatus, and method for producing laminated structure
Grant 9,142,439 - Jindo , et al. September 22, 2 | 2015-09-22 |
Ceramic Material And Sputtering Target Member
App 20150225298 - SATO; Yosuke ; et al. | 2015-08-13 |
Ceramic Material And Sputtering Target Member
App 20150225297 - SATO; Yosuke ; et al. | 2015-08-13 |
Sintered ceramic body, manufacturing method thereof, and ceramic structure
Grant 9,073,789 - Izumi , et al. July 7, 2 | 2015-07-07 |
Bonding Material Composition, Aluminum Nitride Bonded Body, And Method For Producing The Same
App 20150184030 - GOTO; Masashi ; et al. | 2015-07-02 |
Thermal Spray Coating, Member For Semiconductor Manufacturing Equipment, Feedstock Material For Thermal Spray, And Method For Producing Thermal Spray Coating
App 20150159020 - SATO; Yosuke ; et al. | 2015-06-11 |
Cooling Plate, Method For Manufacturing The Same, And Member For Semiconductor Manufacturing Apparatus
App 20150077895 - JINDO; Asumi ; et al. | 2015-03-19 |
Cooling Plate, Method For Manufacturing The Same, And Member For Semiconductor Manufacturing Apparatus
App 20150036261 - JINDO; Asumi ; et al. | 2015-02-05 |
Member for semiconductor manufacturing apparatus
Grant 8,908,349 - Kida , et al. December 9, 2 | 2014-12-09 |
Ceramic Member, Member For Semiconductor Manufacturing Apparatus, And Method For Manufacturing Ceramic Member
App 20140290863 - WATANABE; Morimichi ; et al. | 2014-10-02 |
Dense Composite Material, Method For Manufacturing The Same, Joined Body, And Member For Semiconductor Manufacturing Apparatuses
App 20140287245 - JINDO; Asumi ; et al. | 2014-09-25 |
Dense Composite Material, Method For Producing The Same, And Component For Semiconductor Production Equipment
App 20140272378 - JINDO; Asumi ; et al. | 2014-09-18 |
Corrosion-resistant member for semiconductor manufacturing apparatus and method for manufacturing the same
Grant 8,685,313 - Watanabe , et al. April 1, 2 | 2014-04-01 |
Corrosion-resistant member for semiconductor manufacturing apparatus and method for manufacturing the same
Grant 8,679,998 - Watanabe , et al. March 25, 2 | 2014-03-25 |
Laminated Structure, Member For Semiconductor Manufacturing Apparatus, And Method For Producing Laminated Structure
App 20140079946 - JINDO; Asumi ; et al. | 2014-03-20 |
Lanthanum Boride Sintered Body And Method For Producing The Same
App 20140061553 - HATTORI; Tetsuya ; et al. | 2014-03-06 |
Sintered Ceramic Body, Manufacturing Method Thereof, And Ceramic Structure
App 20140021662 - IZUMI; Yunie ; et al. | 2014-01-23 |
Sintered ceramic body, manufacturing method thereof, and ceramic structure
Grant 8,603,625 - Izumi , et al. December 10, 2 | 2013-12-10 |
Ceramic material, laminate, member for use in semiconductor manufacturing equipment, and sputtering target member
Grant 8,597,776 - Watanabe , et al. December 3, 2 | 2013-12-03 |
Ceramic material, member for semiconductor manufacturing equipment, sputtering target member and method for producing ceramic material
Grant 8,541,328 - Watanabe , et al. September 24, 2 | 2013-09-24 |
Electrostatic Chuck
App 20130235507 - AIKAWA; Kenichiro ; et al. | 2013-09-12 |
Heating Device
App 20130228565 - KONDO; Nobuyuki ; et al. | 2013-09-05 |
Electrostatic Chuck
App 20130229746 - AIKAWA; Kenichiro ; et al. | 2013-09-05 |
Heating Device
App 20130228566 - KONDO; Nobuyuki ; et al. | 2013-09-05 |
Heating Device
App 20130220988 - KONDO; Nobuyuki ; et al. | 2013-08-29 |
Corrosion-resistant Member For Semiconductor Manufacturing Apparatus And Method For Manufacturing The Same
App 20130023401 - WATANABE; Morimichi ; et al. | 2013-01-24 |
Corrosion-resistant Member For Semiconductor Manufacturing Apparatus And Method For Manufacturing The Same
App 20130022526 - WATANABE; Morimichi ; et al. | 2013-01-24 |
Member For Semiconductor Manufacturing Apparatus
App 20120250211 - Kida; Masahiro ; et al. | 2012-10-04 |
Ceramic Material, Member For Semiconductor Manufacturing Equipment, Sputtering Target Member And Method For Producing Ceramic Material
App 20120231945 - WATANABE; Morimichi ; et al. | 2012-09-13 |
Ceramic Material, Laminate, Member For Use In Semiconductor Manufacturing Equipment, And Sputtering Target Member
App 20120231243 - Watanabe; Morimichi ; et al. | 2012-09-13 |
Aluminum oxide sintered product and method for producing the same
Grant 8,236,722 - Teratani , et al. August 7, 2 | 2012-08-07 |
Aluminum-nitride-based composite material, method for manufacturing the same, and member for a semiconductor manufacturing apparatus
Grant 8,231,985 - Kobayashi , et al. July 31, 2 | 2012-07-31 |
Aluminum oxide sintered body, method for producing the same and member for semiconductor producing apparatus
Grant 8,231,964 - Teratani , et al. July 31, 2 | 2012-07-31 |
Aluminum-nitride-based composite material, method for manufacturing the same, and member for a semiconductor manufacturing apparatus
Grant 8,226,865 - Kobayashi , et al. July 24, 2 | 2012-07-24 |
Alumina sintered body, method for manufacturing the same, and semiconductor manufacturing apparatus member
Grant 8,178,455 - Teratani , et al. May 15, 2 | 2012-05-15 |
Aluminum-nitride-based Composite Material, Method For Manufacturing The Same, And Member For A Semiconductor Manufacturing Apparatus
App 20120052326 - Kobayashi; Yoshimasa ; et al. | 2012-03-01 |
Method for manufacturing cordierite ceramics
Grant 8,097,549 - Watanabe , et al. January 17, 2 | 2012-01-17 |
Cordierite ceramic and method of producing the same
Grant 8,058,198 - Yamazaki , et al. November 15, 2 | 2011-11-15 |
Aluminum nitride sintered product, method for producing the same, and electrostatic chuck including the same
Grant 8,022,001 - Teratani , et al. September 20, 2 | 2011-09-20 |
Sintered Ceramic Body, Manufacturing Method Thereof, And Ceramic Structure
App 20110117360 - IZUMI; Yunie ; et al. | 2011-05-19 |
Yttrium oxide material, member for semiconductor-manufacturing apparatus, and method for producing yttrium oxide material
Grant 7,915,189 - Kobayashi , et al. March 29, 2 | 2011-03-29 |
Cordierite ceramic and method for manufacturing the same
Grant 7,842,370 - Ono , et al. November 30, 2 | 2010-11-30 |
Yttrium oxide-containing material, component of semiconductor manufacturing equipment, and method of producing yttrium oxide-containing material
Grant 7,833,924 - Kobayashi , et al. November 16, 2 | 2010-11-16 |
Alumina Sintered Body, Method For Manufacturing The Same, And Semiconductor Manufacturing Apparatus Member
App 20100248935 - Teratani; Naomi ; et al. | 2010-09-30 |
Aluminum nitride sintered body and semiconductor manufacturing apparatus member
Grant 7,803,733 - Teratani , et al. September 28, 2 | 2010-09-28 |
Aluminum Oxide Sintered Body, Method For Producing The Same And Member For Semiconductor Producing Apparatus
App 20100227145 - TERATANI; Naomi ; et al. | 2010-09-09 |
Composite material and method of producing the same
Grant 7,776,774 - Kobayashi , et al. August 17, 2 | 2010-08-17 |
Yttrium oxide material, member for use in semiconductor manufacturing apparatus, and method for producing yttrium oxide material
Grant 7,744,780 - Kobayashi , et al. June 29, 2 | 2010-06-29 |
Aluminum Nitride Sintered Product, Method For Producing The Same, And Electrostatic Chuck Including The Same
App 20100128409 - TERATANI; Naomi ; et al. | 2010-05-27 |
Aluminum-nitride-based Composite Material, Method For Manufacturing The Same, And Member For A Semiconductor Manufacturing Apparatus
App 20100104892 - KOBAYASHI; Yoshimasa ; et al. | 2010-04-29 |
Aluminum Oxide Sintered Product And Method For Producing The Same
App 20100056358 - TERATANI; Naomi ; et al. | 2010-03-04 |
Method For Manufacturing Cordierite Ceramics
App 20090247389 - Watanabe; Atsushi ; et al. | 2009-10-01 |
Cordierite Ceramic And Method Of Producing The Same
App 20090239734 - Yamazaki; Satoshi ; et al. | 2009-09-24 |
Yttrium Oxide Material, Member For Semiconductor-manufacturing Apparatus, And Method For Producing Yttrium Oxide Material
App 20090233087 - KOBAYASHI; Yoshimasa ; et al. | 2009-09-17 |
Yttrium Oxide Material, Member For Use In Semiconductor Manufacturing Apparatus, And Method For Producing Yttrium Oxide Material
App 20090200523 - KOBAYASHI; Yoshimasa ; et al. | 2009-08-13 |
Composite Material And Method Of Producing The Same
App 20080237543 - Kobayashi; Yoshimasa ; et al. | 2008-10-02 |
Aluminum Nitride Sintered Body And Semiconductor Manufacturing Apparatus Member
App 20080242531 - Teratani; Naomi ; et al. | 2008-10-02 |
Yttrium Oxide-containing Material, Component Of Semiconductor Manufacturing Equipment, And Method Of Producing Yttrium Oxide-containing Material
App 20080226894 - KOBAYASHI; Yoshimasa ; et al. | 2008-09-18 |
Cordierite Ceramic And Method For Manufacturing The Same
App 20080124515 - ONO; Yohei ; et al. | 2008-05-29 |
Aluminum nitride ceramics and a member used for the production of semiconductors
Grant 7,148,166 - Teratani , et al. December 12, 2 | 2006-12-12 |
Aluminum nitride materials and members used for the production of semiconductors
Grant 6,919,287 - Teratani , et al. July 19, 2 | 2005-07-19 |
Aluminum nitride ceramics, members for use in a system for producing semiconductors, and corrosion resistant members
Grant 6,919,286 - Yoshikawa , et al. July 19, 2 | 2005-07-19 |
Aluminum nitride ceramics, members for use in a system for producing semiconductors, corrosion resistant members and conductive members
Grant 6,884,742 - Katsuda , et al. April 26, 2 | 2005-04-26 |
Aluminum nitride sintered bodies and members for semiconductor-producing apparatuses
Grant 6,800,576 - Katsuda , et al. October 5, 2 | 2004-10-05 |
Halogen gas plasma-resistive members and method for producing the same, laminates, and corrosion-resistant members
Grant 6,783,875 - Yamada , et al. August 31, 2 | 2004-08-31 |
Aluminum nitride ceramics and a member used for the production of semiconductors
App 20040096706 - Teratani, Naomi ; et al. | 2004-05-20 |
Aluminum nitride materials and members used for the production of semiconductors
App 20030203804 - Teratani, Naomi ; et al. | 2003-10-30 |
Corrosion-resistant member, wafer-supporting member, and method of manufacturing the same
Grant 6,632,549 - Ohashi , et al. October 14, 2 | 2003-10-14 |
Material of low volume resistivity, an aluminum nitride sintered body and a member used for the production of semiconductors
Grant 6,607,836 - Katsuda , et al. August 19, 2 | 2003-08-19 |
Aluminum nitride ceramics, members for use in a system for producing semiconductors, corrosion resistant members and conductive members
App 20030153452 - Katsuda, Yuji ; et al. | 2003-08-14 |
Aluminum nitride ceramics, members for use in a system for producing semiconductors, and corrosion resistant members
App 20030130106 - Yoshikawa, Jun ; et al. | 2003-07-10 |
Aluminum nitride sintered bodies and semiconductor-producing members including same
Grant 6,486,085 - Katsuda , et al. November 26, 2 | 2002-11-26 |
Aluminum nitride sintered bodies and members for semiconductor-producing apparatuses
App 20020165079 - Katsuda, Yuji ; et al. | 2002-11-07 |
Material of low volume resistivity, an aluminum nitride sintered body and a member used for the production of semiconductors
App 20020110709 - Katsuda, Yuji ; et al. | 2002-08-15 |
Halogen gas plasma-resistive members and method for producing the same, laminates, and corrosion-resistant members
App 20020018921 - Yamada, Hirotake ; et al. | 2002-02-14 |
Composite sintered bodies and a process for producing the same
App 20010031334 - Katsuda, Yuji ; et al. | 2001-10-18 |
Electrically heated substrate with multiple ceramic parts each having different volume resitivities
App 20010006172 - Katsuda, Yuji ; et al. | 2001-07-05 |
Aluminum nitride-based sintered bodies, corrosion-resistant members, metal-buried articles and semiconductor-holding apparatuses
Grant 6,239,402 - Araki , et al. May 29, 2 | 2001-05-29 |
Electrically heated substrate with multiple ceramic parts each having different volume restivities
Grant 6,204,489 - Katsuda , et al. March 20, 2 | 2001-03-20 |
Corrosion-resistant member, wafer-supporting member, and method of manufacturing the same
Grant 6,139,983 - Ohashi , et al. October 31, 2 | 2000-10-31 |
Semiconductor supporting device
Grant 6,051,303 - Katsuda , et al. April 18, 2 | 2000-04-18 |
Aluminum nitride sintered body, metal embedded article, electronic functional material and electrostatic chuck
Grant 6,001,760 - Katsuda , et al. December 14, 1 | 1999-12-14 |
Apparatus and method for measuring concentrations of gas components
Grant 5,602,326 - Takahashi , et al. February 11, 1 | 1997-02-11 |
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