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Wavefront aberration measuring method, wavefront aberration measuring apparatus and optical element manufacturing method Grant 9,557,241 - Kato January 31, 2 | 2017-01-31 |
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Refractive-index Distribution Measuring Method, Refractive-index Distribution Measuring Apparatus, Method Of Manufacturing Optical Element, And Non-transitory Computer-readable Storage Medium App 20150260605 - Kato; Seima | 2015-09-17 |
Wavefront Aberration Measuring Method, Wavefront Aberration Measuring Apparatus And Optical Element Manufacturing Method App 20140293275 - Kato; Seima | 2014-10-02 |
Transmitted wavefront measuring method, refractive-index distribution measuring method, and transmitted wavefront measuring apparatus that calculate a frequency distribution and obtain a transmitted wavefront of the object based on a primary frequency spectrum in the frequency distribution Grant 8,786,863 - Kato July 22, 2 | 2014-07-22 |
Refractive index distribution measuring method and refractive index distribution measuring apparatus Grant 8,525,982 - Kato September 3, 2 | 2013-09-03 |
Talbot interferometer, its adjustment method, and measurement method Grant 8,520,217 - Naoi , et al. August 27, 2 | 2013-08-27 |
Refractive index distribution measuring method and apparatus using position measurement and a reference object Grant 8,508,725 - Kato August 13, 2 | 2013-08-13 |
Refractive index distribution measuring method and apparatus, and method of producing optical element thereof, that use multiple transmission wavefronts of a test object immersed in at least one medium having a different refractive index from that of the test object and multiple reference transmissi Grant 8,477,297 - Kato July 2, 2 | 2013-07-02 |
Refractive index distribution measurement method and apparatus that measure transmission wavefronts of a test object immersed in different media having refractive index lower than that of the test object Grant 8,472,013 - Kato June 25, 2 | 2013-06-25 |
Refractive Index Distribution Measuring Method, Refractive Index Distribution Measuring Apparatus And Method Of Producing Optical Element App 20120139136 - Kato; Seima | 2012-06-07 |
Wavefront aberration measuring method, mask, wavefront aberration measuring device, exposure apparatus, and device manufacturing method Grant 8,077,391 - Ouchi , et al. December 13, 2 | 2011-12-13 |
Refractive Index Distribution Measuring Method And Refractive Index Distribution Measuring Apparatus App 20110292379 - Kato; Seima | 2011-12-01 |
Measuring apparatus, exposure apparatus and method, and device manufacturing method Grant 8,004,691 - Ouchi , et al. August 23, 2 | 2011-08-23 |
Refractive Index Distribution Measuring Method And Refractive Index Distribution Measuring Apparatus App 20110134438 - Kato; Seima | 2011-06-09 |
Measurement apparatus, exposure apparatus having the same, and device manufacturing method Grant 7,952,726 - Kato , et al. May 31, 2 | 2011-05-31 |
Talbot Interferometer, Its Adjustment Method, And Measurement Method App 20100271636 - Naoi; Toshiyuki ;   et al. | 2010-10-28 |
Transmitted Wavefront Measuring Method, Refractive-index Distribution Measuring Method, Method Of Manufacturing Optical Element, And Transmitted Wavefront Measuring Apparatus App 20100245842 - Kato; Seima | 2010-09-30 |
Measurement Apparatus, Exposure Apparatus Having The Same, And Device Manufacturing Method App 20100190115 - Kato; Seima ;   et al. | 2010-07-29 |
Refractive Index Distribution Measurement Method And Refractive Index Distribution Measurement Apparatus App 20100165355 - Kato; Seima | 2010-07-01 |
Measurement apparatus, exposure apparatus, and device fabrication method Grant 7,692,799 - Kato April 6, 2 | 2010-04-06 |
Measuring Apparatus, Exposure Apparatus And Method, And Device Manufacturing Method App 20090290136 - Ouchi; Chidane ;   et al. | 2009-11-26 |
Exposure Apparatus And Device Manufacturing Method App 20090268188 - Kato; Seima ;   et al. | 2009-10-29 |
Wavefront Aberration Measuring Method, Mask, Wavefront Aberration Measuring Device, Exposure Apparatus, And Device Manufacturing Method App 20090213389 - Ouchi; Chidane ;   et al. | 2009-08-27 |
Method and apparatus for analyzing interference fringe Grant 7,474,413 - Kato January 6, 2 | 2009-01-06 |
Apparatus for measuring optical properties of tested optical system using interference Grant 7,443,515 - Kato October 28, 2 | 2008-10-28 |
Measurement Apparatus, Exposure Apparatus, And Device Fabrication Method App 20080186509 - Kato; Seima | 2008-08-07 |
Measuring method and apparatus using interference, exposure method and apparatus using the same, and device fabrication method Grant 7,283,252 - Kato October 16, 2 | 2007-10-16 |
Method and apparatus for analyzing interference fringe App 20060203253 - Kato; Seima | 2006-09-14 |
Exposure apparatus App 20060072091 - Kato; Seima | 2006-04-06 |
Apparatus for measuring optical properties of tested optical system using interference App 20060044569 - Kato; Seima | 2006-03-02 |
Measuring method and apparatus using interference, exposure method and apparatus using the same, and device fabrication method App 20050117171 - Kato, Seima | 2005-06-02 |