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Illumination optical system, exposure apparatus, device production method, and light polarization unit
Grant 10,691,026 - Tanitsu , et al. | 2020-06-23 |
Illumination optical assembly, exposure device, and device manufacturing method
Grant 10,564,550 - Miyake , et al. Feb | 2020-02-18 |
Illumination optical assembly, exposure device, and device manufacturing method
Grant 10,353,294 - Miyake , et al. July 16, 2 | 2019-07-16 |
Illumination Optical Assembly, Exposure Device, And Device Manufacturing Method
App 20190163068 - MIYAKE; Norio ; et al. | 2019-05-30 |
Illumination Optical System, Exposure Apparatus, Device Production Method, And Light Polarization Unit
App 20190137887 - TANITSU; Osamu ; et al. | 2019-05-09 |
Illumination optical system, exposure apparatus, device production method, and light polarization unit
Grant 10,175,583 - Tanitsu , et al. J | 2019-01-08 |
Illumination Optical System, Exposure Apparatus, Device Production Method, And Light Polarization Unit
App 20170184978 - TANITSU; Osamu ; et al. | 2017-06-29 |
Illumination Optical Assembly, Exposure Device, And Device Manufacturing Method
App 20170090297 - MIYAKE; Norio ; et al. | 2017-03-30 |
Illumination optical system, exposure apparatus, device production method, and light polarization unit
Grant 9,599,905 - Tanitsu , et al. March 21, 2 | 2017-03-21 |
Illumination optical assembly, exposure device, and device manufacturing method
Grant 9,523,918 - Miyake , et al. December 20, 2 | 2016-12-20 |
Catadioptric imaging lens
Grant 9,395,525 - Matsumoto , et al. July 19, 2 | 2016-07-19 |
Illumination Optical System, Exposure Apparatus, Device Production Method, And Light Polarization Unit
App 20140233008 - Tanitsu; Osamu ; et al. | 2014-08-21 |
Illumination Optical Assembly, Exposure Device, And Device Manufacturing Method
App 20140211174 - Miyake; Norio ; et al. | 2014-07-31 |
Catadioptric Imaging Lens
App 20140211330 - Matsumoto; Miho ; et al. | 2014-07-31 |
Reference sphere detecting device, reference sphere position detecting device, and three-dimensional-coordinate measuring device
Grant 8,314,939 - Kato November 20, 2 | 2012-11-20 |
Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus
Grant 7,956,984 - Tanaka , et al. June 7, 2 | 2011-06-07 |
Reference Sphere Detecting Device, Reference Sphere Position Detecting Device, And Three-dimensional-coordinate Measuring Device
App 20110013200 - KATO; Kinya | 2011-01-20 |
Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus
App 20080192216 - Tanaka; Masashi ; et al. | 2008-08-14 |
Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus
Grant 7,372,544 - Tanaka , et al. May 13, 2 | 2008-05-13 |
Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus
Grant 7,372,543 - Tanaka , et al. May 13, 2 | 2008-05-13 |
Optical device and three-dimensional display device
Grant 7,336,244 - Suyama , et al. February 26, 2 | 2008-02-26 |
Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus
App 20070216885 - Tanaka; Masashi ; et al. | 2007-09-20 |
Method of manufacturing optical glass element
App 20070204655 - Kato; Kinya | 2007-09-06 |
Optical device and three-dimensional display device
Grant 7,209,097 - Suyama , et al. April 24, 2 | 2007-04-24 |
Charged-particle-beam mapping projection-optical systems and methods for adjusting same
Grant 7,183,562 - Nishimura , et al. February 27, 2 | 2007-02-27 |
Decomposition apparatus and decomposition method
Grant 7,169,287 - Miura , et al. January 30, 2 | 2007-01-30 |
Apparatus for decomposing gaseous aliphatic hydrocarbon halide compounds
Grant 7,163,665 - Kato January 16, 2 | 2007-01-16 |
Method of treating substance to be degraded and its apparatus
Grant 7,163,615 - Kato , et al. January 16, 2 | 2007-01-16 |
Method and apparatus for decomposition of substance contained in gas
Grant 7,144,556 - Kato December 5, 2 | 2006-12-05 |
Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus
App 20060238729 - Tanaka; Masashi ; et al. | 2006-10-26 |
Polluted soil remediation apparatus and pollutant degrading apparatus
Grant 7,108,837 - Kato , et al. September 19, 2 | 2006-09-19 |
Charged-particle-beam mapping projection-optical systems and methods for adjusting same
App 20060192120 - Nishimura; Hiroshi ; et al. | 2006-08-31 |
Decomposition apparatus and decomposition method
Grant 7,083,707 - Miura , et al. August 1, 2 | 2006-08-01 |
Charged-particle-beam mapping projection-optical systems and methods for adjusting same
Grant 7,064,339 - Nishimura , et al. June 20, 2 | 2006-06-20 |
Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus
Grant 7,023,527 - Tanaka , et al. April 4, 2 | 2006-04-04 |
Method and apparatus for processing substances to be decomposed
Grant 7,018,514 - Kato , et al. March 28, 2 | 2006-03-28 |
Method and apparatus for decomposing pollutants
App 20050034971 - Kato, Kinya ; et al. | 2005-02-17 |
Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus
App 20050012917 - Tanaka, Masashi ; et al. | 2005-01-20 |
Optical device and display apparatus having a plate-shaped light guide and an optical control surface thereon
Grant 6,836,314 - Date , et al. December 28, 2 | 2004-12-28 |
Method of decomposing pollutants and apparatus for the same
Grant 6,833,115 - Kato , et al. December 21, 2 | 2004-12-21 |
Charged-particle-beam mapping projection-optical systems and methods for adjusting same
App 20040251428 - Nishimura, Hiroshi ; et al. | 2004-12-16 |
Method for making a lens molding die and method for manufacturing a lens
App 20040244421 - Kato, Kinya ; et al. | 2004-12-09 |
Optical device and display apparatus using light diffraction and light guide
Grant 6,819,393 - Date , et al. November 16, 2 | 2004-11-16 |
Process for preparing trichloracetic acid and apparatus for use in such process
Grant 6,800,257 - Kuriyama , et al. October 5, 2 | 2004-10-05 |
Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus
Grant 6,795,169 - Tanaka , et al. September 21, 2 | 2004-09-21 |
Optical device and three-dimensional display device
App 20040164927 - Suyama, Shiro ; et al. | 2004-08-26 |
Optical device and three-dimensional display device
App 20040160389 - Suyama, Shiro ; et al. | 2004-08-19 |
Method for treating colored liquid and apparatus for treating colored liquid
Grant 6,776,886 - Kuriyama , et al. August 17, 2 | 2004-08-17 |
Charged-particle-beam mapping projection-optical systems and methods for adjusting same
Grant 6,765,217 - Nishimura , et al. July 20, 2 | 2004-07-20 |
Method for decomposing a pollutant
App 20040127764 - Kuriyama, Akira ; et al. | 2004-07-01 |
Optical device and display apparatus
App 20040095524 - Date, Munekazu ; et al. | 2004-05-20 |
Apparatus for decomposing halogenated aliphatic hydrocarbon compounds or aromatic compounds
Grant 6,716,399 - Kato , et al. April 6, 2 | 2004-04-06 |
Optical device and three-dimensional display device
Grant 6,714,174 - Suyama , et al. March 30, 2 | 2004-03-30 |
Process and system for decomposing pollutants
Grant 6,699,370 - Kuriyama , et al. March 2, 2 | 2004-03-02 |
Process for decomposing decomposition-object and apparatus therefor
App 20030233020 - Kato, Kinya | 2003-12-18 |
Method and apparatus for decomposition of substance contained in gas
App 20030202921 - Kato, Kinya | 2003-10-30 |
Method for treating colored liquid and apparatus for treating colored liquid
App 20030201159 - Kuriyama, Akira ; et al. | 2003-10-30 |
Apparatus for decomposing halogenated aliphatic hydrocarbon compounds or aromatic compounds
App 20030196886 - Kato, Kinya ; et al. | 2003-10-23 |
Optical device having reverse mode holographic PDLC and front light guide
Grant 6,618,104 - Date , et al. September 9, 2 | 2003-09-09 |
Method Of Decomposing Halogenated Aliphatic Hydrocarbon Compounds Or Aromatic Compounds And Apparatus To Be Used For The Same As Well As Method Of Clarifying Exhaust Gas And Apparatus To Be Used For The Same
Grant 6,616,815 - Kato , et al. September 9, 2 | 2003-09-09 |
Apparatus for decomposing halogenated aliphatic hydrocarbon compounds or aromatic compounds
App 20030164286 - Kato, Kinya ; et al. | 2003-09-04 |
Method for decomposing halogenated aliphatic hydrocarbon compounds or aromatic compounds, method for cleaning medium contaminated with at least one of these compounds, and apparatus for these
Grant 6,610,178 - Kato , et al. August 26, 2 | 2003-08-26 |
Purifying apparatus for contaminated water and ground water and method thereof
Grant 6,599,431 - Kawaguchi , et al. July 29, 2 | 2003-07-29 |
Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus
App 20030137644 - Tanaka, Masashi ; et al. | 2003-07-24 |
Method for separating each substance from mixed gas containing plural substance and apparatus thereof
App 20030121867 - Nakazawa, Miwa ; et al. | 2003-07-03 |
Method for separating each substance from mixed gas containing plural substances and apparatus thereof
App 20030124042 - Nakazawa, Miwa ; et al. | 2003-07-03 |
Method and apparatus for processing substances to be decomposed
App 20030089595 - Kato, Kinya ; et al. | 2003-05-15 |
Method of treating substance to be degraded and its apparatus
App 20030089594 - Kato, Kinya ; et al. | 2003-05-15 |
Exposure/imaging apparatus and method in which imaging characteristics of a projection optical system are adjusted
Grant 6,556,278 - Tanaka , et al. April 29, 2 | 2003-04-29 |
Polluted soil remediation apparatus and pollutant degrading apparatus
App 20030065237 - Kato, Kinya ; et al. | 2003-04-03 |
Decomposition apparatus and decomposition method
App 20030019742 - Miura, Toshihiko ; et al. | 2003-01-30 |
Decomposition apparatus and decomposition method
App 20030019743 - Miura, Toshihiko ; et al. | 2003-01-30 |
Aperture stop having central aperture region defined by a circular ARC and peripheral region with decreased width, and exposure apparatus and method
Grant 6,509,954 - Tanaka , et al. January 21, 2 | 2003-01-21 |
Apparatus for decomposing gaseous aliphatic hydrocarbon halide compounds
App 20020189929 - Kato, Kinya | 2002-12-19 |
Apparatus for treating gas containing substance to be decomposed and method of treating its gas
App 20020162453 - Kato, Kinya | 2002-11-07 |
Method For Decomposing Halogenated Aliphatic Hydrocarbon Compounds Or Aromatic Compounds, Method For Cleaning Medium Contaminated With At Least One Of These Compounds, And Apparatus For These
App 20020163135 - KATO, KINYA ; et al. | 2002-11-07 |
Method for decomposing halogenated aliphatic hydrocarbon compounds having adsorption process and apparatus for decomposition having adsorption means
Grant 6,462,250 - Kuriyama , et al. October 8, 2 | 2002-10-08 |
Method Of Decomposing Halogenated Aliphatic Hydrocarbon Compounds Or Aromatic Compounds And Apparatus To Be Used For The Same As Well As Method Of Clarifying Exhaust Gas And Apparatus To Be Used For The Same
App 20020130030 - KATO, KINYA ; et al. | 2002-09-19 |
Method and apparatus for decomposing pollutant
App 20020103409 - Kuriyama, Akira ; et al. | 2002-08-01 |
Method of decomposing pollutants and apparatus for the same
App 20020068845 - Kato, Kinya ; et al. | 2002-06-06 |
Optical device and three-dimensional display device
App 20020047837 - Suyama, Shiro ; et al. | 2002-04-25 |
Purifying apparatus for contaminated water and ground water and method thereof
App 20020036174 - Kawaguichi, Masahiro ; et al. | 2002-03-28 |
Exposure apparatus and exposure method for transferring pattern onto a substrate
Grant 6,351,305 - Tanaka , et al. February 26, 2 | 2002-02-26 |
Projection exposure apparatus
App 20020021431 - Hamada, Tomohide ; et al. | 2002-02-21 |
Process and system for decomposing pollutants
App 20020017496 - Kuriyama, Akira ; et al. | 2002-02-14 |
Apparatus for treating gas containing substance to be decomposed and method of treating its gas
App 20020014152 - Kato, Kinya | 2002-02-07 |
Method and apparatus for purifying polluted soil, and apparatus for emitting chlorine-containing gas and apparatus for decomposing polluted gas using the same
App 20020008069 - Kato, Kinya ; et al. | 2002-01-24 |
Method For Treating Colored Liquid And Apparatus For Treating Colored Liquid
App 20020008013 - KURIYAMA, AKIRA ; et al. | 2002-01-24 |
Polluted soil remediation apparatus, polluted soil remediation method, pollutant degrading apparatus and pollutant degrading method
App 20010023852 - Kato, Kinya ; et al. | 2001-09-27 |
Defect inspection apparatus
App 20010017694 - Oomori, Takeo ; et al. | 2001-08-30 |
Pseudomonas cepacia strain isolated from termite intestines that degrades trichlorethylene and furan compounds
Grant 6,096,530 - Kato , et al. August 1, 2 | 2000-08-01 |
Exposure apparatus
Grant 6,049,372 - Kato , et al. April 11, 2 | 2000-04-11 |
Method for biodegrading trichloroethylene and method for biodegrading chlorinated organic compound by microorganisms
Grant 5,993,658 - Kato , et al. November 30, 1 | 1999-11-30 |
Partially double-stranded oligonucleotide and method for forming oligonucleotide
Grant 5,830,643 - Yamamoto , et al. November 3, 1 | 1998-11-03 |
Interferometer, adjusting method therefor, stage apparatus having the interferometer, and exposure apparatus having the stage apparatus
Grant 5,764,361 - Kato , et al. June 9, 1 | 1998-06-09 |
Optical devices with high polymer material and method of forming the same
Grant 5,751,452 - Tanaka , et al. May 12, 1 | 1998-05-12 |
Method for making an optical device using a laser beam interference pattern
Grant 5,748,272 - Tanaka , et al. May 5, 1 | 1998-05-05 |
Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus
Grant 5,729,331 - Tanaka , et al. March 17, 1 | 1998-03-17 |
Method for biodegradation of polluting substance
Grant 5,658,795 - Kato , et al. August 19, 1 | 1997-08-19 |
Exposure apparatus and exposure method for minimizing defocusing of the transferred pattern
Grant 5,640,227 - Kato , et al. June 17, 1 | 1997-06-17 |
Projection exposure apparatus and method with a plurality of projection optical units
Grant 5,614,988 - Kato , et al. March 25, 1 | 1997-03-25 |
Method for forming proteoliposome and method for forming giant proteoliposome
Grant 5,374,715 - Kanno , et al. December 20, 1 | 1994-12-20 |
Method for forming proteoliposome and method for forming giant proteoliposome
Grant 5,227,470 - Kanno , et al. July 13, 1 | 1993-07-13 |
Active matrix structure for liquid crystal display elements wherein each of the gate/data lines includes at least a molybdenum-base alloy layer containing 0.5 to 10 wt. % of chromium
Grant 5,162,933 - Kakuda , et al. Nov | 1992-11-10 |
Thin film transistor
Grant 5,124,769 - Tanaka , et al. June 23, 1 | 1992-06-23 |
Ion permeable membrane and ion transport method by utilizing said membrane
Grant 5,041,224 - Ohyama , et al. August 20, 1 | 1991-08-20 |
Projection exposure apparatus
Grant 4,965,630 - Kato , et al. October 23, 1 | 1990-10-23 |
Apparatus with four light detectors for checking surface of mask with pellicle
Grant 4,889,998 - Hayano , et al. December 26, 1 | 1989-12-26 |
Pattern detecting apparatus utilizing energy beam
Grant 4,769,551 - Hamashima , et al. September 6, 1 | 1988-09-06 |
Pattern position detection apparatus using laser beam
Grant 4,744,663 - Hamashima , et al. May 17, 1 | 1988-05-17 |
Optical apparatus for the detection of scattered light
Grant 4,690,565 - Kato , et al. September 1, 1 | 1987-09-01 |
Optical alignment apparatus
Grant 4,660,966 - Kato , et al. April 28, 1 | 1987-04-28 |
Apparatus for aligning mask and wafer used in semiconductor circuit element fabrication
Grant 4,636,626 - Hazama , et al. January 13, 1 | 1987-01-13 |
Variable magnification observation apparatus
Grant 4,530,578 - Kato July 23, 1 | 1985-07-23 |
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