loadpatents
Patent applications and USPTO patent grants for KATE; Nicolaas TEN.The latest application filed is for "lithographic apparatus and device manufacturing method".
Patent | Date |
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Lithographic Apparatus And Device Manufacturing Method App 20180081285 - BECKERS; Marcel ;   et al. | 2018-03-22 |
Lithographic apparatus and device manufacturing method Grant 9,746,788 - Kemper , et al. August 29, 2 | 2017-08-29 |
Lithographic Apparatus And Device Manufacturing Method App 20160370713 - BECKERS; Marcel ;   et al. | 2016-12-22 |
Lithographic apparatus and device manufacturing method involving a heater and a temperature sensor Grant 9,268,242 - Cadee , et al. February 23, 2 | 2016-02-23 |
Lithographic apparatus and device manufacturing method Grant 8,988,651 - Beckers , et al. March 24, 2 | 2015-03-24 |
Lithographic apparatus and device manufacturing method Grant 8,446,563 - Kemper , et al. May 21, 2 | 2013-05-21 |
Lithographic apparatus Grant 8,421,996 - Leenders , et al. April 16, 2 | 2013-04-16 |
Fluid Handling Structure, A Lithographic Apparatus And A Device Manufacturing Method App 20130016332 - Cortie; Rogier Hendrikus Magdalena ;   et al. | 2013-01-17 |
Substrate Holder, Lithographic Apparatus, Device Manufacturing Method, And Method Of Manufacturing A Substrate Holder App 20120212725 - LAFARRE; Raymond Wilhelmus Louis ;   et al. | 2012-08-23 |
Lithographic Apparatus And Device Manufacturing Method App 20110273675 - Kemper; Nicolaas Rudolf ;   et al. | 2011-11-10 |
Lithographic Apparatus And Device Manufacturing Method App 20100134769 - Mulkens; Johannes Catharinus Hubertus ;   et al. | 2010-06-03 |
Lithographic apparatus and device manufacturing method Grant 7,705,962 - Kemper , et al. April 27, 2 | 2010-04-27 |
Lithographic Apparatus And Device Manufacturing Method App 20090303455 - Kemper; Nicolaas Rudolf ;   et al. | 2009-12-10 |
Lithographic apparatus and device manufacturing method App 20090168042 - Kroonen; Roger Johannes Maria Hubertus ;   et al. | 2009-07-02 |
Lithographic apparatus and device manufacturing method App 20090168032 - Kate; Nicolaas Ten ;   et al. | 2009-07-02 |
Lithographic apparatus and device manufacturing method App 20090009734 - Belfroid; Stefan Philip Christiaan ;   et al. | 2009-01-08 |
Lithographic apparatus and device manufacturing method App 20080212051 - Beckers; Marcel ;   et al. | 2008-09-04 |
Lithographic apparatus and device manufacturing method App 20080073602 - Jacobs; Hernes ;   et al. | 2008-03-27 |
Lithographic apparatus and device manufacturing method App 20080007704 - Leenders; Martinus Hendrikus Antonius ;   et al. | 2008-01-10 |
Lithographic apparatus and device manufacturing method App 20070268466 - Antonius Leenders; Martinus Hendrikus ;   et al. | 2007-11-22 |
Liquid immersion lithography system having a tilted showerhead relative to a substrate Grant 7,256,864 - Kate , et al. August 14, 2 | 2007-08-14 |
Lithographic apparatus App 20070109512 - Kate; Nicolaas Ten ;   et al. | 2007-05-17 |
Lithographic apparatus App 20070110213 - Leenders; Martinus Hendrikus Antonius ;   et al. | 2007-05-17 |
Lithographic apparatus and device manufacturing method App 20070081140 - Beckers; Marcel ;   et al. | 2007-04-12 |
Lithographic apparatus and device manufacturing method App 20070070315 - Jacobs; Johannes Henricus Wilhelmus ;   et al. | 2007-03-29 |
Lithographic apparatus and device manufacturing method App 20070030464 - Kemper; Nicolaas Rudolf ;   et al. | 2007-02-08 |
Liquid immersion lithography system having a tilted showerhead relative to a substrate App 20060238721 - Kate; Nicolaas Ten ;   et al. | 2006-10-26 |
Lithographic apparatus and device manufacturing method App 20060221315 - Beckers; Marcel ;   et al. | 2006-10-05 |
Lithographic apparatus and device manufacturing method App 20060158627 - Kemper; Nicolaas Rudolf ;   et al. | 2006-07-20 |
Lithographic apparatus, reticle exchange unit and device manufacturing method App 20060119808 - Kate; Nicolaas Ten | 2006-06-08 |
Lithographic apparatus and device manufacturing method App 20060103816 - Belfroid; Stefan Philip Christiaan ;   et al. | 2006-05-18 |
Lithographic apparatus and device manufacturing method App 20060087630 - Kemper; Nicolaas Rudolf ;   et al. | 2006-04-27 |
Lithographic apparatus and device manufacturing method App 20060038968 - Kemper; Nicolaas Rudolf ;   et al. | 2006-02-23 |
Lithographic apparatus and device manufacturing method App 20060033898 - Cadee; Theodorus Petrus Maria ;   et al. | 2006-02-16 |
Lithographic apparatus having a gas flushing device App 20050264773 - Beckers, Marcel ;   et al. | 2005-12-01 |
Method and system for active purging of pellice volumes App 20050074352 - Luo, Ci Florence ;   et al. | 2005-04-07 |
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