loadpatents
Patent applications and USPTO patent grants for Katano; Makiko.The latest application filed is for "analytical apparatus, sample holder and analytical method".
Patent | Date |
---|---|
Analytical apparatus, sample holder and analytical method Grant 9,734,985 - Akutsu , et al. August 15, 2 | 2017-08-15 |
Analytical Apparatus, Sample Holder And Analytical Method App 20170004954 - AKUTSU; Haruko ;   et al. | 2017-01-05 |
Impurity analysis device and method Grant 8,932,954 - Yamada , et al. January 13, 2 | 2015-01-13 |
Cleanliness Measuring Carriage And Cleanliness Measuring System App 20140230522 - UEMURA; Eri ;   et al. | 2014-08-21 |
Sample contamination method Grant 8,771,535 - Yamada , et al. July 8, 2 | 2014-07-08 |
Impurity Analysis Device And Method App 20130244349 - Yamada; Yuji ;   et al. | 2013-09-19 |
Sample Contamination Method App 20120149199 - YAMADA; Yuji ;   et al. | 2012-06-14 |
Method for manufacturing electronic device Grant 8,119,020 - Ito , et al. February 21, 2 | 2012-02-21 |
Mask Cleaning Method, Mask Cleaning Apparatus, And Pellicle App 20110203611 - UEMURA; Eri ;   et al. | 2011-08-25 |
Method Of Cleaning Mask And Mask Cleaning Apparatus App 20110100393 - UEMURA; Eri ;   et al. | 2011-05-05 |
Semiconductor Device Fabrication Mask And Method Of Manufacturing The Same App 20110053058 - OTSUBO; Kyo ;   et al. | 2011-03-03 |
Immersion lithography apparatus and exposure method Grant 7,889,313 - Katano , et al. February 15, 2 | 2011-02-15 |
Immersion Lithography Apparatus and Exposure Method App 20080106713 - Katano; Makiko ;   et al. | 2008-05-08 |
Method for manufacturing electronic device App 20080023442 - Ito; Shoko ;   et al. | 2008-01-31 |
Local clean robot-transport plant and robot-transport manufacturing method App 20070274814 - Kawasaki; Atsuko ;   et al. | 2007-11-29 |
Exposure apparatus and semiconductor device manufacturing method App 20070268467 - Katano; Makiko ;   et al. | 2007-11-22 |
Method of manufacturing semiconductor device Grant 7,232,763 - Omura , et al. June 19, 2 | 2007-06-19 |
Air impurity measurement apparatus and method App 20050169806 - Katano, Makiko ;   et al. | 2005-08-04 |
Method of manufacturing semiconductor device App 20050106866 - Omura, Mitsuhiro ;   et al. | 2005-05-19 |
Method of maintaining cleanliness of substrates and box for accommodating substrates Grant 6,284,020 - Mizuno , et al. September 4, 2 | 2001-09-04 |
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