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Patent applications and USPTO patent grants for Kaskey; Jeffrey.The latest application filed is for "active eye-to-eye with alignment by x-y capacitance measurement".
Patent | Date |
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Active eye-to-eye with alignment by X-Y capacitance measurement Grant 10,114,297 - Laidig , et al. October 30, 2 | 2018-10-30 |
Methods and apparatus for vibration damping stage Grant 10,031,427 - Johnston , et al. July 24, 2 | 2018-07-24 |
Illumination system with monitoring optical output power Grant 9,907,152 - Kaskey , et al. February 27, 2 | 2018-02-27 |
Active Eye-to-eye With Alignment By X-y Capacitance Measurement App 20180024436 - LAIDIG; Thomas L. ;   et al. | 2018-01-25 |
Optical projection array exposure system Grant 9,733,573 - Markle , et al. August 15, 2 | 2017-08-15 |
Methods And Apparatus For Vibration Damping Stage App 20170090303 - JOHNSTON; Benjamin M. ;   et al. | 2017-03-30 |
Illumination System With Monitoring Optical Output Power App 20160219684 - KASKEY; Jeffrey ;   et al. | 2016-07-28 |
Optical Projection Array Exposure System App 20160124316 - MARKLE; David ;   et al. | 2016-05-05 |
Optical projection array exposure system Grant 9,250,509 - Markle , et al. February 2, 2 | 2016-02-02 |
Method and system for handling substrates Grant 8,914,143 - Kaskey , et al. December 16, 2 | 2014-12-16 |
Optical Projection Array Exposure System App 20130321786 - MARKLE; David ;   et al. | 2013-12-05 |
Illumination System App 20130207544 - Kaskey; Jeffrey ;   et al. | 2013-08-15 |
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