Patent | Date |
---|
Treating solution supply apparatus Grant 11,404,629 - Nishimura , et al. August 2, 2 | 2022-08-02 |
Filter coupling device and substrate treating apparatus provided therewith Grant 11,358,076 - Kashiyama , et al. June 14, 2 | 2022-06-14 |
Substrate treating apparatus Grant 11,114,316 - Kabune , et al. September 7, 2 | 2021-09-07 |
Pumping apparatus, treatment solution supplying device, and substrate treating apparatus Grant 11,000,783 - Nishimura , et al. May 11, 2 | 2021-05-11 |
Pumping apparatus, treatment solution supplying device, substrate treating apparatus, liquid draining method, and liquid replacing method Grant 10,920,764 - Nishimura , et al. February 16, 2 | 2021-02-16 |
Liquid processing apparatus and liquid processing method Grant 10,824,074 - Kashiyama November 3, 2 | 2020-11-03 |
Substrate treating apparatus and substrate treating method Grant 10,818,520 - Kashiyama , et al. October 27, 2 | 2020-10-27 |
Pump apparatus and substrate treating apparatus Grant 10,790,165 - Kashiyama September 29, 2 | 2020-09-29 |
Liquid Processing Apparatus And Liquid Processing Method App 20200264512 - KASHIYAMA; Masahito | 2020-08-20 |
Pumping apparatus and substrate treating apparatus Grant 10,627,836 - Momma , et al. | 2020-04-21 |
Filter coupling device and a substrate treating apparatus having same Grant 10,617,983 - Kashiyama , et al. | 2020-04-14 |
Pump apparatus and substrate treating apparatus Grant 10,507,484 - Kashiyama Dec | 2019-12-17 |
Pumping Apparatus And Substrate Treating Apparatus App 20190064853 - MOMMA; Toru ;   et al. | 2019-02-28 |
Pumping Apparatus, Treatment Solution Supplying Device, And Substrate Treating Apparatus App 20190060789 - NISHIMURA; Junki ;   et al. | 2019-02-28 |
Pumping Apparatus, Treatment Solution Supplying Device, Substrate Treating Apparatus, Liquid Draining Method, And Liquid Replacing Method App 20190063415 - NISHIMURA; Junki ;   et al. | 2019-02-28 |
Treating Solution Supply Apparatus App 20190060963 - NISHIMURA; Junki ;   et al. | 2019-02-28 |
Filter Coupling Device And Substrate Treating Apparatus Provided Therewith App 20180272257 - KASHIYAMA; Masahito ;   et al. | 2018-09-27 |
Substrate treating apparatus and substrate treating method Grant 10,056,270 - Kashiyama , et al. August 21, 2 | 2018-08-21 |
Substrate Treating Apparatus And Substrate Treating Method App 20180130678 - KASHIYAMA; Masahito ;   et al. | 2018-05-10 |
Pump Apparatus And Substrate Treating Apparatus App 20180061676 - KASHIYAMA; Masahito | 2018-03-01 |
Processing Liquid Supplying Apparatus And Method Of Controlling Processing Liquid Supplying Apparatus App 20180046083 - KASHIYAMA; Masahito | 2018-02-15 |
Substrate Treating Apparatus App 20180025921 - KABUNE; Kota ;   et al. | 2018-01-25 |
Pump Apparatus And Substrate Treating Apparatus App 20170232460 - KASHIYAMA; Masahito | 2017-08-17 |
Alignment device and substrate processing apparatus Grant 9,685,363 - Kashiyama June 20, 2 | 2017-06-20 |
Nozzle Standby Device And Substrate Treating Apparatus App 20170128962 - KASHIYAMA; Masahito ;   et al. | 2017-05-11 |
Filter Coupling Device And A Substrate Treating Apparatus Having Same App 20170120173 - KASHIYAMA; Masahito ;   et al. | 2017-05-04 |
Substrate processing apparatus and substrate processing method Grant 9,539,607 - Kuwahara , et al. January 10, 2 | 2017-01-10 |
Substrate processing apparatus and substrate processing method Grant 9,508,573 - Kashiyama , et al. November 29, 2 | 2016-11-29 |
Substrate processing apparatus and substrate processing method Grant 9,465,293 - Kashiyama , et al. October 11, 2 | 2016-10-11 |
Substrate Treating Apparatus And Substrate Treating Method App 20160271655 - KASHIYAMA; Masahito ;   et al. | 2016-09-22 |
Substrate Cleaning And Drying Method And Substrate Developing Method App 20140261571 - GOTO; Tomohiro ;   et al. | 2014-09-18 |
Alignment Device And Substrate Processing Apparatus App 20140196663 - KASHIYAMA; Masahito | 2014-07-17 |
Substrate Processing Apparatus And Substrate Processing Method App 20140065309 - KASHIYAMA; Masahito ;   et al. | 2014-03-06 |
Substrate Processing Apparatus And Substrate Processing Method App 20140023776 - KUWAHARA; Joji ;   et al. | 2014-01-23 |
Substrate Processing Apparatus App 20130312658 - KASHIYAMA; Masahito ;   et al. | 2013-11-28 |
Substrate processing apparatus, substrate processing system and inspection/periphery exposure apparatus Grant 8,477,301 - Kashiyama , et al. July 2, 2 | 2013-07-02 |
Substrate Processing Apparatus And Substrate Processing Method App 20130084393 - KASHIYAMA; Masahito ;   et al. | 2013-04-04 |
Substrate Processing Apparatus, Substrate Processing System And Inspection/periphery Exposure Apparatus App 20110063588 - KASHIYAMA; Masahito ;   et al. | 2011-03-17 |